3/11/2012	11:18:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	11:18:38 AM	Recipe started at 11:18 AM
3/11/2012	11:18:38 AM	Helium valve closed
3/11/2012	11:18:38 AM	H2 valve closed
3/11/2012	11:18:38 AM	BCl3 valve closed
3/11/2012	11:18:38 AM	PH3 valve closed
3/11/2012	11:18:38 AM	SiCl4 pre valve closed
3/11/2012	11:18:38 AM	SiCl4 post valve closed
3/11/2012	11:18:38 AM	Main Vac valve closed
3/11/2012	11:18:38 AM	Bypass valve closed
3/11/2012	11:18:38 AM	Bubbler valve closed
3/11/2012	11:18:38 AM	Helium MFC set to  0.000000
3/11/2012	11:18:38 AM	H2 MFC set to  0.000000
3/11/2012	11:18:38 AM	BCl3 MFC set to  0.000000
3/11/2012	11:18:38 AM	PH3 MFC set to  0.000000
3/11/2012	11:18:38 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:18:38 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:18:38 AM	Tube furnace set to 0
3/11/2012	11:18:41 AM	H2 valve closed
3/11/2012	11:18:41 AM	BCl3 valve closed
3/11/2012	11:18:41 AM	PH3 valve closed
3/11/2012	11:18:41 AM	SiCl4 pre valve closed
3/11/2012	11:18:41 AM	SiCl4 post valve closed
3/11/2012	11:18:41 AM	Main Vac valve closed
3/11/2012	11:18:41 AM	Bypass valve closed
3/11/2012	11:18:41 AM	Bubbler valve closed
3/11/2012	11:18:41 AM	Helium valve opened
3/11/2012	11:18:41 AM	Helium MFC set to  500.000000
3/11/2012	11:18:41 AM	H2 MFC set to  0.000000
3/11/2012	11:18:41 AM	BCl3 MFC set to  0.000000
3/11/2012	11:18:41 AM	PH3 MFC set to  0.000000
3/11/2012	11:18:41 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:18:41 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:18:42 AM	Tube furnace set to 0
3/11/2012	11:19:46 AM	Helium valve closed
3/11/2012	11:19:46 AM	H2 valve closed
3/11/2012	11:19:46 AM	BCl3 valve closed
3/11/2012	11:19:46 AM	PH3 valve closed
3/11/2012	11:19:46 AM	SiCl4 pre valve closed
3/11/2012	11:19:46 AM	SiCl4 post valve closed
3/11/2012	11:19:46 AM	Main Vac valve closed
3/11/2012	11:19:46 AM	Bypass valve closed
3/11/2012	11:19:46 AM	Bubbler valve closed
3/11/2012	11:19:46 AM	Helium MFC set to  0.000000
3/11/2012	11:19:46 AM	H2 MFC set to  0.000000
3/11/2012	11:19:46 AM	BCl3 MFC set to  0.000000
3/11/2012	11:19:46 AM	PH3 MFC set to  0.000000
3/11/2012	11:19:46 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:19:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:19:46 AM	Tube furnace set to 0
3/11/2012	11:19:47 AM	Run finished at 11:19 AM
3/11/2012	11:19:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	11:24:10 AM	Tube furnace set to 250
3/11/2012	11:24:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	11:24:14 AM	Recipe started at 11:24 AM
3/11/2012	11:24:14 AM	Helium valve closed
3/11/2012	11:24:15 AM	H2 valve closed
3/11/2012	11:24:15 AM	BCl3 valve closed
3/11/2012	11:24:15 AM	PH3 valve closed
3/11/2012	11:24:15 AM	SiCl4 pre valve closed
3/11/2012	11:24:15 AM	SiCl4 post valve closed
3/11/2012	11:24:15 AM	Main Vac valve closed
3/11/2012	11:24:15 AM	Bubbler valve closed
3/11/2012	11:24:15 AM	Bypass valve opened
3/11/2012	11:24:15 AM	Helium MFC set to  0.000000
3/11/2012	11:24:15 AM	H2 MFC set to  0.000000
3/11/2012	11:24:15 AM	BCl3 MFC set to  0.000000
3/11/2012	11:24:15 AM	PH3 MFC set to  0.000000
3/11/2012	11:24:15 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:24:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:24:15 AM	Tube furnace set to 0
3/11/2012	11:25:18 AM	Helium valve closed
3/11/2012	11:25:18 AM	H2 valve closed
3/11/2012	11:25:18 AM	BCl3 valve closed
3/11/2012	11:25:18 AM	PH3 valve closed
3/11/2012	11:25:18 AM	SiCl4 pre valve closed
3/11/2012	11:25:18 AM	SiCl4 post valve closed
3/11/2012	11:25:18 AM	Main Vac valve closed
3/11/2012	11:25:18 AM	Bubbler valve closed
3/11/2012	11:25:18 AM	Bypass valve opened
3/11/2012	11:25:18 AM	Helium MFC set to  0.000000
3/11/2012	11:25:18 AM	H2 MFC set to  0.000000
3/11/2012	11:25:18 AM	BCl3 MFC set to  0.000000
3/11/2012	11:25:18 AM	PH3 MFC set to  0.000000
3/11/2012	11:25:18 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:25:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:25:19 AM	Tube furnace set to 0
3/11/2012	11:26:19 AM	Helium valve closed
3/11/2012	11:26:19 AM	H2 valve closed
3/11/2012	11:26:19 AM	BCl3 valve closed
3/11/2012	11:26:19 AM	PH3 valve closed
3/11/2012	11:26:19 AM	SiCl4 pre valve closed
3/11/2012	11:26:19 AM	SiCl4 post valve closed
3/11/2012	11:26:19 AM	Bypass valve closed
3/11/2012	11:26:19 AM	Bubbler valve closed
3/11/2012	11:26:19 AM	Main Vac valve opened
3/11/2012	11:26:19 AM	Helium MFC set to  0.000000
3/11/2012	11:26:19 AM	H2 MFC set to  0.000000
3/11/2012	11:26:19 AM	BCl3 MFC set to  0.000000
3/11/2012	11:26:19 AM	PH3 MFC set to  0.000000
3/11/2012	11:26:19 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:26:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:26:19 AM	Tube furnace set to 0
3/11/2012	11:26:20 AM	Run finished at 11:26 AM
3/11/2012	11:26:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	11:26:26 AM	Tube furnace set to 200
3/11/2012	11:30:17 AM	Recipe started at 11:30 AM
3/11/2012	11:30:18 AM	Helium valve closed
3/11/2012	11:30:18 AM	H2 valve closed
3/11/2012	11:30:18 AM	BCl3 valve closed
3/11/2012	11:30:18 AM	PH3 valve closed
3/11/2012	11:30:18 AM	SiCl4 pre valve closed
3/11/2012	11:30:18 AM	SiCl4 post valve closed
3/11/2012	11:30:18 AM	Bypass valve closed
3/11/2012	11:30:18 AM	Bubbler valve closed
3/11/2012	11:30:18 AM	Main Vac valve opened
3/11/2012	11:30:18 AM	Helium MFC set to  0.000000
3/11/2012	11:30:18 AM	H2 MFC set to  0.000000
3/11/2012	11:30:18 AM	BCl3 MFC set to  0.000000
3/11/2012	11:30:18 AM	PH3 MFC set to  0.000000
3/11/2012	11:30:18 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:30:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:30:18 AM	Tube furnace set to 0
3/11/2012	11:30:48 AM	H2 valve closed
3/11/2012	11:30:48 AM	BCl3 valve closed
3/11/2012	11:30:48 AM	PH3 valve closed
3/11/2012	11:30:48 AM	SiCl4 pre valve closed
3/11/2012	11:30:48 AM	SiCl4 post valve closed
3/11/2012	11:30:48 AM	Bypass valve closed
3/11/2012	11:30:48 AM	Bubbler valve closed
3/11/2012	11:30:48 AM	Helium valve opened
3/11/2012	11:30:48 AM	Main Vac valve opened
3/11/2012	11:30:48 AM	Helium MFC set to  20.000000
3/11/2012	11:30:48 AM	H2 MFC set to  0.000000
3/11/2012	11:30:48 AM	BCl3 MFC set to  0.000000
3/11/2012	11:30:48 AM	PH3 MFC set to  0.000000
3/11/2012	11:30:48 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:30:48 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:30:48 AM	Tube furnace set to 0
3/11/2012	11:31:18 AM	Helium valve closed
3/11/2012	11:31:18 AM	H2 valve closed
3/11/2012	11:31:18 AM	BCl3 valve closed
3/11/2012	11:31:18 AM	PH3 valve closed
3/11/2012	11:31:18 AM	SiCl4 pre valve closed
3/11/2012	11:31:18 AM	SiCl4 post valve closed
3/11/2012	11:31:18 AM	Bypass valve closed
3/11/2012	11:31:18 AM	Bubbler valve closed
3/11/2012	11:31:18 AM	Main Vac valve opened
3/11/2012	11:31:18 AM	Helium MFC set to  0.000000
3/11/2012	11:31:18 AM	H2 MFC set to  0.000000
3/11/2012	11:31:18 AM	BCl3 MFC set to  0.000000
3/11/2012	11:31:18 AM	PH3 MFC set to  0.000000
3/11/2012	11:31:18 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:31:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:31:18 AM	Tube furnace set to 0
3/11/2012	11:31:48 AM	H2 valve closed
3/11/2012	11:31:48 AM	BCl3 valve closed
3/11/2012	11:31:48 AM	PH3 valve closed
3/11/2012	11:31:48 AM	SiCl4 pre valve closed
3/11/2012	11:31:48 AM	SiCl4 post valve closed
3/11/2012	11:31:48 AM	Bypass valve closed
3/11/2012	11:31:48 AM	Bubbler valve closed
3/11/2012	11:31:48 AM	Helium valve opened
3/11/2012	11:31:48 AM	Main Vac valve opened
3/11/2012	11:31:48 AM	Helium MFC set to  20.000000
3/11/2012	11:31:48 AM	H2 MFC set to  0.000000
3/11/2012	11:31:48 AM	BCl3 MFC set to  0.000000
3/11/2012	11:31:48 AM	PH3 MFC set to  0.000000
3/11/2012	11:31:48 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:31:48 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:31:48 AM	Tube furnace set to 0
3/11/2012	11:32:18 AM	Helium valve closed
3/11/2012	11:32:18 AM	H2 valve closed
3/11/2012	11:32:18 AM	BCl3 valve closed
3/11/2012	11:32:18 AM	PH3 valve closed
3/11/2012	11:32:18 AM	SiCl4 pre valve closed
3/11/2012	11:32:18 AM	SiCl4 post valve closed
3/11/2012	11:32:18 AM	Bypass valve closed
3/11/2012	11:32:18 AM	Bubbler valve closed
3/11/2012	11:32:18 AM	Main Vac valve opened
3/11/2012	11:32:18 AM	Helium MFC set to  0.000000
3/11/2012	11:32:18 AM	H2 MFC set to  0.000000
3/11/2012	11:32:18 AM	BCl3 MFC set to  0.000000
3/11/2012	11:32:18 AM	PH3 MFC set to  0.000000
3/11/2012	11:32:18 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:32:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:32:19 AM	Tube furnace set to 0
3/11/2012	11:32:49 AM	H2 valve closed
3/11/2012	11:32:49 AM	BCl3 valve closed
3/11/2012	11:32:49 AM	PH3 valve closed
3/11/2012	11:32:49 AM	SiCl4 pre valve closed
3/11/2012	11:32:49 AM	SiCl4 post valve closed
3/11/2012	11:32:49 AM	Bypass valve closed
3/11/2012	11:32:49 AM	Bubbler valve closed
3/11/2012	11:32:49 AM	Helium valve opened
3/11/2012	11:32:49 AM	Main Vac valve opened
3/11/2012	11:32:49 AM	Helium MFC set to  20.000000
3/11/2012	11:32:49 AM	H2 MFC set to  0.000000
3/11/2012	11:32:49 AM	BCl3 MFC set to  0.000000
3/11/2012	11:32:49 AM	PH3 MFC set to  0.000000
3/11/2012	11:32:49 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:32:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:32:49 AM	Tube furnace set to 0
3/11/2012	11:33:19 AM	Helium valve closed
3/11/2012	11:33:19 AM	H2 valve closed
3/11/2012	11:33:19 AM	BCl3 valve closed
3/11/2012	11:33:19 AM	PH3 valve closed
3/11/2012	11:33:19 AM	SiCl4 pre valve closed
3/11/2012	11:33:19 AM	SiCl4 post valve closed
3/11/2012	11:33:19 AM	Bypass valve closed
3/11/2012	11:33:19 AM	Bubbler valve closed
3/11/2012	11:33:19 AM	Main Vac valve opened
3/11/2012	11:33:19 AM	Helium MFC set to  0.000000
3/11/2012	11:33:19 AM	H2 MFC set to  0.000000
3/11/2012	11:33:19 AM	BCl3 MFC set to  0.000000
3/11/2012	11:33:19 AM	PH3 MFC set to  0.000000
3/11/2012	11:33:19 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:33:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:33:19 AM	Tube furnace set to 0
3/11/2012	11:33:49 AM	H2 valve closed
3/11/2012	11:33:49 AM	BCl3 valve closed
3/11/2012	11:33:49 AM	PH3 valve closed
3/11/2012	11:33:49 AM	SiCl4 pre valve closed
3/11/2012	11:33:49 AM	SiCl4 post valve closed
3/11/2012	11:33:49 AM	Bypass valve closed
3/11/2012	11:33:49 AM	Bubbler valve closed
3/11/2012	11:33:49 AM	Helium valve opened
3/11/2012	11:33:49 AM	Main Vac valve opened
3/11/2012	11:33:49 AM	Helium MFC set to  20.000000
3/11/2012	11:33:49 AM	H2 MFC set to  0.000000
3/11/2012	11:33:49 AM	BCl3 MFC set to  0.000000
3/11/2012	11:33:49 AM	PH3 MFC set to  0.000000
3/11/2012	11:33:49 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:33:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:33:49 AM	Tube furnace set to 0
3/11/2012	11:34:19 AM	Helium valve closed
3/11/2012	11:34:19 AM	H2 valve closed
3/11/2012	11:34:19 AM	BCl3 valve closed
3/11/2012	11:34:19 AM	PH3 valve closed
3/11/2012	11:34:19 AM	SiCl4 pre valve closed
3/11/2012	11:34:19 AM	SiCl4 post valve closed
3/11/2012	11:34:19 AM	Bypass valve closed
3/11/2012	11:34:19 AM	Bubbler valve closed
3/11/2012	11:34:19 AM	Main Vac valve opened
3/11/2012	11:34:19 AM	Helium MFC set to  0.000000
3/11/2012	11:34:19 AM	H2 MFC set to  0.000000
3/11/2012	11:34:19 AM	BCl3 MFC set to  0.000000
3/11/2012	11:34:19 AM	PH3 MFC set to  0.000000
3/11/2012	11:34:19 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:34:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:34:19 AM	Tube furnace set to 0
3/11/2012	11:34:49 AM	H2 valve closed
3/11/2012	11:34:49 AM	BCl3 valve closed
3/11/2012	11:34:49 AM	PH3 valve closed
3/11/2012	11:34:49 AM	SiCl4 pre valve closed
3/11/2012	11:34:49 AM	SiCl4 post valve closed
3/11/2012	11:34:49 AM	Bypass valve closed
3/11/2012	11:34:49 AM	Bubbler valve closed
3/11/2012	11:34:49 AM	Helium valve opened
3/11/2012	11:34:49 AM	Main Vac valve opened
3/11/2012	11:34:49 AM	Helium MFC set to  20.000000
3/11/2012	11:34:49 AM	H2 MFC set to  0.000000
3/11/2012	11:34:49 AM	BCl3 MFC set to  0.000000
3/11/2012	11:34:49 AM	PH3 MFC set to  0.000000
3/11/2012	11:34:49 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:34:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:34:50 AM	Tube furnace set to 0
3/11/2012	11:35:20 AM	Helium valve closed
3/11/2012	11:35:20 AM	H2 valve closed
3/11/2012	11:35:20 AM	BCl3 valve closed
3/11/2012	11:35:20 AM	PH3 valve closed
3/11/2012	11:35:20 AM	SiCl4 pre valve closed
3/11/2012	11:35:20 AM	SiCl4 post valve closed
3/11/2012	11:35:20 AM	Bypass valve closed
3/11/2012	11:35:20 AM	Bubbler valve closed
3/11/2012	11:35:20 AM	Main Vac valve opened
3/11/2012	11:35:20 AM	Helium MFC set to  0.000000
3/11/2012	11:35:20 AM	H2 MFC set to  0.000000
3/11/2012	11:35:20 AM	BCl3 MFC set to  0.000000
3/11/2012	11:35:20 AM	PH3 MFC set to  0.000000
3/11/2012	11:35:20 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:35:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:35:20 AM	Tube furnace set to 0
3/11/2012	11:35:50 AM	H2 valve closed
3/11/2012	11:35:50 AM	BCl3 valve closed
3/11/2012	11:35:50 AM	PH3 valve closed
3/11/2012	11:35:50 AM	SiCl4 pre valve closed
3/11/2012	11:35:50 AM	SiCl4 post valve closed
3/11/2012	11:35:50 AM	Bypass valve closed
3/11/2012	11:35:50 AM	Bubbler valve closed
3/11/2012	11:35:50 AM	Helium valve opened
3/11/2012	11:35:50 AM	Main Vac valve opened
3/11/2012	11:35:50 AM	Helium MFC set to  20.000000
3/11/2012	11:35:50 AM	H2 MFC set to  0.000000
3/11/2012	11:35:50 AM	BCl3 MFC set to  0.000000
3/11/2012	11:35:50 AM	PH3 MFC set to  0.000000
3/11/2012	11:35:50 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:35:50 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:35:50 AM	Tube furnace set to 0
3/11/2012	11:36:20 AM	Helium valve closed
3/11/2012	11:36:20 AM	H2 valve closed
3/11/2012	11:36:20 AM	BCl3 valve closed
3/11/2012	11:36:20 AM	PH3 valve closed
3/11/2012	11:36:20 AM	SiCl4 pre valve closed
3/11/2012	11:36:20 AM	SiCl4 post valve closed
3/11/2012	11:36:20 AM	Bypass valve closed
3/11/2012	11:36:20 AM	Bubbler valve closed
3/11/2012	11:36:20 AM	Main Vac valve opened
3/11/2012	11:36:20 AM	Helium MFC set to  0.000000
3/11/2012	11:36:20 AM	H2 MFC set to  0.000000
3/11/2012	11:36:20 AM	BCl3 MFC set to  0.000000
3/11/2012	11:36:20 AM	PH3 MFC set to  0.000000
3/11/2012	11:36:20 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:36:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:36:20 AM	Tube furnace set to 0
3/11/2012	11:36:50 AM	H2 valve closed
3/11/2012	11:36:50 AM	BCl3 valve closed
3/11/2012	11:36:50 AM	PH3 valve closed
3/11/2012	11:36:50 AM	SiCl4 pre valve closed
3/11/2012	11:36:50 AM	SiCl4 post valve closed
3/11/2012	11:36:50 AM	Bypass valve closed
3/11/2012	11:36:50 AM	Bubbler valve closed
3/11/2012	11:36:50 AM	Helium valve opened
3/11/2012	11:36:50 AM	Main Vac valve opened
3/11/2012	11:36:50 AM	Helium MFC set to  20.000000
3/11/2012	11:36:50 AM	H2 MFC set to  0.000000
3/11/2012	11:36:50 AM	BCl3 MFC set to  0.000000
3/11/2012	11:36:50 AM	PH3 MFC set to  0.000000
3/11/2012	11:36:50 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:36:50 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:36:50 AM	Tube furnace set to 0
3/11/2012	11:37:20 AM	Helium valve closed
3/11/2012	11:37:20 AM	H2 valve closed
3/11/2012	11:37:20 AM	BCl3 valve closed
3/11/2012	11:37:20 AM	PH3 valve closed
3/11/2012	11:37:20 AM	SiCl4 pre valve closed
3/11/2012	11:37:20 AM	SiCl4 post valve closed
3/11/2012	11:37:20 AM	Bypass valve closed
3/11/2012	11:37:20 AM	Bubbler valve closed
3/11/2012	11:37:20 AM	Main Vac valve opened
3/11/2012	11:37:20 AM	Helium MFC set to  0.000000
3/11/2012	11:37:20 AM	H2 MFC set to  0.000000
3/11/2012	11:37:20 AM	BCl3 MFC set to  0.000000
3/11/2012	11:37:20 AM	PH3 MFC set to  0.000000
3/11/2012	11:37:20 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:37:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:37:21 AM	Tube furnace set to 0
3/11/2012	11:37:51 AM	H2 valve closed
3/11/2012	11:37:51 AM	BCl3 valve closed
3/11/2012	11:37:51 AM	PH3 valve closed
3/11/2012	11:37:51 AM	SiCl4 pre valve closed
3/11/2012	11:37:51 AM	SiCl4 post valve closed
3/11/2012	11:37:51 AM	Bypass valve closed
3/11/2012	11:37:51 AM	Bubbler valve closed
3/11/2012	11:37:51 AM	Helium valve opened
3/11/2012	11:37:51 AM	Main Vac valve opened
3/11/2012	11:37:51 AM	Helium MFC set to  20.000000
3/11/2012	11:37:51 AM	H2 MFC set to  0.000000
3/11/2012	11:37:51 AM	BCl3 MFC set to  0.000000
3/11/2012	11:37:51 AM	PH3 MFC set to  0.000000
3/11/2012	11:37:51 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:37:51 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:37:51 AM	Tube furnace set to 0
3/11/2012	11:38:21 AM	Helium valve closed
3/11/2012	11:38:21 AM	H2 valve closed
3/11/2012	11:38:21 AM	BCl3 valve closed
3/11/2012	11:38:21 AM	PH3 valve closed
3/11/2012	11:38:21 AM	SiCl4 pre valve closed
3/11/2012	11:38:21 AM	SiCl4 post valve closed
3/11/2012	11:38:21 AM	Bypass valve closed
3/11/2012	11:38:21 AM	Bubbler valve closed
3/11/2012	11:38:21 AM	Main Vac valve opened
3/11/2012	11:38:21 AM	Helium MFC set to  0.000000
3/11/2012	11:38:21 AM	H2 MFC set to  0.000000
3/11/2012	11:38:21 AM	BCl3 MFC set to  0.000000
3/11/2012	11:38:21 AM	PH3 MFC set to  0.000000
3/11/2012	11:38:21 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:38:21 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:38:21 AM	Tube furnace set to 0
3/11/2012	11:38:51 AM	H2 valve closed
3/11/2012	11:38:51 AM	BCl3 valve closed
3/11/2012	11:38:51 AM	PH3 valve closed
3/11/2012	11:38:51 AM	SiCl4 pre valve closed
3/11/2012	11:38:51 AM	SiCl4 post valve closed
3/11/2012	11:38:51 AM	Bypass valve closed
3/11/2012	11:38:51 AM	Bubbler valve closed
3/11/2012	11:38:51 AM	Helium valve opened
3/11/2012	11:38:51 AM	Main Vac valve opened
3/11/2012	11:38:51 AM	Helium MFC set to  20.000000
3/11/2012	11:38:51 AM	H2 MFC set to  0.000000
3/11/2012	11:38:51 AM	BCl3 MFC set to  0.000000
3/11/2012	11:38:51 AM	PH3 MFC set to  0.000000
3/11/2012	11:38:51 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:38:51 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:38:51 AM	Tube furnace set to 0
3/11/2012	11:39:21 AM	Helium valve closed
3/11/2012	11:39:21 AM	H2 valve closed
3/11/2012	11:39:21 AM	BCl3 valve closed
3/11/2012	11:39:21 AM	PH3 valve closed
3/11/2012	11:39:21 AM	SiCl4 pre valve closed
3/11/2012	11:39:21 AM	SiCl4 post valve closed
3/11/2012	11:39:21 AM	Bypass valve closed
3/11/2012	11:39:21 AM	Bubbler valve closed
3/11/2012	11:39:21 AM	Main Vac valve opened
3/11/2012	11:39:21 AM	Helium MFC set to  0.000000
3/11/2012	11:39:21 AM	H2 MFC set to  0.000000
3/11/2012	11:39:21 AM	BCl3 MFC set to  0.000000
3/11/2012	11:39:21 AM	PH3 MFC set to  0.000000
3/11/2012	11:39:21 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:39:21 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:39:21 AM	Tube furnace set to 200
3/11/2012	11:39:51 AM	H2 valve closed
3/11/2012	11:39:51 AM	BCl3 valve closed
3/11/2012	11:39:51 AM	PH3 valve closed
3/11/2012	11:39:51 AM	SiCl4 pre valve closed
3/11/2012	11:39:51 AM	SiCl4 post valve closed
3/11/2012	11:39:51 AM	Bypass valve closed
3/11/2012	11:39:51 AM	Bubbler valve closed
3/11/2012	11:39:51 AM	Helium valve opened
3/11/2012	11:39:51 AM	Main Vac valve opened
3/11/2012	11:39:51 AM	Helium MFC set to  20.000000
3/11/2012	11:39:51 AM	H2 MFC set to  0.000000
3/11/2012	11:39:51 AM	BCl3 MFC set to  0.000000
3/11/2012	11:39:51 AM	PH3 MFC set to  0.000000
3/11/2012	11:39:51 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:39:51 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:39:52 AM	Tube furnace set to 200
3/11/2012	11:40:22 AM	Helium valve closed
3/11/2012	11:40:22 AM	H2 valve closed
3/11/2012	11:40:22 AM	BCl3 valve closed
3/11/2012	11:40:22 AM	PH3 valve closed
3/11/2012	11:40:22 AM	SiCl4 pre valve closed
3/11/2012	11:40:22 AM	SiCl4 post valve closed
3/11/2012	11:40:22 AM	Bypass valve closed
3/11/2012	11:40:22 AM	Bubbler valve closed
3/11/2012	11:40:22 AM	Main Vac valve opened
3/11/2012	11:40:22 AM	Helium MFC set to  0.000000
3/11/2012	11:40:22 AM	H2 MFC set to  0.000000
3/11/2012	11:40:22 AM	BCl3 MFC set to  0.000000
3/11/2012	11:40:22 AM	PH3 MFC set to  0.000000
3/11/2012	11:40:22 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:40:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:40:22 AM	Tube furnace set to 200
3/11/2012	11:40:52 AM	H2 valve closed
3/11/2012	11:40:52 AM	BCl3 valve closed
3/11/2012	11:40:52 AM	PH3 valve closed
3/11/2012	11:40:52 AM	SiCl4 pre valve closed
3/11/2012	11:40:52 AM	SiCl4 post valve closed
3/11/2012	11:40:52 AM	Bypass valve closed
3/11/2012	11:40:52 AM	Bubbler valve closed
3/11/2012	11:40:52 AM	Helium valve opened
3/11/2012	11:40:52 AM	Main Vac valve opened
3/11/2012	11:40:52 AM	Helium MFC set to  20.000000
3/11/2012	11:40:52 AM	H2 MFC set to  0.000000
3/11/2012	11:40:52 AM	BCl3 MFC set to  0.000000
3/11/2012	11:40:52 AM	PH3 MFC set to  0.000000
3/11/2012	11:40:52 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:40:52 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:40:52 AM	Tube furnace set to 200
3/11/2012	11:41:22 AM	Helium valve closed
3/11/2012	11:41:22 AM	H2 valve closed
3/11/2012	11:41:22 AM	BCl3 valve closed
3/11/2012	11:41:22 AM	PH3 valve closed
3/11/2012	11:41:22 AM	SiCl4 pre valve closed
3/11/2012	11:41:22 AM	SiCl4 post valve closed
3/11/2012	11:41:22 AM	Bypass valve closed
3/11/2012	11:41:22 AM	Bubbler valve closed
3/11/2012	11:41:22 AM	Main Vac valve opened
3/11/2012	11:41:22 AM	Helium MFC set to  0.000000
3/11/2012	11:41:22 AM	H2 MFC set to  0.000000
3/11/2012	11:41:22 AM	BCl3 MFC set to  0.000000
3/11/2012	11:41:22 AM	PH3 MFC set to  0.000000
3/11/2012	11:41:22 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:41:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:41:22 AM	Tube furnace set to 200
3/11/2012	11:41:52 AM	H2 valve closed
3/11/2012	11:41:52 AM	BCl3 valve closed
3/11/2012	11:41:52 AM	PH3 valve closed
3/11/2012	11:41:52 AM	SiCl4 pre valve closed
3/11/2012	11:41:52 AM	SiCl4 post valve closed
3/11/2012	11:41:52 AM	Bypass valve closed
3/11/2012	11:41:52 AM	Bubbler valve closed
3/11/2012	11:41:52 AM	Helium valve opened
3/11/2012	11:41:52 AM	Main Vac valve opened
3/11/2012	11:41:52 AM	Helium MFC set to  20.000000
3/11/2012	11:41:52 AM	H2 MFC set to  0.000000
3/11/2012	11:41:52 AM	BCl3 MFC set to  0.000000
3/11/2012	11:41:52 AM	PH3 MFC set to  0.000000
3/11/2012	11:41:52 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:41:52 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:41:52 AM	Tube furnace set to 200
3/11/2012	11:42:22 AM	Helium valve closed
3/11/2012	11:42:22 AM	H2 valve closed
3/11/2012	11:42:22 AM	BCl3 valve closed
3/11/2012	11:42:22 AM	PH3 valve closed
3/11/2012	11:42:22 AM	SiCl4 pre valve closed
3/11/2012	11:42:22 AM	SiCl4 post valve closed
3/11/2012	11:42:22 AM	Bypass valve closed
3/11/2012	11:42:22 AM	Bubbler valve closed
3/11/2012	11:42:22 AM	Main Vac valve opened
3/11/2012	11:42:22 AM	Helium MFC set to  0.000000
3/11/2012	11:42:22 AM	H2 MFC set to  0.000000
3/11/2012	11:42:22 AM	BCl3 MFC set to  0.000000
3/11/2012	11:42:22 AM	PH3 MFC set to  0.000000
3/11/2012	11:42:22 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:42:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:42:23 AM	Tube furnace set to 200
3/11/2012	11:42:53 AM	H2 valve closed
3/11/2012	11:42:53 AM	BCl3 valve closed
3/11/2012	11:42:53 AM	PH3 valve closed
3/11/2012	11:42:53 AM	SiCl4 pre valve closed
3/11/2012	11:42:53 AM	SiCl4 post valve closed
3/11/2012	11:42:53 AM	Bypass valve closed
3/11/2012	11:42:53 AM	Bubbler valve closed
3/11/2012	11:42:53 AM	Helium valve opened
3/11/2012	11:42:53 AM	Main Vac valve opened
3/11/2012	11:42:53 AM	Helium MFC set to  20.000000
3/11/2012	11:42:53 AM	H2 MFC set to  0.000000
3/11/2012	11:42:53 AM	BCl3 MFC set to  0.000000
3/11/2012	11:42:53 AM	PH3 MFC set to  0.000000
3/11/2012	11:42:53 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:42:53 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:42:53 AM	Tube furnace set to 200
3/11/2012	11:43:23 AM	Helium valve closed
3/11/2012	11:43:23 AM	H2 valve closed
3/11/2012	11:43:23 AM	BCl3 valve closed
3/11/2012	11:43:23 AM	PH3 valve closed
3/11/2012	11:43:23 AM	SiCl4 pre valve closed
3/11/2012	11:43:23 AM	SiCl4 post valve closed
3/11/2012	11:43:23 AM	Bypass valve closed
3/11/2012	11:43:23 AM	Bubbler valve closed
3/11/2012	11:43:23 AM	Main Vac valve opened
3/11/2012	11:43:23 AM	Helium MFC set to  0.000000
3/11/2012	11:43:23 AM	H2 MFC set to  0.000000
3/11/2012	11:43:23 AM	BCl3 MFC set to  0.000000
3/11/2012	11:43:23 AM	PH3 MFC set to  0.000000
3/11/2012	11:43:23 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:43:23 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:43:23 AM	Tube furnace set to 200
3/11/2012	11:43:53 AM	H2 valve closed
3/11/2012	11:43:53 AM	BCl3 valve closed
3/11/2012	11:43:53 AM	PH3 valve closed
3/11/2012	11:43:53 AM	SiCl4 pre valve closed
3/11/2012	11:43:53 AM	SiCl4 post valve closed
3/11/2012	11:43:53 AM	Bypass valve closed
3/11/2012	11:43:53 AM	Bubbler valve closed
3/11/2012	11:43:53 AM	Helium valve opened
3/11/2012	11:43:53 AM	Main Vac valve opened
3/11/2012	11:43:53 AM	Helium MFC set to  20.000000
3/11/2012	11:43:53 AM	H2 MFC set to  0.000000
3/11/2012	11:43:53 AM	BCl3 MFC set to  0.000000
3/11/2012	11:43:53 AM	PH3 MFC set to  0.000000
3/11/2012	11:43:53 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:43:53 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:43:53 AM	Tube furnace set to 200
3/11/2012	11:44:23 AM	Helium valve closed
3/11/2012	11:44:23 AM	H2 valve closed
3/11/2012	11:44:23 AM	BCl3 valve closed
3/11/2012	11:44:23 AM	PH3 valve closed
3/11/2012	11:44:23 AM	SiCl4 pre valve closed
3/11/2012	11:44:23 AM	SiCl4 post valve closed
3/11/2012	11:44:23 AM	Bypass valve closed
3/11/2012	11:44:23 AM	Bubbler valve closed
3/11/2012	11:44:23 AM	Main Vac valve opened
3/11/2012	11:44:23 AM	Helium MFC set to  0.000000
3/11/2012	11:44:23 AM	H2 MFC set to  0.000000
3/11/2012	11:44:23 AM	BCl3 MFC set to  0.000000
3/11/2012	11:44:23 AM	PH3 MFC set to  0.000000
3/11/2012	11:44:23 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:44:23 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:44:23 AM	Tube furnace set to 200
3/11/2012	11:44:53 AM	H2 valve closed
3/11/2012	11:44:53 AM	BCl3 valve closed
3/11/2012	11:44:53 AM	PH3 valve closed
3/11/2012	11:44:53 AM	SiCl4 pre valve closed
3/11/2012	11:44:53 AM	SiCl4 post valve closed
3/11/2012	11:44:53 AM	Bypass valve closed
3/11/2012	11:44:53 AM	Bubbler valve closed
3/11/2012	11:44:53 AM	Helium valve opened
3/11/2012	11:44:53 AM	Main Vac valve opened
3/11/2012	11:44:53 AM	Helium MFC set to  20.000000
3/11/2012	11:44:53 AM	H2 MFC set to  0.000000
3/11/2012	11:44:53 AM	BCl3 MFC set to  0.000000
3/11/2012	11:44:53 AM	PH3 MFC set to  0.000000
3/11/2012	11:44:54 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:44:54 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:44:54 AM	Tube furnace set to 200
3/11/2012	11:45:24 AM	Helium valve closed
3/11/2012	11:45:24 AM	H2 valve closed
3/11/2012	11:45:24 AM	BCl3 valve closed
3/11/2012	11:45:24 AM	PH3 valve closed
3/11/2012	11:45:24 AM	SiCl4 pre valve closed
3/11/2012	11:45:24 AM	SiCl4 post valve closed
3/11/2012	11:45:24 AM	Bypass valve closed
3/11/2012	11:45:24 AM	Bubbler valve closed
3/11/2012	11:45:24 AM	Main Vac valve opened
3/11/2012	11:45:24 AM	Helium MFC set to  0.000000
3/11/2012	11:45:24 AM	H2 MFC set to  0.000000
3/11/2012	11:45:24 AM	BCl3 MFC set to  0.000000
3/11/2012	11:45:24 AM	PH3 MFC set to  0.000000
3/11/2012	11:45:24 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:45:24 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:45:24 AM	Tube furnace set to 0
3/11/2012	11:45:25 AM	Run finished at 11:45 AM
3/11/2012	11:54:33 AM	Main Vac valve closed
3/11/2012	11:55:02 AM	Main Vac valve opened
3/11/2012	11:56:28 AM	Recipe started at 11:56 AM
3/11/2012	11:56:28 AM	Helium valve closed
3/11/2012	11:56:28 AM	H2 valve closed
3/11/2012	11:56:28 AM	BCl3 valve closed
3/11/2012	11:56:28 AM	PH3 valve closed
3/11/2012	11:56:28 AM	SiCl4 pre valve closed
3/11/2012	11:56:28 AM	SiCl4 post valve closed
3/11/2012	11:56:28 AM	Main Vac valve closed
3/11/2012	11:56:28 AM	Bypass valve closed
3/11/2012	11:56:28 AM	Bubbler valve closed
3/11/2012	11:56:28 AM	Helium MFC set to  0.000000
3/11/2012	11:56:28 AM	H2 MFC set to  0.000000
3/11/2012	11:56:28 AM	BCl3 MFC set to  0.000000
3/11/2012	11:56:28 AM	PH3 MFC set to  0.000000
3/11/2012	11:56:28 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:56:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:56:28 AM	Tube furnace set to 0
3/11/2012	11:56:31 AM	Helium valve closed
3/11/2012	11:56:31 AM	BCl3 valve closed
3/11/2012	11:56:31 AM	PH3 valve closed
3/11/2012	11:56:31 AM	SiCl4 pre valve closed
3/11/2012	11:56:32 AM	SiCl4 post valve closed
3/11/2012	11:56:32 AM	Main Vac valve closed
3/11/2012	11:56:32 AM	Bypass valve closed
3/11/2012	11:56:32 AM	Bubbler valve closed
3/11/2012	11:56:32 AM	H2 valve opened
3/11/2012	11:56:32 AM	Helium MFC set to  0.000000
3/11/2012	11:56:32 AM	H2 MFC set to  500.000000
3/11/2012	11:56:32 AM	BCl3 MFC set to  0.000000
3/11/2012	11:56:32 AM	PH3 MFC set to  0.000000
3/11/2012	11:56:32 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:56:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:56:32 AM	Tube furnace set to 0
3/11/2012	11:57:36 AM	Helium valve closed
3/11/2012	11:57:36 AM	BCl3 valve closed
3/11/2012	11:57:36 AM	PH3 valve closed
3/11/2012	11:57:36 AM	SiCl4 pre valve closed
3/11/2012	11:57:36 AM	SiCl4 post valve closed
3/11/2012	11:57:36 AM	Main Vac valve closed
3/11/2012	11:57:36 AM	Bypass valve closed
3/11/2012	11:57:36 AM	H2 valve opened
3/11/2012	11:57:36 AM	Bubbler valve opened
3/11/2012	11:57:36 AM	Helium MFC set to  0.000000
3/11/2012	11:57:36 AM	H2 MFC set to  500.000000
3/11/2012	11:57:36 AM	BCl3 MFC set to  0.000000
3/11/2012	11:57:36 AM	PH3 MFC set to  0.000000
3/11/2012	11:57:36 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:57:36 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:57:36 AM	Tube furnace set to 0
3/11/2012	11:57:37 AM	Helium valve closed
3/11/2012	11:57:37 AM	BCl3 valve closed
3/11/2012	11:57:37 AM	PH3 valve closed
3/11/2012	11:57:37 AM	SiCl4 pre valve closed
3/11/2012	11:57:37 AM	SiCl4 post valve closed
3/11/2012	11:57:37 AM	Main Vac valve closed
3/11/2012	11:57:37 AM	Bypass valve closed
3/11/2012	11:57:37 AM	H2 valve opened
3/11/2012	11:57:37 AM	Bubbler valve opened
3/11/2012	11:57:37 AM	Helium MFC set to  0.000000
3/11/2012	11:57:37 AM	H2 MFC set to  500.000000
3/11/2012	11:57:37 AM	BCl3 MFC set to  0.000000
3/11/2012	11:57:37 AM	PH3 MFC set to  0.000000
3/11/2012	11:57:37 AM	SiCl4 MFC set to  0.000000
3/11/2012	11:57:37 AM	Bypass solenoid MFC set to  0.000000
3/11/2012	11:57:38 AM	Tube furnace set to 1000
3/11/2012	12:17:38 PM	Helium valve closed
3/11/2012	12:17:38 PM	PH3 valve closed
3/11/2012	12:17:38 PM	Main Vac valve closed
3/11/2012	12:17:38 PM	Bypass valve closed
3/11/2012	12:17:38 PM	H2 valve opened
3/11/2012	12:17:38 PM	BCl3 valve opened
3/11/2012	12:17:38 PM	SiCl4 pre valve opened
3/11/2012	12:17:38 PM	SiCl4 post valve opened
3/11/2012	12:17:38 PM	Bubbler valve opened
3/11/2012	12:17:38 PM	Helium MFC set to  0.000000
3/11/2012	12:17:38 PM	H2 MFC set to  450.000000
3/11/2012	12:17:38 PM	BCl3 MFC set to  1.500000
3/11/2012	12:17:38 PM	PH3 MFC set to  0.000000
3/11/2012	12:17:38 PM	SiCl4 MFC set to  50.000000
3/11/2012	12:17:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:17:38 PM	Tube furnace set to 1000
3/11/2012	12:29:38 PM	Helium valve closed
3/11/2012	12:29:38 PM	BCl3 valve closed
3/11/2012	12:29:38 PM	PH3 valve closed
3/11/2012	12:29:38 PM	SiCl4 pre valve closed
3/11/2012	12:29:38 PM	SiCl4 post valve closed
3/11/2012	12:29:38 PM	Main Vac valve closed
3/11/2012	12:29:38 PM	Bypass valve closed
3/11/2012	12:29:38 PM	H2 valve opened
3/11/2012	12:29:38 PM	Bubbler valve opened
3/11/2012	12:29:38 PM	Helium MFC set to  0.000000
3/11/2012	12:29:38 PM	H2 MFC set to  500.000000
3/11/2012	12:29:38 PM	BCl3 MFC set to  0.000000
3/11/2012	12:29:38 PM	PH3 MFC set to  0.000000
3/11/2012	12:29:38 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:29:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:29:38 PM	Tube furnace set to 950
3/11/2012	12:31:38 PM	Helium valve closed
3/11/2012	12:31:38 PM	BCl3 valve closed
3/11/2012	12:31:38 PM	PH3 valve closed
3/11/2012	12:31:38 PM	SiCl4 pre valve closed
3/11/2012	12:31:38 PM	SiCl4 post valve closed
3/11/2012	12:31:38 PM	Main Vac valve closed
3/11/2012	12:31:38 PM	Bypass valve closed
3/11/2012	12:31:38 PM	H2 valve opened
3/11/2012	12:31:38 PM	Bubbler valve opened
3/11/2012	12:31:38 PM	Helium MFC set to  0.000000
3/11/2012	12:31:38 PM	H2 MFC set to  500.000000
3/11/2012	12:31:38 PM	BCl3 MFC set to  0.000000
3/11/2012	12:31:38 PM	PH3 MFC set to  0.000000
3/11/2012	12:31:38 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:31:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:31:38 PM	Tube furnace set to 900
3/11/2012	12:33:38 PM	Helium valve closed
3/11/2012	12:33:38 PM	BCl3 valve closed
3/11/2012	12:33:38 PM	PH3 valve closed
3/11/2012	12:33:38 PM	SiCl4 pre valve closed
3/11/2012	12:33:38 PM	SiCl4 post valve closed
3/11/2012	12:33:38 PM	Main Vac valve closed
3/11/2012	12:33:38 PM	Bypass valve closed
3/11/2012	12:33:38 PM	H2 valve opened
3/11/2012	12:33:38 PM	Bubbler valve opened
3/11/2012	12:33:38 PM	Helium MFC set to  0.000000
3/11/2012	12:33:38 PM	H2 MFC set to  500.000000
3/11/2012	12:33:38 PM	BCl3 MFC set to  0.000000
3/11/2012	12:33:38 PM	PH3 MFC set to  0.000000
3/11/2012	12:33:38 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:33:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:33:38 PM	Tube furnace set to 850
3/11/2012	12:35:38 PM	H2 valve closed
3/11/2012	12:35:38 PM	BCl3 valve closed
3/11/2012	12:35:38 PM	PH3 valve closed
3/11/2012	12:35:38 PM	SiCl4 pre valve closed
3/11/2012	12:35:38 PM	SiCl4 post valve closed
3/11/2012	12:35:38 PM	Main Vac valve closed
3/11/2012	12:35:38 PM	Bypass valve closed
3/11/2012	12:35:38 PM	Helium valve opened
3/11/2012	12:35:38 PM	Bubbler valve opened
3/11/2012	12:35:38 PM	Helium MFC set to  500.000000
3/11/2012	12:35:38 PM	H2 MFC set to  0.000000
3/11/2012	12:35:38 PM	BCl3 MFC set to  0.000000
3/11/2012	12:35:38 PM	PH3 MFC set to  0.000000
3/11/2012	12:35:38 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:35:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:35:39 PM	Tube furnace set to 800
3/11/2012	12:37:39 PM	H2 valve closed
3/11/2012	12:37:39 PM	BCl3 valve closed
3/11/2012	12:37:39 PM	PH3 valve closed
3/11/2012	12:37:39 PM	SiCl4 pre valve closed
3/11/2012	12:37:39 PM	SiCl4 post valve closed
3/11/2012	12:37:39 PM	Main Vac valve closed
3/11/2012	12:37:39 PM	Bypass valve closed
3/11/2012	12:37:39 PM	Helium valve opened
3/11/2012	12:37:39 PM	Bubbler valve opened
3/11/2012	12:37:39 PM	Helium MFC set to  500.000000
3/11/2012	12:37:39 PM	H2 MFC set to  0.000000
3/11/2012	12:37:39 PM	BCl3 MFC set to  0.000000
3/11/2012	12:37:39 PM	PH3 MFC set to  0.000000
3/11/2012	12:37:39 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:37:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:37:39 PM	Tube furnace set to 750
3/11/2012	12:39:39 PM	H2 valve closed
3/11/2012	12:39:39 PM	BCl3 valve closed
3/11/2012	12:39:39 PM	PH3 valve closed
3/11/2012	12:39:39 PM	SiCl4 pre valve closed
3/11/2012	12:39:39 PM	SiCl4 post valve closed
3/11/2012	12:39:39 PM	Main Vac valve closed
3/11/2012	12:39:39 PM	Bypass valve closed
3/11/2012	12:39:39 PM	Helium valve opened
3/11/2012	12:39:39 PM	Bubbler valve opened
3/11/2012	12:39:39 PM	Helium MFC set to  500.000000
3/11/2012	12:39:39 PM	H2 MFC set to  0.000000
3/11/2012	12:39:39 PM	BCl3 MFC set to  0.000000
3/11/2012	12:39:39 PM	PH3 MFC set to  0.000000
3/11/2012	12:39:39 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:39:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:39:39 PM	Tube furnace set to 0
3/11/2012	12:59:39 PM	Helium valve closed
3/11/2012	12:59:39 PM	H2 valve closed
3/11/2012	12:59:39 PM	BCl3 valve closed
3/11/2012	12:59:39 PM	PH3 valve closed
3/11/2012	12:59:39 PM	SiCl4 pre valve closed
3/11/2012	12:59:39 PM	SiCl4 post valve closed
3/11/2012	12:59:39 PM	Main Vac valve closed
3/11/2012	12:59:39 PM	Bypass valve closed
3/11/2012	12:59:39 PM	Bubbler valve closed
3/11/2012	12:59:39 PM	Helium MFC set to  0.000000
3/11/2012	12:59:39 PM	H2 MFC set to  0.000000
3/11/2012	12:59:39 PM	BCl3 MFC set to  0.000000
3/11/2012	12:59:39 PM	PH3 MFC set to  0.000000
3/11/2012	12:59:39 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:59:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:59:39 PM	Tube furnace set to 0
3/11/2012	12:59:40 PM	Helium valve closed
3/11/2012	12:59:40 PM	H2 valve closed
3/11/2012	12:59:40 PM	BCl3 valve closed
3/11/2012	12:59:40 PM	PH3 valve closed
3/11/2012	12:59:40 PM	SiCl4 pre valve closed
3/11/2012	12:59:40 PM	SiCl4 post valve closed
3/11/2012	12:59:40 PM	Main Vac valve closed
3/11/2012	12:59:40 PM	Bubbler valve closed
3/11/2012	12:59:40 PM	Bypass valve opened
3/11/2012	12:59:40 PM	Helium MFC set to  0.000000
3/11/2012	12:59:40 PM	H2 MFC set to  0.000000
3/11/2012	12:59:40 PM	BCl3 MFC set to  0.000000
3/11/2012	12:59:40 PM	PH3 MFC set to  0.000000
3/11/2012	12:59:40 PM	SiCl4 MFC set to  0.000000
3/11/2012	12:59:40 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	12:59:40 PM	Tube furnace set to 0
3/11/2012	1:00:26 PM	Helium valve closed
3/11/2012	1:00:26 PM	H2 valve closed
3/11/2012	1:00:26 PM	BCl3 valve closed
3/11/2012	1:00:26 PM	PH3 valve closed
3/11/2012	1:00:26 PM	SiCl4 pre valve closed
3/11/2012	1:00:26 PM	SiCl4 post valve closed
3/11/2012	1:00:26 PM	Main Vac valve closed
3/11/2012	1:00:26 PM	Bubbler valve closed
3/11/2012	1:00:26 PM	Bypass valve opened
3/11/2012	1:00:26 PM	Helium MFC set to  0.000000
3/11/2012	1:00:26 PM	H2 MFC set to  0.000000
3/11/2012	1:00:26 PM	BCl3 MFC set to  0.000000
3/11/2012	1:00:26 PM	PH3 MFC set to  0.000000
3/11/2012	1:00:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:00:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:00:26 PM	Tube furnace set to 0
3/11/2012	1:01:26 PM	Helium valve closed
3/11/2012	1:01:26 PM	H2 valve closed
3/11/2012	1:01:26 PM	BCl3 valve closed
3/11/2012	1:01:26 PM	PH3 valve closed
3/11/2012	1:01:26 PM	SiCl4 pre valve closed
3/11/2012	1:01:26 PM	SiCl4 post valve closed
3/11/2012	1:01:26 PM	Bypass valve closed
3/11/2012	1:01:26 PM	Bubbler valve closed
3/11/2012	1:01:26 PM	Main Vac valve opened
3/11/2012	1:01:26 PM	Helium MFC set to  0.000000
3/11/2012	1:01:26 PM	H2 MFC set to  0.000000
3/11/2012	1:01:26 PM	BCl3 MFC set to  0.000000
3/11/2012	1:01:26 PM	PH3 MFC set to  0.000000
3/11/2012	1:01:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:01:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:01:26 PM	Tube furnace set to 0
3/11/2012	1:01:27 PM	Run finished at 1:01 PM
3/11/2012	1:05:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	1:05:59 PM	Recipe started at 1:05 PM
3/11/2012	1:05:59 PM	Helium valve closed
3/11/2012	1:05:59 PM	H2 valve closed
3/11/2012	1:05:59 PM	BCl3 valve closed
3/11/2012	1:05:59 PM	PH3 valve closed
3/11/2012	1:05:59 PM	SiCl4 pre valve closed
3/11/2012	1:05:59 PM	SiCl4 post valve closed
3/11/2012	1:05:59 PM	Main Vac valve closed
3/11/2012	1:05:59 PM	Bypass valve closed
3/11/2012	1:05:59 PM	Bubbler valve closed
3/11/2012	1:05:59 PM	Helium MFC set to  0.000000
3/11/2012	1:05:59 PM	H2 MFC set to  0.000000
3/11/2012	1:05:59 PM	BCl3 MFC set to  0.000000
3/11/2012	1:05:59 PM	PH3 MFC set to  0.000000
3/11/2012	1:05:59 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:05:59 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:05:59 PM	Tube furnace set to 0
3/11/2012	1:06:02 PM	H2 valve closed
3/11/2012	1:06:02 PM	BCl3 valve closed
3/11/2012	1:06:02 PM	PH3 valve closed
3/11/2012	1:06:02 PM	SiCl4 pre valve closed
3/11/2012	1:06:02 PM	SiCl4 post valve closed
3/11/2012	1:06:02 PM	Main Vac valve closed
3/11/2012	1:06:02 PM	Bypass valve closed
3/11/2012	1:06:02 PM	Bubbler valve closed
3/11/2012	1:06:02 PM	Helium valve opened
3/11/2012	1:06:02 PM	Helium MFC set to  500.000000
3/11/2012	1:06:02 PM	H2 MFC set to  0.000000
3/11/2012	1:06:02 PM	BCl3 MFC set to  0.000000
3/11/2012	1:06:02 PM	PH3 MFC set to  0.000000
3/11/2012	1:06:02 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:06:02 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:06:02 PM	Tube furnace set to 0
3/11/2012	1:07:00 PM	Helium valve closed
3/11/2012	1:07:00 PM	H2 valve closed
3/11/2012	1:07:00 PM	BCl3 valve closed
3/11/2012	1:07:00 PM	PH3 valve closed
3/11/2012	1:07:00 PM	SiCl4 pre valve closed
3/11/2012	1:07:00 PM	SiCl4 post valve closed
3/11/2012	1:07:00 PM	Main Vac valve closed
3/11/2012	1:07:01 PM	Bypass valve closed
3/11/2012	1:07:01 PM	Bubbler valve closed
3/11/2012	1:07:01 PM	Helium MFC set to  0.000000
3/11/2012	1:07:01 PM	H2 MFC set to  0.000000
3/11/2012	1:07:01 PM	BCl3 MFC set to  0.000000
3/11/2012	1:07:01 PM	PH3 MFC set to  0.000000
3/11/2012	1:07:01 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:07:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:07:01 PM	Tube furnace set to 0
3/11/2012	1:07:02 PM	Run finished at 1:07 PM
3/11/2012	1:07:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	1:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	1:10:58 PM	Recipe started at 1:10 PM
3/11/2012	1:10:58 PM	Helium valve closed
3/11/2012	1:10:58 PM	H2 valve closed
3/11/2012	1:10:58 PM	BCl3 valve closed
3/11/2012	1:10:58 PM	PH3 valve closed
3/11/2012	1:10:58 PM	SiCl4 pre valve closed
3/11/2012	1:10:58 PM	SiCl4 post valve closed
3/11/2012	1:10:58 PM	Main Vac valve closed
3/11/2012	1:10:58 PM	Bubbler valve closed
3/11/2012	1:10:58 PM	Bypass valve opened
3/11/2012	1:10:58 PM	Helium MFC set to  0.000000
3/11/2012	1:10:58 PM	H2 MFC set to  0.000000
3/11/2012	1:10:58 PM	BCl3 MFC set to  0.000000
3/11/2012	1:10:58 PM	PH3 MFC set to  0.000000
3/11/2012	1:10:58 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:10:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:10:58 PM	Tube furnace set to 0
3/11/2012	1:11:56 PM	Helium valve closed
3/11/2012	1:11:56 PM	H2 valve closed
3/11/2012	1:11:56 PM	BCl3 valve closed
3/11/2012	1:11:56 PM	PH3 valve closed
3/11/2012	1:11:56 PM	SiCl4 pre valve closed
3/11/2012	1:11:56 PM	SiCl4 post valve closed
3/11/2012	1:11:56 PM	Main Vac valve closed
3/11/2012	1:11:56 PM	Bubbler valve closed
3/11/2012	1:11:56 PM	Bypass valve opened
3/11/2012	1:11:56 PM	Helium MFC set to  0.000000
3/11/2012	1:11:56 PM	H2 MFC set to  0.000000
3/11/2012	1:11:56 PM	BCl3 MFC set to  0.000000
3/11/2012	1:11:56 PM	PH3 MFC set to  0.000000
3/11/2012	1:11:56 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:11:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:11:56 PM	Tube furnace set to 0
3/11/2012	1:12:56 PM	Helium valve closed
3/11/2012	1:12:57 PM	H2 valve closed
3/11/2012	1:12:57 PM	BCl3 valve closed
3/11/2012	1:12:57 PM	PH3 valve closed
3/11/2012	1:12:57 PM	SiCl4 pre valve closed
3/11/2012	1:12:57 PM	SiCl4 post valve closed
3/11/2012	1:12:57 PM	Bypass valve closed
3/11/2012	1:12:57 PM	Bubbler valve closed
3/11/2012	1:12:57 PM	Main Vac valve opened
3/11/2012	1:12:57 PM	Helium MFC set to  0.000000
3/11/2012	1:12:57 PM	H2 MFC set to  0.000000
3/11/2012	1:12:57 PM	BCl3 MFC set to  0.000000
3/11/2012	1:12:57 PM	PH3 MFC set to  0.000000
3/11/2012	1:12:57 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:12:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:12:57 PM	Tube furnace set to 0
3/11/2012	1:12:58 PM	Run finished at 1:12 PM
3/11/2012	1:12:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	1:14:12 PM	Recipe started at 1:14 PM
3/11/2012	1:14:12 PM	Helium valve closed
3/11/2012	1:14:12 PM	H2 valve closed
3/11/2012	1:14:12 PM	BCl3 valve closed
3/11/2012	1:14:12 PM	PH3 valve closed
3/11/2012	1:14:12 PM	SiCl4 pre valve closed
3/11/2012	1:14:12 PM	SiCl4 post valve closed
3/11/2012	1:14:12 PM	Bypass valve closed
3/11/2012	1:14:12 PM	Bubbler valve closed
3/11/2012	1:14:12 PM	Main Vac valve opened
3/11/2012	1:14:12 PM	Helium MFC set to  0.000000
3/11/2012	1:14:12 PM	H2 MFC set to  0.000000
3/11/2012	1:14:12 PM	BCl3 MFC set to  0.000000
3/11/2012	1:14:12 PM	PH3 MFC set to  0.000000
3/11/2012	1:14:12 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:14:12 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:14:12 PM	Tube furnace set to 0
3/11/2012	1:14:42 PM	H2 valve closed
3/11/2012	1:14:42 PM	BCl3 valve closed
3/11/2012	1:14:42 PM	PH3 valve closed
3/11/2012	1:14:42 PM	SiCl4 pre valve closed
3/11/2012	1:14:42 PM	SiCl4 post valve closed
3/11/2012	1:14:42 PM	Bypass valve closed
3/11/2012	1:14:42 PM	Bubbler valve closed
3/11/2012	1:14:42 PM	Helium valve opened
3/11/2012	1:14:42 PM	Main Vac valve opened
3/11/2012	1:14:42 PM	Helium MFC set to  20.000000
3/11/2012	1:14:42 PM	H2 MFC set to  0.000000
3/11/2012	1:14:42 PM	BCl3 MFC set to  0.000000
3/11/2012	1:14:42 PM	PH3 MFC set to  0.000000
3/11/2012	1:14:42 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:14:42 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:14:43 PM	Tube furnace set to 0
3/11/2012	1:15:13 PM	Helium valve closed
3/11/2012	1:15:13 PM	H2 valve closed
3/11/2012	1:15:13 PM	BCl3 valve closed
3/11/2012	1:15:13 PM	PH3 valve closed
3/11/2012	1:15:13 PM	SiCl4 pre valve closed
3/11/2012	1:15:13 PM	SiCl4 post valve closed
3/11/2012	1:15:13 PM	Bypass valve closed
3/11/2012	1:15:13 PM	Bubbler valve closed
3/11/2012	1:15:13 PM	Main Vac valve opened
3/11/2012	1:15:13 PM	Helium MFC set to  0.000000
3/11/2012	1:15:13 PM	H2 MFC set to  0.000000
3/11/2012	1:15:13 PM	BCl3 MFC set to  0.000000
3/11/2012	1:15:13 PM	PH3 MFC set to  0.000000
3/11/2012	1:15:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:15:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:15:13 PM	Tube furnace set to 0
3/11/2012	1:15:43 PM	H2 valve closed
3/11/2012	1:15:43 PM	BCl3 valve closed
3/11/2012	1:15:43 PM	PH3 valve closed
3/11/2012	1:15:43 PM	SiCl4 pre valve closed
3/11/2012	1:15:43 PM	SiCl4 post valve closed
3/11/2012	1:15:43 PM	Bypass valve closed
3/11/2012	1:15:43 PM	Bubbler valve closed
3/11/2012	1:15:43 PM	Helium valve opened
3/11/2012	1:15:43 PM	Main Vac valve opened
3/11/2012	1:15:43 PM	Helium MFC set to  20.000000
3/11/2012	1:15:43 PM	H2 MFC set to  0.000000
3/11/2012	1:15:43 PM	BCl3 MFC set to  0.000000
3/11/2012	1:15:43 PM	PH3 MFC set to  0.000000
3/11/2012	1:15:43 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:15:43 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:15:43 PM	Tube furnace set to 0
3/11/2012	1:16:13 PM	Helium valve closed
3/11/2012	1:16:13 PM	H2 valve closed
3/11/2012	1:16:13 PM	BCl3 valve closed
3/11/2012	1:16:13 PM	PH3 valve closed
3/11/2012	1:16:13 PM	SiCl4 pre valve closed
3/11/2012	1:16:13 PM	SiCl4 post valve closed
3/11/2012	1:16:13 PM	Bypass valve closed
3/11/2012	1:16:13 PM	Bubbler valve closed
3/11/2012	1:16:13 PM	Main Vac valve opened
3/11/2012	1:16:13 PM	Helium MFC set to  0.000000
3/11/2012	1:16:13 PM	H2 MFC set to  0.000000
3/11/2012	1:16:13 PM	BCl3 MFC set to  0.000000
3/11/2012	1:16:13 PM	PH3 MFC set to  0.000000
3/11/2012	1:16:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:16:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:16:13 PM	Tube furnace set to 0
3/11/2012	1:16:43 PM	H2 valve closed
3/11/2012	1:16:43 PM	BCl3 valve closed
3/11/2012	1:16:43 PM	PH3 valve closed
3/11/2012	1:16:43 PM	SiCl4 pre valve closed
3/11/2012	1:16:43 PM	SiCl4 post valve closed
3/11/2012	1:16:43 PM	Bypass valve closed
3/11/2012	1:16:43 PM	Bubbler valve closed
3/11/2012	1:16:43 PM	Helium valve opened
3/11/2012	1:16:43 PM	Main Vac valve opened
3/11/2012	1:16:43 PM	Helium MFC set to  20.000000
3/11/2012	1:16:43 PM	H2 MFC set to  0.000000
3/11/2012	1:16:43 PM	BCl3 MFC set to  0.000000
3/11/2012	1:16:43 PM	PH3 MFC set to  0.000000
3/11/2012	1:16:43 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:16:43 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:16:43 PM	Tube furnace set to 0
3/11/2012	1:17:13 PM	Helium valve closed
3/11/2012	1:17:13 PM	H2 valve closed
3/11/2012	1:17:14 PM	BCl3 valve closed
3/11/2012	1:17:14 PM	PH3 valve closed
3/11/2012	1:17:14 PM	SiCl4 pre valve closed
3/11/2012	1:17:14 PM	SiCl4 post valve closed
3/11/2012	1:17:14 PM	Bypass valve closed
3/11/2012	1:17:14 PM	Bubbler valve closed
3/11/2012	1:17:14 PM	Main Vac valve opened
3/11/2012	1:17:14 PM	Helium MFC set to  0.000000
3/11/2012	1:17:14 PM	H2 MFC set to  0.000000
3/11/2012	1:17:14 PM	BCl3 MFC set to  0.000000
3/11/2012	1:17:14 PM	PH3 MFC set to  0.000000
3/11/2012	1:17:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:17:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:17:14 PM	Tube furnace set to 0
3/11/2012	1:17:44 PM	H2 valve closed
3/11/2012	1:17:44 PM	BCl3 valve closed
3/11/2012	1:17:44 PM	PH3 valve closed
3/11/2012	1:17:44 PM	SiCl4 pre valve closed
3/11/2012	1:17:44 PM	SiCl4 post valve closed
3/11/2012	1:17:44 PM	Bypass valve closed
3/11/2012	1:17:44 PM	Bubbler valve closed
3/11/2012	1:17:44 PM	Helium valve opened
3/11/2012	1:17:44 PM	Main Vac valve opened
3/11/2012	1:17:44 PM	Helium MFC set to  20.000000
3/11/2012	1:17:44 PM	H2 MFC set to  0.000000
3/11/2012	1:17:44 PM	BCl3 MFC set to  0.000000
3/11/2012	1:17:44 PM	PH3 MFC set to  0.000000
3/11/2012	1:17:44 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:17:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:17:44 PM	Tube furnace set to 0
3/11/2012	1:18:14 PM	Helium valve closed
3/11/2012	1:18:14 PM	H2 valve closed
3/11/2012	1:18:14 PM	BCl3 valve closed
3/11/2012	1:18:14 PM	PH3 valve closed
3/11/2012	1:18:14 PM	SiCl4 pre valve closed
3/11/2012	1:18:14 PM	SiCl4 post valve closed
3/11/2012	1:18:14 PM	Bypass valve closed
3/11/2012	1:18:14 PM	Bubbler valve closed
3/11/2012	1:18:14 PM	Main Vac valve opened
3/11/2012	1:18:14 PM	Helium MFC set to  0.000000
3/11/2012	1:18:14 PM	H2 MFC set to  0.000000
3/11/2012	1:18:14 PM	BCl3 MFC set to  0.000000
3/11/2012	1:18:14 PM	PH3 MFC set to  0.000000
3/11/2012	1:18:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:18:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:18:14 PM	Tube furnace set to 0
3/11/2012	1:18:44 PM	H2 valve closed
3/11/2012	1:18:44 PM	BCl3 valve closed
3/11/2012	1:18:44 PM	PH3 valve closed
3/11/2012	1:18:44 PM	SiCl4 pre valve closed
3/11/2012	1:18:44 PM	SiCl4 post valve closed
3/11/2012	1:18:44 PM	Bypass valve closed
3/11/2012	1:18:44 PM	Bubbler valve closed
3/11/2012	1:18:44 PM	Helium valve opened
3/11/2012	1:18:44 PM	Main Vac valve opened
3/11/2012	1:18:44 PM	Helium MFC set to  20.000000
3/11/2012	1:18:44 PM	H2 MFC set to  0.000000
3/11/2012	1:18:44 PM	BCl3 MFC set to  0.000000
3/11/2012	1:18:44 PM	PH3 MFC set to  0.000000
3/11/2012	1:18:44 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:18:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:18:44 PM	Tube furnace set to 0
3/11/2012	1:19:14 PM	Helium valve closed
3/11/2012	1:19:14 PM	H2 valve closed
3/11/2012	1:19:14 PM	BCl3 valve closed
3/11/2012	1:19:14 PM	PH3 valve closed
3/11/2012	1:19:14 PM	SiCl4 pre valve closed
3/11/2012	1:19:14 PM	SiCl4 post valve closed
3/11/2012	1:19:14 PM	Bypass valve closed
3/11/2012	1:19:14 PM	Bubbler valve closed
3/11/2012	1:19:14 PM	Main Vac valve opened
3/11/2012	1:19:14 PM	Helium MFC set to  0.000000
3/11/2012	1:19:14 PM	H2 MFC set to  0.000000
3/11/2012	1:19:14 PM	BCl3 MFC set to  0.000000
3/11/2012	1:19:14 PM	PH3 MFC set to  0.000000
3/11/2012	1:19:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:19:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:19:15 PM	Tube furnace set to 0
3/11/2012	1:19:45 PM	H2 valve closed
3/11/2012	1:19:45 PM	BCl3 valve closed
3/11/2012	1:19:45 PM	PH3 valve closed
3/11/2012	1:19:45 PM	SiCl4 pre valve closed
3/11/2012	1:19:45 PM	SiCl4 post valve closed
3/11/2012	1:19:45 PM	Bypass valve closed
3/11/2012	1:19:45 PM	Bubbler valve closed
3/11/2012	1:19:45 PM	Helium valve opened
3/11/2012	1:19:45 PM	Main Vac valve opened
3/11/2012	1:19:45 PM	Helium MFC set to  20.000000
3/11/2012	1:19:45 PM	H2 MFC set to  0.000000
3/11/2012	1:19:45 PM	BCl3 MFC set to  0.000000
3/11/2012	1:19:45 PM	PH3 MFC set to  0.000000
3/11/2012	1:19:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:19:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:19:45 PM	Tube furnace set to 0
3/11/2012	1:20:15 PM	Helium valve closed
3/11/2012	1:20:15 PM	H2 valve closed
3/11/2012	1:20:15 PM	BCl3 valve closed
3/11/2012	1:20:15 PM	PH3 valve closed
3/11/2012	1:20:15 PM	SiCl4 pre valve closed
3/11/2012	1:20:15 PM	SiCl4 post valve closed
3/11/2012	1:20:15 PM	Bypass valve closed
3/11/2012	1:20:15 PM	Bubbler valve closed
3/11/2012	1:20:15 PM	Main Vac valve opened
3/11/2012	1:20:15 PM	Helium MFC set to  0.000000
3/11/2012	1:20:15 PM	H2 MFC set to  0.000000
3/11/2012	1:20:15 PM	BCl3 MFC set to  0.000000
3/11/2012	1:20:15 PM	PH3 MFC set to  0.000000
3/11/2012	1:20:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:20:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:20:15 PM	Tube furnace set to 0
3/11/2012	1:20:45 PM	H2 valve closed
3/11/2012	1:20:45 PM	BCl3 valve closed
3/11/2012	1:20:45 PM	PH3 valve closed
3/11/2012	1:20:45 PM	SiCl4 pre valve closed
3/11/2012	1:20:45 PM	SiCl4 post valve closed
3/11/2012	1:20:45 PM	Bypass valve closed
3/11/2012	1:20:45 PM	Bubbler valve closed
3/11/2012	1:20:45 PM	Helium valve opened
3/11/2012	1:20:45 PM	Main Vac valve opened
3/11/2012	1:20:45 PM	Helium MFC set to  20.000000
3/11/2012	1:20:45 PM	H2 MFC set to  0.000000
3/11/2012	1:20:45 PM	BCl3 MFC set to  0.000000
3/11/2012	1:20:45 PM	PH3 MFC set to  0.000000
3/11/2012	1:20:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:20:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:20:45 PM	Tube furnace set to 0
3/11/2012	1:21:15 PM	Helium valve closed
3/11/2012	1:21:15 PM	H2 valve closed
3/11/2012	1:21:15 PM	BCl3 valve closed
3/11/2012	1:21:15 PM	PH3 valve closed
3/11/2012	1:21:15 PM	SiCl4 pre valve closed
3/11/2012	1:21:15 PM	SiCl4 post valve closed
3/11/2012	1:21:15 PM	Bypass valve closed
3/11/2012	1:21:15 PM	Bubbler valve closed
3/11/2012	1:21:15 PM	Main Vac valve opened
3/11/2012	1:21:15 PM	Helium MFC set to  0.000000
3/11/2012	1:21:15 PM	H2 MFC set to  0.000000
3/11/2012	1:21:15 PM	BCl3 MFC set to  0.000000
3/11/2012	1:21:15 PM	PH3 MFC set to  0.000000
3/11/2012	1:21:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:21:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:21:15 PM	Tube furnace set to 0
3/11/2012	1:21:45 PM	H2 valve closed
3/11/2012	1:21:45 PM	BCl3 valve closed
3/11/2012	1:21:45 PM	PH3 valve closed
3/11/2012	1:21:45 PM	SiCl4 pre valve closed
3/11/2012	1:21:45 PM	SiCl4 post valve closed
3/11/2012	1:21:45 PM	Bypass valve closed
3/11/2012	1:21:45 PM	Bubbler valve closed
3/11/2012	1:21:45 PM	Helium valve opened
3/11/2012	1:21:45 PM	Main Vac valve opened
3/11/2012	1:21:45 PM	Helium MFC set to  20.000000
3/11/2012	1:21:45 PM	H2 MFC set to  0.000000
3/11/2012	1:21:45 PM	BCl3 MFC set to  0.000000
3/11/2012	1:21:45 PM	PH3 MFC set to  0.000000
3/11/2012	1:21:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:21:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:21:46 PM	Tube furnace set to 0
3/11/2012	1:22:16 PM	Helium valve closed
3/11/2012	1:22:16 PM	H2 valve closed
3/11/2012	1:22:16 PM	BCl3 valve closed
3/11/2012	1:22:16 PM	PH3 valve closed
3/11/2012	1:22:16 PM	SiCl4 pre valve closed
3/11/2012	1:22:16 PM	SiCl4 post valve closed
3/11/2012	1:22:16 PM	Bypass valve closed
3/11/2012	1:22:16 PM	Bubbler valve closed
3/11/2012	1:22:16 PM	Main Vac valve opened
3/11/2012	1:22:16 PM	Helium MFC set to  0.000000
3/11/2012	1:22:16 PM	H2 MFC set to  0.000000
3/11/2012	1:22:16 PM	BCl3 MFC set to  0.000000
3/11/2012	1:22:16 PM	PH3 MFC set to  0.000000
3/11/2012	1:22:16 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:22:16 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:22:16 PM	Tube furnace set to 0
3/11/2012	1:22:46 PM	H2 valve closed
3/11/2012	1:22:46 PM	BCl3 valve closed
3/11/2012	1:22:46 PM	PH3 valve closed
3/11/2012	1:22:46 PM	SiCl4 pre valve closed
3/11/2012	1:22:46 PM	SiCl4 post valve closed
3/11/2012	1:22:46 PM	Bypass valve closed
3/11/2012	1:22:46 PM	Bubbler valve closed
3/11/2012	1:22:46 PM	Helium valve opened
3/11/2012	1:22:46 PM	Main Vac valve opened
3/11/2012	1:22:46 PM	Helium MFC set to  20.000000
3/11/2012	1:22:46 PM	H2 MFC set to  0.000000
3/11/2012	1:22:46 PM	BCl3 MFC set to  0.000000
3/11/2012	1:22:46 PM	PH3 MFC set to  0.000000
3/11/2012	1:22:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:22:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:22:46 PM	Tube furnace set to 0
3/11/2012	1:23:16 PM	Helium valve closed
3/11/2012	1:23:16 PM	H2 valve closed
3/11/2012	1:23:16 PM	BCl3 valve closed
3/11/2012	1:23:16 PM	PH3 valve closed
3/11/2012	1:23:16 PM	SiCl4 pre valve closed
3/11/2012	1:23:16 PM	SiCl4 post valve closed
3/11/2012	1:23:16 PM	Bypass valve closed
3/11/2012	1:23:16 PM	Bubbler valve closed
3/11/2012	1:23:16 PM	Main Vac valve opened
3/11/2012	1:23:16 PM	Helium MFC set to  0.000000
3/11/2012	1:23:16 PM	H2 MFC set to  0.000000
3/11/2012	1:23:16 PM	BCl3 MFC set to  0.000000
3/11/2012	1:23:16 PM	PH3 MFC set to  0.000000
3/11/2012	1:23:16 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:23:16 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:23:16 PM	Tube furnace set to 200
3/11/2012	1:23:46 PM	H2 valve closed
3/11/2012	1:23:46 PM	BCl3 valve closed
3/11/2012	1:23:46 PM	PH3 valve closed
3/11/2012	1:23:46 PM	SiCl4 pre valve closed
3/11/2012	1:23:46 PM	SiCl4 post valve closed
3/11/2012	1:23:46 PM	Bypass valve closed
3/11/2012	1:23:46 PM	Bubbler valve closed
3/11/2012	1:23:46 PM	Helium valve opened
3/11/2012	1:23:46 PM	Main Vac valve opened
3/11/2012	1:23:46 PM	Helium MFC set to  20.000000
3/11/2012	1:23:46 PM	H2 MFC set to  0.000000
3/11/2012	1:23:46 PM	BCl3 MFC set to  0.000000
3/11/2012	1:23:46 PM	PH3 MFC set to  0.000000
3/11/2012	1:23:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:23:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:23:46 PM	Tube furnace set to 200
3/11/2012	1:24:16 PM	Helium valve closed
3/11/2012	1:24:16 PM	H2 valve closed
3/11/2012	1:24:16 PM	BCl3 valve closed
3/11/2012	1:24:16 PM	PH3 valve closed
3/11/2012	1:24:17 PM	SiCl4 pre valve closed
3/11/2012	1:24:17 PM	SiCl4 post valve closed
3/11/2012	1:24:17 PM	Bypass valve closed
3/11/2012	1:24:17 PM	Bubbler valve closed
3/11/2012	1:24:17 PM	Main Vac valve opened
3/11/2012	1:24:17 PM	Helium MFC set to  0.000000
3/11/2012	1:24:17 PM	H2 MFC set to  0.000000
3/11/2012	1:24:17 PM	BCl3 MFC set to  0.000000
3/11/2012	1:24:17 PM	PH3 MFC set to  0.000000
3/11/2012	1:24:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:24:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:24:17 PM	Tube furnace set to 200
3/11/2012	1:24:47 PM	H2 valve closed
3/11/2012	1:24:47 PM	BCl3 valve closed
3/11/2012	1:24:47 PM	PH3 valve closed
3/11/2012	1:24:47 PM	SiCl4 pre valve closed
3/11/2012	1:24:47 PM	SiCl4 post valve closed
3/11/2012	1:24:47 PM	Bypass valve closed
3/11/2012	1:24:47 PM	Bubbler valve closed
3/11/2012	1:24:47 PM	Helium valve opened
3/11/2012	1:24:47 PM	Main Vac valve opened
3/11/2012	1:24:47 PM	Helium MFC set to  20.000000
3/11/2012	1:24:47 PM	H2 MFC set to  0.000000
3/11/2012	1:24:47 PM	BCl3 MFC set to  0.000000
3/11/2012	1:24:47 PM	PH3 MFC set to  0.000000
3/11/2012	1:24:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:24:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:24:47 PM	Tube furnace set to 200
3/11/2012	1:25:17 PM	Helium valve closed
3/11/2012	1:25:17 PM	H2 valve closed
3/11/2012	1:25:17 PM	BCl3 valve closed
3/11/2012	1:25:17 PM	PH3 valve closed
3/11/2012	1:25:17 PM	SiCl4 pre valve closed
3/11/2012	1:25:17 PM	SiCl4 post valve closed
3/11/2012	1:25:17 PM	Bypass valve closed
3/11/2012	1:25:17 PM	Bubbler valve closed
3/11/2012	1:25:17 PM	Main Vac valve opened
3/11/2012	1:25:17 PM	Helium MFC set to  0.000000
3/11/2012	1:25:17 PM	H2 MFC set to  0.000000
3/11/2012	1:25:17 PM	BCl3 MFC set to  0.000000
3/11/2012	1:25:17 PM	PH3 MFC set to  0.000000
3/11/2012	1:25:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:25:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:25:17 PM	Tube furnace set to 200
3/11/2012	1:25:47 PM	H2 valve closed
3/11/2012	1:25:47 PM	BCl3 valve closed
3/11/2012	1:25:47 PM	PH3 valve closed
3/11/2012	1:25:47 PM	SiCl4 pre valve closed
3/11/2012	1:25:47 PM	SiCl4 post valve closed
3/11/2012	1:25:47 PM	Bypass valve closed
3/11/2012	1:25:47 PM	Bubbler valve closed
3/11/2012	1:25:47 PM	Helium valve opened
3/11/2012	1:25:47 PM	Main Vac valve opened
3/11/2012	1:25:47 PM	Helium MFC set to  20.000000
3/11/2012	1:25:47 PM	H2 MFC set to  0.000000
3/11/2012	1:25:47 PM	BCl3 MFC set to  0.000000
3/11/2012	1:25:47 PM	PH3 MFC set to  0.000000
3/11/2012	1:25:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:25:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:25:47 PM	Tube furnace set to 200
3/11/2012	1:26:17 PM	Helium valve closed
3/11/2012	1:26:17 PM	H2 valve closed
3/11/2012	1:26:17 PM	BCl3 valve closed
3/11/2012	1:26:17 PM	PH3 valve closed
3/11/2012	1:26:17 PM	SiCl4 pre valve closed
3/11/2012	1:26:17 PM	SiCl4 post valve closed
3/11/2012	1:26:17 PM	Bypass valve closed
3/11/2012	1:26:17 PM	Bubbler valve closed
3/11/2012	1:26:17 PM	Main Vac valve opened
3/11/2012	1:26:17 PM	Helium MFC set to  0.000000
3/11/2012	1:26:17 PM	H2 MFC set to  0.000000
3/11/2012	1:26:17 PM	BCl3 MFC set to  0.000000
3/11/2012	1:26:17 PM	PH3 MFC set to  0.000000
3/11/2012	1:26:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:26:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:26:18 PM	Tube furnace set to 200
3/11/2012	1:26:48 PM	H2 valve closed
3/11/2012	1:26:48 PM	BCl3 valve closed
3/11/2012	1:26:48 PM	PH3 valve closed
3/11/2012	1:26:48 PM	SiCl4 pre valve closed
3/11/2012	1:26:48 PM	SiCl4 post valve closed
3/11/2012	1:26:48 PM	Bypass valve closed
3/11/2012	1:26:48 PM	Bubbler valve closed
3/11/2012	1:26:48 PM	Helium valve opened
3/11/2012	1:26:48 PM	Main Vac valve opened
3/11/2012	1:26:48 PM	Helium MFC set to  20.000000
3/11/2012	1:26:48 PM	H2 MFC set to  0.000000
3/11/2012	1:26:48 PM	BCl3 MFC set to  0.000000
3/11/2012	1:26:48 PM	PH3 MFC set to  0.000000
3/11/2012	1:26:48 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:26:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:26:48 PM	Tube furnace set to 200
3/11/2012	1:27:18 PM	Helium valve closed
3/11/2012	1:27:18 PM	H2 valve closed
3/11/2012	1:27:18 PM	BCl3 valve closed
3/11/2012	1:27:18 PM	PH3 valve closed
3/11/2012	1:27:18 PM	SiCl4 pre valve closed
3/11/2012	1:27:18 PM	SiCl4 post valve closed
3/11/2012	1:27:18 PM	Bypass valve closed
3/11/2012	1:27:18 PM	Bubbler valve closed
3/11/2012	1:27:18 PM	Main Vac valve opened
3/11/2012	1:27:18 PM	Helium MFC set to  0.000000
3/11/2012	1:27:18 PM	H2 MFC set to  0.000000
3/11/2012	1:27:18 PM	BCl3 MFC set to  0.000000
3/11/2012	1:27:18 PM	PH3 MFC set to  0.000000
3/11/2012	1:27:18 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:27:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:27:18 PM	Tube furnace set to 200
3/11/2012	1:27:48 PM	H2 valve closed
3/11/2012	1:27:48 PM	BCl3 valve closed
3/11/2012	1:27:48 PM	PH3 valve closed
3/11/2012	1:27:48 PM	SiCl4 pre valve closed
3/11/2012	1:27:48 PM	SiCl4 post valve closed
3/11/2012	1:27:48 PM	Bypass valve closed
3/11/2012	1:27:48 PM	Bubbler valve closed
3/11/2012	1:27:48 PM	Helium valve opened
3/11/2012	1:27:48 PM	Main Vac valve opened
3/11/2012	1:27:48 PM	Helium MFC set to  20.000000
3/11/2012	1:27:48 PM	H2 MFC set to  0.000000
3/11/2012	1:27:48 PM	BCl3 MFC set to  0.000000
3/11/2012	1:27:48 PM	PH3 MFC set to  0.000000
3/11/2012	1:27:48 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:27:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:27:48 PM	Tube furnace set to 200
3/11/2012	1:28:18 PM	Helium valve closed
3/11/2012	1:28:18 PM	H2 valve closed
3/11/2012	1:28:18 PM	BCl3 valve closed
3/11/2012	1:28:18 PM	PH3 valve closed
3/11/2012	1:28:18 PM	SiCl4 pre valve closed
3/11/2012	1:28:18 PM	SiCl4 post valve closed
3/11/2012	1:28:18 PM	Bypass valve closed
3/11/2012	1:28:18 PM	Bubbler valve closed
3/11/2012	1:28:18 PM	Main Vac valve opened
3/11/2012	1:28:18 PM	Helium MFC set to  0.000000
3/11/2012	1:28:18 PM	H2 MFC set to  0.000000
3/11/2012	1:28:18 PM	BCl3 MFC set to  0.000000
3/11/2012	1:28:18 PM	PH3 MFC set to  0.000000
3/11/2012	1:28:18 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:28:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:28:18 PM	Tube furnace set to 200
3/11/2012	1:28:48 PM	H2 valve closed
3/11/2012	1:28:48 PM	BCl3 valve closed
3/11/2012	1:28:48 PM	PH3 valve closed
3/11/2012	1:28:48 PM	SiCl4 pre valve closed
3/11/2012	1:28:48 PM	SiCl4 post valve closed
3/11/2012	1:28:48 PM	Bypass valve closed
3/11/2012	1:28:48 PM	Bubbler valve closed
3/11/2012	1:28:48 PM	Helium valve opened
3/11/2012	1:28:48 PM	Main Vac valve opened
3/11/2012	1:28:48 PM	Helium MFC set to  20.000000
3/11/2012	1:28:48 PM	H2 MFC set to  0.000000
3/11/2012	1:28:48 PM	BCl3 MFC set to  0.000000
3/11/2012	1:28:48 PM	PH3 MFC set to  0.000000
3/11/2012	1:28:48 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:28:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:28:49 PM	Tube furnace set to 200
3/11/2012	1:29:19 PM	Helium valve closed
3/11/2012	1:29:19 PM	H2 valve closed
3/11/2012	1:29:19 PM	BCl3 valve closed
3/11/2012	1:29:19 PM	PH3 valve closed
3/11/2012	1:29:19 PM	SiCl4 pre valve closed
3/11/2012	1:29:19 PM	SiCl4 post valve closed
3/11/2012	1:29:19 PM	Bypass valve closed
3/11/2012	1:29:19 PM	Bubbler valve closed
3/11/2012	1:29:19 PM	Main Vac valve opened
3/11/2012	1:29:19 PM	Helium MFC set to  0.000000
3/11/2012	1:29:19 PM	H2 MFC set to  0.000000
3/11/2012	1:29:19 PM	BCl3 MFC set to  0.000000
3/11/2012	1:29:19 PM	PH3 MFC set to  0.000000
3/11/2012	1:29:19 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:29:19 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:29:19 PM	Tube furnace set to 0
3/11/2012	1:29:20 PM	Run finished at 1:29 PM
3/11/2012	1:51:37 PM	Recipe started at 1:51 PM
3/11/2012	1:51:37 PM	Helium valve closed
3/11/2012	1:51:37 PM	H2 valve closed
3/11/2012	1:51:37 PM	BCl3 valve closed
3/11/2012	1:51:37 PM	PH3 valve closed
3/11/2012	1:51:37 PM	SiCl4 pre valve closed
3/11/2012	1:51:37 PM	SiCl4 post valve closed
3/11/2012	1:51:37 PM	Main Vac valve closed
3/11/2012	1:51:37 PM	Bypass valve closed
3/11/2012	1:51:37 PM	Bubbler valve closed
3/11/2012	1:51:37 PM	Helium MFC set to  0.000000
3/11/2012	1:51:37 PM	H2 MFC set to  0.000000
3/11/2012	1:51:37 PM	BCl3 MFC set to  0.000000
3/11/2012	1:51:37 PM	PH3 MFC set to  0.000000
3/11/2012	1:51:37 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:51:37 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:51:37 PM	Tube furnace set to 0
3/11/2012	1:51:40 PM	Helium valve closed
3/11/2012	1:51:40 PM	BCl3 valve closed
3/11/2012	1:51:40 PM	PH3 valve closed
3/11/2012	1:51:40 PM	SiCl4 pre valve closed
3/11/2012	1:51:40 PM	SiCl4 post valve closed
3/11/2012	1:51:40 PM	Main Vac valve closed
3/11/2012	1:51:40 PM	Bypass valve closed
3/11/2012	1:51:40 PM	Bubbler valve closed
3/11/2012	1:51:40 PM	H2 valve opened
3/11/2012	1:51:40 PM	Helium MFC set to  0.000000
3/11/2012	1:51:40 PM	H2 MFC set to  500.000000
3/11/2012	1:51:40 PM	BCl3 MFC set to  0.000000
3/11/2012	1:51:40 PM	PH3 MFC set to  0.000000
3/11/2012	1:51:40 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:51:40 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:51:40 PM	Tube furnace set to 0
3/11/2012	1:52:45 PM	Helium valve closed
3/11/2012	1:52:45 PM	BCl3 valve closed
3/11/2012	1:52:45 PM	PH3 valve closed
3/11/2012	1:52:45 PM	SiCl4 pre valve closed
3/11/2012	1:52:45 PM	SiCl4 post valve closed
3/11/2012	1:52:45 PM	Main Vac valve closed
3/11/2012	1:52:45 PM	Bypass valve closed
3/11/2012	1:52:45 PM	H2 valve opened
3/11/2012	1:52:45 PM	Bubbler valve opened
3/11/2012	1:52:45 PM	Helium MFC set to  0.000000
3/11/2012	1:52:45 PM	H2 MFC set to  500.000000
3/11/2012	1:52:45 PM	BCl3 MFC set to  0.000000
3/11/2012	1:52:45 PM	PH3 MFC set to  0.000000
3/11/2012	1:52:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:52:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:52:45 PM	Tube furnace set to 0
3/11/2012	1:52:46 PM	Helium valve closed
3/11/2012	1:52:46 PM	BCl3 valve closed
3/11/2012	1:52:46 PM	PH3 valve closed
3/11/2012	1:52:46 PM	SiCl4 pre valve closed
3/11/2012	1:52:46 PM	SiCl4 post valve closed
3/11/2012	1:52:46 PM	Main Vac valve closed
3/11/2012	1:52:46 PM	Bypass valve closed
3/11/2012	1:52:46 PM	H2 valve opened
3/11/2012	1:52:46 PM	Bubbler valve opened
3/11/2012	1:52:46 PM	Helium MFC set to  0.000000
3/11/2012	1:52:46 PM	H2 MFC set to  500.000000
3/11/2012	1:52:46 PM	BCl3 MFC set to  0.000000
3/11/2012	1:52:46 PM	PH3 MFC set to  0.000000
3/11/2012	1:52:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	1:52:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	1:52:46 PM	Tube furnace set to 1000
3/11/2012	2:12:46 PM	Helium valve closed
3/11/2012	2:12:46 PM	PH3 valve closed
3/11/2012	2:12:46 PM	Main Vac valve closed
3/11/2012	2:12:46 PM	Bypass valve closed
3/11/2012	2:12:46 PM	H2 valve opened
3/11/2012	2:12:46 PM	BCl3 valve opened
3/11/2012	2:12:46 PM	SiCl4 pre valve opened
3/11/2012	2:12:46 PM	SiCl4 post valve opened
3/11/2012	2:12:46 PM	Bubbler valve opened
3/11/2012	2:12:46 PM	Helium MFC set to  0.000000
3/11/2012	2:12:46 PM	H2 MFC set to  450.000000
3/11/2012	2:12:46 PM	BCl3 MFC set to  1.500000
3/11/2012	2:12:46 PM	PH3 MFC set to  0.000000
3/11/2012	2:12:46 PM	SiCl4 MFC set to  50.000000
3/11/2012	2:12:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:12:46 PM	Tube furnace set to 1000
3/11/2012	2:27:46 PM	Helium valve closed
3/11/2012	2:27:46 PM	BCl3 valve closed
3/11/2012	2:27:46 PM	PH3 valve closed
3/11/2012	2:27:46 PM	SiCl4 pre valve closed
3/11/2012	2:27:46 PM	SiCl4 post valve closed
3/11/2012	2:27:46 PM	Main Vac valve closed
3/11/2012	2:27:46 PM	Bypass valve closed
3/11/2012	2:27:46 PM	H2 valve opened
3/11/2012	2:27:46 PM	Bubbler valve opened
3/11/2012	2:27:46 PM	Helium MFC set to  0.000000
3/11/2012	2:27:46 PM	H2 MFC set to  500.000000
3/11/2012	2:27:46 PM	BCl3 MFC set to  0.000000
3/11/2012	2:27:46 PM	PH3 MFC set to  0.000000
3/11/2012	2:27:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:27:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:27:46 PM	Tube furnace set to 950
3/11/2012	2:29:46 PM	Helium valve closed
3/11/2012	2:29:46 PM	BCl3 valve closed
3/11/2012	2:29:46 PM	PH3 valve closed
3/11/2012	2:29:46 PM	SiCl4 pre valve closed
3/11/2012	2:29:46 PM	SiCl4 post valve closed
3/11/2012	2:29:46 PM	Main Vac valve closed
3/11/2012	2:29:46 PM	Bypass valve closed
3/11/2012	2:29:46 PM	H2 valve opened
3/11/2012	2:29:46 PM	Bubbler valve opened
3/11/2012	2:29:46 PM	Helium MFC set to  0.000000
3/11/2012	2:29:46 PM	H2 MFC set to  500.000000
3/11/2012	2:29:46 PM	BCl3 MFC set to  0.000000
3/11/2012	2:29:46 PM	PH3 MFC set to  0.000000
3/11/2012	2:29:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:29:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:29:47 PM	Tube furnace set to 900
3/11/2012	2:31:47 PM	Helium valve closed
3/11/2012	2:31:47 PM	BCl3 valve closed
3/11/2012	2:31:47 PM	PH3 valve closed
3/11/2012	2:31:47 PM	SiCl4 pre valve closed
3/11/2012	2:31:47 PM	SiCl4 post valve closed
3/11/2012	2:31:47 PM	Main Vac valve closed
3/11/2012	2:31:47 PM	Bypass valve closed
3/11/2012	2:31:47 PM	H2 valve opened
3/11/2012	2:31:47 PM	Bubbler valve opened
3/11/2012	2:31:47 PM	Helium MFC set to  0.000000
3/11/2012	2:31:47 PM	H2 MFC set to  500.000000
3/11/2012	2:31:47 PM	BCl3 MFC set to  0.000000
3/11/2012	2:31:47 PM	PH3 MFC set to  0.000000
3/11/2012	2:31:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:31:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:31:47 PM	Tube furnace set to 850
3/11/2012	2:33:47 PM	H2 valve closed
3/11/2012	2:33:47 PM	BCl3 valve closed
3/11/2012	2:33:47 PM	PH3 valve closed
3/11/2012	2:33:47 PM	SiCl4 pre valve closed
3/11/2012	2:33:47 PM	SiCl4 post valve closed
3/11/2012	2:33:47 PM	Main Vac valve closed
3/11/2012	2:33:47 PM	Bypass valve closed
3/11/2012	2:33:47 PM	Helium valve opened
3/11/2012	2:33:47 PM	Bubbler valve opened
3/11/2012	2:33:47 PM	Helium MFC set to  500.000000
3/11/2012	2:33:47 PM	H2 MFC set to  0.000000
3/11/2012	2:33:47 PM	BCl3 MFC set to  0.000000
3/11/2012	2:33:47 PM	PH3 MFC set to  0.000000
3/11/2012	2:33:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:33:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:33:47 PM	Tube furnace set to 800
3/11/2012	2:35:47 PM	H2 valve closed
3/11/2012	2:35:47 PM	BCl3 valve closed
3/11/2012	2:35:47 PM	PH3 valve closed
3/11/2012	2:35:47 PM	SiCl4 pre valve closed
3/11/2012	2:35:47 PM	SiCl4 post valve closed
3/11/2012	2:35:47 PM	Main Vac valve closed
3/11/2012	2:35:47 PM	Bypass valve closed
3/11/2012	2:35:47 PM	Helium valve opened
3/11/2012	2:35:47 PM	Bubbler valve opened
3/11/2012	2:35:47 PM	Helium MFC set to  500.000000
3/11/2012	2:35:47 PM	H2 MFC set to  0.000000
3/11/2012	2:35:47 PM	BCl3 MFC set to  0.000000
3/11/2012	2:35:47 PM	PH3 MFC set to  0.000000
3/11/2012	2:35:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:35:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:35:47 PM	Tube furnace set to 750
3/11/2012	2:37:47 PM	H2 valve closed
3/11/2012	2:37:47 PM	BCl3 valve closed
3/11/2012	2:37:47 PM	PH3 valve closed
3/11/2012	2:37:47 PM	SiCl4 pre valve closed
3/11/2012	2:37:47 PM	SiCl4 post valve closed
3/11/2012	2:37:47 PM	Main Vac valve closed
3/11/2012	2:37:47 PM	Bypass valve closed
3/11/2012	2:37:47 PM	Helium valve opened
3/11/2012	2:37:47 PM	Bubbler valve opened
3/11/2012	2:37:47 PM	Helium MFC set to  500.000000
3/11/2012	2:37:47 PM	H2 MFC set to  0.000000
3/11/2012	2:37:47 PM	BCl3 MFC set to  0.000000
3/11/2012	2:37:47 PM	PH3 MFC set to  0.000000
3/11/2012	2:37:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:37:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:37:47 PM	Tube furnace set to 0
3/11/2012	2:57:47 PM	Helium valve closed
3/11/2012	2:57:47 PM	H2 valve closed
3/11/2012	2:57:47 PM	BCl3 valve closed
3/11/2012	2:57:47 PM	PH3 valve closed
3/11/2012	2:57:47 PM	SiCl4 pre valve closed
3/11/2012	2:57:47 PM	SiCl4 post valve closed
3/11/2012	2:57:47 PM	Main Vac valve closed
3/11/2012	2:57:47 PM	Bypass valve closed
3/11/2012	2:57:47 PM	Bubbler valve closed
3/11/2012	2:57:47 PM	Helium MFC set to  0.000000
3/11/2012	2:57:47 PM	H2 MFC set to  0.000000
3/11/2012	2:57:47 PM	BCl3 MFC set to  0.000000
3/11/2012	2:57:47 PM	PH3 MFC set to  0.000000
3/11/2012	2:57:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:57:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:57:48 PM	Tube furnace set to 0
3/11/2012	2:57:49 PM	Helium valve closed
3/11/2012	2:57:49 PM	H2 valve closed
3/11/2012	2:57:49 PM	BCl3 valve closed
3/11/2012	2:57:49 PM	PH3 valve closed
3/11/2012	2:57:49 PM	SiCl4 pre valve closed
3/11/2012	2:57:49 PM	SiCl4 post valve closed
3/11/2012	2:57:49 PM	Main Vac valve closed
3/11/2012	2:57:49 PM	Bubbler valve closed
3/11/2012	2:57:49 PM	Bypass valve opened
3/11/2012	2:57:49 PM	Helium MFC set to  0.000000
3/11/2012	2:57:49 PM	H2 MFC set to  0.000000
3/11/2012	2:57:49 PM	BCl3 MFC set to  0.000000
3/11/2012	2:57:49 PM	PH3 MFC set to  0.000000
3/11/2012	2:57:49 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:57:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:57:49 PM	Tube furnace set to 0
3/11/2012	2:58:35 PM	Helium valve closed
3/11/2012	2:58:35 PM	H2 valve closed
3/11/2012	2:58:35 PM	BCl3 valve closed
3/11/2012	2:58:35 PM	PH3 valve closed
3/11/2012	2:58:35 PM	SiCl4 pre valve closed
3/11/2012	2:58:35 PM	SiCl4 post valve closed
3/11/2012	2:58:35 PM	Main Vac valve closed
3/11/2012	2:58:35 PM	Bubbler valve closed
3/11/2012	2:58:35 PM	Bypass valve opened
3/11/2012	2:58:35 PM	Helium MFC set to  0.000000
3/11/2012	2:58:35 PM	H2 MFC set to  0.000000
3/11/2012	2:58:35 PM	BCl3 MFC set to  0.000000
3/11/2012	2:58:35 PM	PH3 MFC set to  0.000000
3/11/2012	2:58:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:58:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:58:35 PM	Tube furnace set to 0
3/11/2012	2:59:35 PM	Helium valve closed
3/11/2012	2:59:35 PM	H2 valve closed
3/11/2012	2:59:35 PM	BCl3 valve closed
3/11/2012	2:59:35 PM	PH3 valve closed
3/11/2012	2:59:35 PM	SiCl4 pre valve closed
3/11/2012	2:59:35 PM	SiCl4 post valve closed
3/11/2012	2:59:35 PM	Bypass valve closed
3/11/2012	2:59:35 PM	Bubbler valve closed
3/11/2012	2:59:35 PM	Main Vac valve opened
3/11/2012	2:59:35 PM	Helium MFC set to  0.000000
3/11/2012	2:59:35 PM	H2 MFC set to  0.000000
3/11/2012	2:59:35 PM	BCl3 MFC set to  0.000000
3/11/2012	2:59:35 PM	PH3 MFC set to  0.000000
3/11/2012	2:59:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	2:59:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	2:59:35 PM	Tube furnace set to 0
3/11/2012	2:59:36 PM	Run finished at 2:59 PM
3/11/2012	3:13:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	3:13:05 PM	Recipe started at 3:13 PM
3/11/2012	3:13:05 PM	Helium valve closed
3/11/2012	3:13:05 PM	H2 valve closed
3/11/2012	3:13:05 PM	BCl3 valve closed
3/11/2012	3:13:05 PM	PH3 valve closed
3/11/2012	3:13:05 PM	SiCl4 pre valve closed
3/11/2012	3:13:05 PM	SiCl4 post valve closed
3/11/2012	3:13:05 PM	Main Vac valve closed
3/11/2012	3:13:05 PM	Bypass valve closed
3/11/2012	3:13:05 PM	Bubbler valve closed
3/11/2012	3:13:05 PM	Helium MFC set to  0.000000
3/11/2012	3:13:05 PM	H2 MFC set to  0.000000
3/11/2012	3:13:05 PM	BCl3 MFC set to  0.000000
3/11/2012	3:13:05 PM	PH3 MFC set to  0.000000
3/11/2012	3:13:05 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:13:05 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:13:05 PM	Tube furnace set to 0
3/11/2012	3:13:08 PM	H2 valve closed
3/11/2012	3:13:08 PM	BCl3 valve closed
3/11/2012	3:13:08 PM	PH3 valve closed
3/11/2012	3:13:08 PM	SiCl4 pre valve closed
3/11/2012	3:13:08 PM	SiCl4 post valve closed
3/11/2012	3:13:08 PM	Main Vac valve closed
3/11/2012	3:13:08 PM	Bypass valve closed
3/11/2012	3:13:08 PM	Bubbler valve closed
3/11/2012	3:13:08 PM	Helium valve opened
3/11/2012	3:13:08 PM	Helium MFC set to  500.000000
3/11/2012	3:13:08 PM	H2 MFC set to  0.000000
3/11/2012	3:13:08 PM	BCl3 MFC set to  0.000000
3/11/2012	3:13:08 PM	PH3 MFC set to  0.000000
3/11/2012	3:13:08 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:13:08 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:13:08 PM	Tube furnace set to 0
3/11/2012	3:14:08 PM	Helium valve closed
3/11/2012	3:14:08 PM	H2 valve closed
3/11/2012	3:14:08 PM	BCl3 valve closed
3/11/2012	3:14:08 PM	PH3 valve closed
3/11/2012	3:14:08 PM	SiCl4 pre valve closed
3/11/2012	3:14:08 PM	SiCl4 post valve closed
3/11/2012	3:14:08 PM	Main Vac valve closed
3/11/2012	3:14:08 PM	Bypass valve closed
3/11/2012	3:14:08 PM	Bubbler valve closed
3/11/2012	3:14:08 PM	Helium MFC set to  0.000000
3/11/2012	3:14:08 PM	H2 MFC set to  0.000000
3/11/2012	3:14:08 PM	BCl3 MFC set to  0.000000
3/11/2012	3:14:08 PM	PH3 MFC set to  0.000000
3/11/2012	3:14:08 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:14:08 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:14:08 PM	Tube furnace set to 0
3/11/2012	3:14:09 PM	Run finished at 3:14 PM
3/11/2012	3:14:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	3:16:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	3:16:33 PM	Recipe started at 3:16 PM
3/11/2012	3:16:33 PM	Helium valve closed
3/11/2012	3:16:33 PM	H2 valve closed
3/11/2012	3:16:33 PM	BCl3 valve closed
3/11/2012	3:16:33 PM	PH3 valve closed
3/11/2012	3:16:33 PM	SiCl4 pre valve closed
3/11/2012	3:16:33 PM	SiCl4 post valve closed
3/11/2012	3:16:33 PM	Main Vac valve closed
3/11/2012	3:16:33 PM	Bubbler valve closed
3/11/2012	3:16:33 PM	Bypass valve opened
3/11/2012	3:16:33 PM	Helium MFC set to  0.000000
3/11/2012	3:16:33 PM	H2 MFC set to  0.000000
3/11/2012	3:16:33 PM	BCl3 MFC set to  0.000000
3/11/2012	3:16:33 PM	PH3 MFC set to  0.000000
3/11/2012	3:16:33 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:16:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:16:33 PM	Tube furnace set to 0
3/11/2012	3:17:31 PM	Helium valve closed
3/11/2012	3:17:31 PM	H2 valve closed
3/11/2012	3:17:31 PM	BCl3 valve closed
3/11/2012	3:17:31 PM	PH3 valve closed
3/11/2012	3:17:31 PM	SiCl4 pre valve closed
3/11/2012	3:17:31 PM	SiCl4 post valve closed
3/11/2012	3:17:31 PM	Main Vac valve closed
3/11/2012	3:17:31 PM	Bubbler valve closed
3/11/2012	3:17:31 PM	Bypass valve opened
3/11/2012	3:17:31 PM	Helium MFC set to  0.000000
3/11/2012	3:17:31 PM	H2 MFC set to  0.000000
3/11/2012	3:17:31 PM	BCl3 MFC set to  0.000000
3/11/2012	3:17:31 PM	PH3 MFC set to  0.000000
3/11/2012	3:17:31 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:17:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:17:31 PM	Tube furnace set to 0
3/11/2012	3:18:31 PM	Helium valve closed
3/11/2012	3:18:31 PM	H2 valve closed
3/11/2012	3:18:31 PM	BCl3 valve closed
3/11/2012	3:18:31 PM	PH3 valve closed
3/11/2012	3:18:31 PM	SiCl4 pre valve closed
3/11/2012	3:18:31 PM	SiCl4 post valve closed
3/11/2012	3:18:31 PM	Bypass valve closed
3/11/2012	3:18:31 PM	Bubbler valve closed
3/11/2012	3:18:31 PM	Main Vac valve opened
3/11/2012	3:18:31 PM	Helium MFC set to  0.000000
3/11/2012	3:18:31 PM	H2 MFC set to  0.000000
3/11/2012	3:18:31 PM	BCl3 MFC set to  0.000000
3/11/2012	3:18:31 PM	PH3 MFC set to  0.000000
3/11/2012	3:18:31 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:18:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:18:31 PM	Tube furnace set to 0
3/11/2012	3:18:32 PM	Run finished at 3:18 PM
3/11/2012	3:18:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	3:26:44 PM	Recipe started at 3:26 PM
3/11/2012	3:26:44 PM	Helium valve closed
3/11/2012	3:26:44 PM	H2 valve closed
3/11/2012	3:26:44 PM	BCl3 valve closed
3/11/2012	3:26:44 PM	PH3 valve closed
3/11/2012	3:26:44 PM	SiCl4 pre valve closed
3/11/2012	3:26:44 PM	SiCl4 post valve closed
3/11/2012	3:26:44 PM	Bypass valve closed
3/11/2012	3:26:44 PM	Bubbler valve closed
3/11/2012	3:26:44 PM	Main Vac valve opened
3/11/2012	3:26:44 PM	Helium MFC set to  0.000000
3/11/2012	3:26:44 PM	H2 MFC set to  0.000000
3/11/2012	3:26:44 PM	BCl3 MFC set to  0.000000
3/11/2012	3:26:44 PM	PH3 MFC set to  0.000000
3/11/2012	3:26:44 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:26:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:26:44 PM	Tube furnace set to 0
3/11/2012	3:27:14 PM	H2 valve closed
3/11/2012	3:27:14 PM	BCl3 valve closed
3/11/2012	3:27:14 PM	PH3 valve closed
3/11/2012	3:27:14 PM	SiCl4 pre valve closed
3/11/2012	3:27:14 PM	SiCl4 post valve closed
3/11/2012	3:27:14 PM	Bypass valve closed
3/11/2012	3:27:14 PM	Bubbler valve closed
3/11/2012	3:27:14 PM	Helium valve opened
3/11/2012	3:27:14 PM	Main Vac valve opened
3/11/2012	3:27:14 PM	Helium MFC set to  20.000000
3/11/2012	3:27:14 PM	H2 MFC set to  0.000000
3/11/2012	3:27:14 PM	BCl3 MFC set to  0.000000
3/11/2012	3:27:14 PM	PH3 MFC set to  0.000000
3/11/2012	3:27:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:27:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:27:14 PM	Tube furnace set to 0
3/11/2012	3:27:44 PM	Helium valve closed
3/11/2012	3:27:44 PM	H2 valve closed
3/11/2012	3:27:44 PM	BCl3 valve closed
3/11/2012	3:27:44 PM	PH3 valve closed
3/11/2012	3:27:44 PM	SiCl4 pre valve closed
3/11/2012	3:27:44 PM	SiCl4 post valve closed
3/11/2012	3:27:44 PM	Bypass valve closed
3/11/2012	3:27:44 PM	Bubbler valve closed
3/11/2012	3:27:44 PM	Main Vac valve opened
3/11/2012	3:27:44 PM	Helium MFC set to  0.000000
3/11/2012	3:27:44 PM	H2 MFC set to  0.000000
3/11/2012	3:27:44 PM	BCl3 MFC set to  0.000000
3/11/2012	3:27:44 PM	PH3 MFC set to  0.000000
3/11/2012	3:27:44 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:27:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:27:44 PM	Tube furnace set to 0
3/11/2012	3:28:14 PM	H2 valve closed
3/11/2012	3:28:14 PM	BCl3 valve closed
3/11/2012	3:28:14 PM	PH3 valve closed
3/11/2012	3:28:14 PM	SiCl4 pre valve closed
3/11/2012	3:28:14 PM	SiCl4 post valve closed
3/11/2012	3:28:14 PM	Bypass valve closed
3/11/2012	3:28:14 PM	Bubbler valve closed
3/11/2012	3:28:14 PM	Helium valve opened
3/11/2012	3:28:14 PM	Main Vac valve opened
3/11/2012	3:28:14 PM	Helium MFC set to  20.000000
3/11/2012	3:28:14 PM	H2 MFC set to  0.000000
3/11/2012	3:28:14 PM	BCl3 MFC set to  0.000000
3/11/2012	3:28:14 PM	PH3 MFC set to  0.000000
3/11/2012	3:28:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:28:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:28:14 PM	Tube furnace set to 0
3/11/2012	3:28:44 PM	Helium valve closed
3/11/2012	3:28:44 PM	H2 valve closed
3/11/2012	3:28:44 PM	BCl3 valve closed
3/11/2012	3:28:44 PM	PH3 valve closed
3/11/2012	3:28:44 PM	SiCl4 pre valve closed
3/11/2012	3:28:44 PM	SiCl4 post valve closed
3/11/2012	3:28:44 PM	Bypass valve closed
3/11/2012	3:28:44 PM	Bubbler valve closed
3/11/2012	3:28:44 PM	Main Vac valve opened
3/11/2012	3:28:44 PM	Helium MFC set to  0.000000
3/11/2012	3:28:44 PM	H2 MFC set to  0.000000
3/11/2012	3:28:44 PM	BCl3 MFC set to  0.000000
3/11/2012	3:28:44 PM	PH3 MFC set to  0.000000
3/11/2012	3:28:44 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:28:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:28:45 PM	Tube furnace set to 0
3/11/2012	3:29:15 PM	H2 valve closed
3/11/2012	3:29:15 PM	BCl3 valve closed
3/11/2012	3:29:15 PM	PH3 valve closed
3/11/2012	3:29:15 PM	SiCl4 pre valve closed
3/11/2012	3:29:15 PM	SiCl4 post valve closed
3/11/2012	3:29:15 PM	Bypass valve closed
3/11/2012	3:29:15 PM	Bubbler valve closed
3/11/2012	3:29:15 PM	Helium valve opened
3/11/2012	3:29:15 PM	Main Vac valve opened
3/11/2012	3:29:15 PM	Helium MFC set to  20.000000
3/11/2012	3:29:15 PM	H2 MFC set to  0.000000
3/11/2012	3:29:15 PM	BCl3 MFC set to  0.000000
3/11/2012	3:29:15 PM	PH3 MFC set to  0.000000
3/11/2012	3:29:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:29:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:29:15 PM	Tube furnace set to 0
3/11/2012	3:29:45 PM	Helium valve closed
3/11/2012	3:29:45 PM	H2 valve closed
3/11/2012	3:29:45 PM	BCl3 valve closed
3/11/2012	3:29:45 PM	PH3 valve closed
3/11/2012	3:29:45 PM	SiCl4 pre valve closed
3/11/2012	3:29:45 PM	SiCl4 post valve closed
3/11/2012	3:29:45 PM	Bypass valve closed
3/11/2012	3:29:45 PM	Bubbler valve closed
3/11/2012	3:29:45 PM	Main Vac valve opened
3/11/2012	3:29:45 PM	Helium MFC set to  0.000000
3/11/2012	3:29:45 PM	H2 MFC set to  0.000000
3/11/2012	3:29:45 PM	BCl3 MFC set to  0.000000
3/11/2012	3:29:45 PM	PH3 MFC set to  0.000000
3/11/2012	3:29:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:29:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:29:45 PM	Tube furnace set to 0
3/11/2012	3:30:15 PM	H2 valve closed
3/11/2012	3:30:15 PM	BCl3 valve closed
3/11/2012	3:30:15 PM	PH3 valve closed
3/11/2012	3:30:15 PM	SiCl4 pre valve closed
3/11/2012	3:30:15 PM	SiCl4 post valve closed
3/11/2012	3:30:15 PM	Bypass valve closed
3/11/2012	3:30:15 PM	Bubbler valve closed
3/11/2012	3:30:15 PM	Helium valve opened
3/11/2012	3:30:15 PM	Main Vac valve opened
3/11/2012	3:30:15 PM	Helium MFC set to  20.000000
3/11/2012	3:30:15 PM	H2 MFC set to  0.000000
3/11/2012	3:30:15 PM	BCl3 MFC set to  0.000000
3/11/2012	3:30:15 PM	PH3 MFC set to  0.000000
3/11/2012	3:30:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:30:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:30:15 PM	Tube furnace set to 0
3/11/2012	3:30:45 PM	Helium valve closed
3/11/2012	3:30:45 PM	H2 valve closed
3/11/2012	3:30:45 PM	BCl3 valve closed
3/11/2012	3:30:45 PM	PH3 valve closed
3/11/2012	3:30:45 PM	SiCl4 pre valve closed
3/11/2012	3:30:45 PM	SiCl4 post valve closed
3/11/2012	3:30:45 PM	Bypass valve closed
3/11/2012	3:30:45 PM	Bubbler valve closed
3/11/2012	3:30:45 PM	Main Vac valve opened
3/11/2012	3:30:45 PM	Helium MFC set to  0.000000
3/11/2012	3:30:45 PM	H2 MFC set to  0.000000
3/11/2012	3:30:45 PM	BCl3 MFC set to  0.000000
3/11/2012	3:30:45 PM	PH3 MFC set to  0.000000
3/11/2012	3:30:45 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:30:45 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:30:45 PM	Tube furnace set to 0
3/11/2012	3:31:15 PM	H2 valve closed
3/11/2012	3:31:15 PM	BCl3 valve closed
3/11/2012	3:31:15 PM	PH3 valve closed
3/11/2012	3:31:15 PM	SiCl4 pre valve closed
3/11/2012	3:31:15 PM	SiCl4 post valve closed
3/11/2012	3:31:15 PM	Bypass valve closed
3/11/2012	3:31:15 PM	Bubbler valve closed
3/11/2012	3:31:15 PM	Helium valve opened
3/11/2012	3:31:15 PM	Main Vac valve opened
3/11/2012	3:31:15 PM	Helium MFC set to  20.000000
3/11/2012	3:31:15 PM	H2 MFC set to  0.000000
3/11/2012	3:31:15 PM	BCl3 MFC set to  0.000000
3/11/2012	3:31:15 PM	PH3 MFC set to  0.000000
3/11/2012	3:31:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:31:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:31:16 PM	Tube furnace set to 0
3/11/2012	3:31:46 PM	Helium valve closed
3/11/2012	3:31:46 PM	H2 valve closed
3/11/2012	3:31:46 PM	BCl3 valve closed
3/11/2012	3:31:46 PM	PH3 valve closed
3/11/2012	3:31:46 PM	SiCl4 pre valve closed
3/11/2012	3:31:46 PM	SiCl4 post valve closed
3/11/2012	3:31:46 PM	Bypass valve closed
3/11/2012	3:31:46 PM	Bubbler valve closed
3/11/2012	3:31:46 PM	Main Vac valve opened
3/11/2012	3:31:46 PM	Helium MFC set to  0.000000
3/11/2012	3:31:46 PM	H2 MFC set to  0.000000
3/11/2012	3:31:46 PM	BCl3 MFC set to  0.000000
3/11/2012	3:31:46 PM	PH3 MFC set to  0.000000
3/11/2012	3:31:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:31:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:31:46 PM	Tube furnace set to 0
3/11/2012	3:32:16 PM	H2 valve closed
3/11/2012	3:32:16 PM	BCl3 valve closed
3/11/2012	3:32:16 PM	PH3 valve closed
3/11/2012	3:32:16 PM	SiCl4 pre valve closed
3/11/2012	3:32:16 PM	SiCl4 post valve closed
3/11/2012	3:32:16 PM	Bypass valve closed
3/11/2012	3:32:16 PM	Bubbler valve closed
3/11/2012	3:32:16 PM	Helium valve opened
3/11/2012	3:32:16 PM	Main Vac valve opened
3/11/2012	3:32:16 PM	Helium MFC set to  20.000000
3/11/2012	3:32:16 PM	H2 MFC set to  0.000000
3/11/2012	3:32:16 PM	BCl3 MFC set to  0.000000
3/11/2012	3:32:16 PM	PH3 MFC set to  0.000000
3/11/2012	3:32:16 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:32:16 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:32:16 PM	Tube furnace set to 0
3/11/2012	3:32:46 PM	Helium valve closed
3/11/2012	3:32:46 PM	H2 valve closed
3/11/2012	3:32:46 PM	BCl3 valve closed
3/11/2012	3:32:46 PM	PH3 valve closed
3/11/2012	3:32:46 PM	SiCl4 pre valve closed
3/11/2012	3:32:46 PM	SiCl4 post valve closed
3/11/2012	3:32:46 PM	Bypass valve closed
3/11/2012	3:32:46 PM	Bubbler valve closed
3/11/2012	3:32:46 PM	Main Vac valve opened
3/11/2012	3:32:46 PM	Helium MFC set to  0.000000
3/11/2012	3:32:46 PM	H2 MFC set to  0.000000
3/11/2012	3:32:46 PM	BCl3 MFC set to  0.000000
3/11/2012	3:32:46 PM	PH3 MFC set to  0.000000
3/11/2012	3:32:46 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:32:46 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:32:46 PM	Tube furnace set to 0
3/11/2012	3:33:16 PM	H2 valve closed
3/11/2012	3:33:16 PM	BCl3 valve closed
3/11/2012	3:33:16 PM	PH3 valve closed
3/11/2012	3:33:16 PM	SiCl4 pre valve closed
3/11/2012	3:33:16 PM	SiCl4 post valve closed
3/11/2012	3:33:16 PM	Bypass valve closed
3/11/2012	3:33:16 PM	Bubbler valve closed
3/11/2012	3:33:16 PM	Helium valve opened
3/11/2012	3:33:16 PM	Main Vac valve opened
3/11/2012	3:33:16 PM	Helium MFC set to  20.000000
3/11/2012	3:33:16 PM	H2 MFC set to  0.000000
3/11/2012	3:33:16 PM	BCl3 MFC set to  0.000000
3/11/2012	3:33:16 PM	PH3 MFC set to  0.000000
3/11/2012	3:33:16 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:33:16 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:33:17 PM	Tube furnace set to 0
3/11/2012	3:33:47 PM	Helium valve closed
3/11/2012	3:33:47 PM	H2 valve closed
3/11/2012	3:33:47 PM	BCl3 valve closed
3/11/2012	3:33:47 PM	PH3 valve closed
3/11/2012	3:33:47 PM	SiCl4 pre valve closed
3/11/2012	3:33:47 PM	SiCl4 post valve closed
3/11/2012	3:33:47 PM	Bypass valve closed
3/11/2012	3:33:47 PM	Bubbler valve closed
3/11/2012	3:33:47 PM	Main Vac valve opened
3/11/2012	3:33:47 PM	Helium MFC set to  0.000000
3/11/2012	3:33:47 PM	H2 MFC set to  0.000000
3/11/2012	3:33:47 PM	BCl3 MFC set to  0.000000
3/11/2012	3:33:47 PM	PH3 MFC set to  0.000000
3/11/2012	3:33:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:33:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:33:47 PM	Tube furnace set to 0
3/11/2012	3:34:17 PM	H2 valve closed
3/11/2012	3:34:17 PM	BCl3 valve closed
3/11/2012	3:34:17 PM	PH3 valve closed
3/11/2012	3:34:17 PM	SiCl4 pre valve closed
3/11/2012	3:34:17 PM	SiCl4 post valve closed
3/11/2012	3:34:17 PM	Bypass valve closed
3/11/2012	3:34:17 PM	Bubbler valve closed
3/11/2012	3:34:17 PM	Helium valve opened
3/11/2012	3:34:17 PM	Main Vac valve opened
3/11/2012	3:34:17 PM	Helium MFC set to  20.000000
3/11/2012	3:34:17 PM	H2 MFC set to  0.000000
3/11/2012	3:34:17 PM	BCl3 MFC set to  0.000000
3/11/2012	3:34:17 PM	PH3 MFC set to  0.000000
3/11/2012	3:34:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:34:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:34:17 PM	Tube furnace set to 0
3/11/2012	3:34:47 PM	Helium valve closed
3/11/2012	3:34:47 PM	H2 valve closed
3/11/2012	3:34:47 PM	BCl3 valve closed
3/11/2012	3:34:47 PM	PH3 valve closed
3/11/2012	3:34:47 PM	SiCl4 pre valve closed
3/11/2012	3:34:47 PM	SiCl4 post valve closed
3/11/2012	3:34:47 PM	Bypass valve closed
3/11/2012	3:34:47 PM	Bubbler valve closed
3/11/2012	3:34:47 PM	Main Vac valve opened
3/11/2012	3:34:47 PM	Helium MFC set to  0.000000
3/11/2012	3:34:47 PM	H2 MFC set to  0.000000
3/11/2012	3:34:47 PM	BCl3 MFC set to  0.000000
3/11/2012	3:34:47 PM	PH3 MFC set to  0.000000
3/11/2012	3:34:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:34:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:34:47 PM	Tube furnace set to 0
3/11/2012	3:35:17 PM	H2 valve closed
3/11/2012	3:35:17 PM	BCl3 valve closed
3/11/2012	3:35:17 PM	PH3 valve closed
3/11/2012	3:35:17 PM	SiCl4 pre valve closed
3/11/2012	3:35:17 PM	SiCl4 post valve closed
3/11/2012	3:35:17 PM	Bypass valve closed
3/11/2012	3:35:17 PM	Bubbler valve closed
3/11/2012	3:35:17 PM	Helium valve opened
3/11/2012	3:35:17 PM	Main Vac valve opened
3/11/2012	3:35:17 PM	Helium MFC set to  20.000000
3/11/2012	3:35:17 PM	H2 MFC set to  0.000000
3/11/2012	3:35:17 PM	BCl3 MFC set to  0.000000
3/11/2012	3:35:17 PM	PH3 MFC set to  0.000000
3/11/2012	3:35:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:35:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:35:17 PM	Tube furnace set to 0
3/11/2012	3:35:47 PM	Helium valve closed
3/11/2012	3:35:47 PM	H2 valve closed
3/11/2012	3:35:47 PM	BCl3 valve closed
3/11/2012	3:35:47 PM	PH3 valve closed
3/11/2012	3:35:47 PM	SiCl4 pre valve closed
3/11/2012	3:35:47 PM	SiCl4 post valve closed
3/11/2012	3:35:47 PM	Bypass valve closed
3/11/2012	3:35:47 PM	Bubbler valve closed
3/11/2012	3:35:47 PM	Main Vac valve opened
3/11/2012	3:35:47 PM	Helium MFC set to  0.000000
3/11/2012	3:35:47 PM	H2 MFC set to  0.000000
3/11/2012	3:35:47 PM	BCl3 MFC set to  0.000000
3/11/2012	3:35:47 PM	PH3 MFC set to  0.000000
3/11/2012	3:35:47 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:35:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:35:48 PM	Tube furnace set to 200
3/11/2012	3:36:18 PM	H2 valve closed
3/11/2012	3:36:18 PM	BCl3 valve closed
3/11/2012	3:36:18 PM	PH3 valve closed
3/11/2012	3:36:18 PM	SiCl4 pre valve closed
3/11/2012	3:36:18 PM	SiCl4 post valve closed
3/11/2012	3:36:18 PM	Bypass valve closed
3/11/2012	3:36:18 PM	Bubbler valve closed
3/11/2012	3:36:18 PM	Helium valve opened
3/11/2012	3:36:18 PM	Main Vac valve opened
3/11/2012	3:36:18 PM	Helium MFC set to  20.000000
3/11/2012	3:36:18 PM	H2 MFC set to  0.000000
3/11/2012	3:36:18 PM	BCl3 MFC set to  0.000000
3/11/2012	3:36:18 PM	PH3 MFC set to  0.000000
3/11/2012	3:36:18 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:36:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:36:18 PM	Tube furnace set to 200
3/11/2012	3:36:48 PM	Helium valve closed
3/11/2012	3:36:48 PM	H2 valve closed
3/11/2012	3:36:48 PM	BCl3 valve closed
3/11/2012	3:36:48 PM	PH3 valve closed
3/11/2012	3:36:48 PM	SiCl4 pre valve closed
3/11/2012	3:36:48 PM	SiCl4 post valve closed
3/11/2012	3:36:48 PM	Bypass valve closed
3/11/2012	3:36:48 PM	Bubbler valve closed
3/11/2012	3:36:48 PM	Main Vac valve opened
3/11/2012	3:36:48 PM	Helium MFC set to  0.000000
3/11/2012	3:36:48 PM	H2 MFC set to  0.000000
3/11/2012	3:36:48 PM	BCl3 MFC set to  0.000000
3/11/2012	3:36:48 PM	PH3 MFC set to  0.000000
3/11/2012	3:36:48 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:36:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:36:48 PM	Tube furnace set to 200
3/11/2012	3:37:18 PM	H2 valve closed
3/11/2012	3:37:18 PM	BCl3 valve closed
3/11/2012	3:37:18 PM	PH3 valve closed
3/11/2012	3:37:18 PM	SiCl4 pre valve closed
3/11/2012	3:37:18 PM	SiCl4 post valve closed
3/11/2012	3:37:18 PM	Bypass valve closed
3/11/2012	3:37:18 PM	Bubbler valve closed
3/11/2012	3:37:18 PM	Helium valve opened
3/11/2012	3:37:18 PM	Main Vac valve opened
3/11/2012	3:37:18 PM	Helium MFC set to  20.000000
3/11/2012	3:37:18 PM	H2 MFC set to  0.000000
3/11/2012	3:37:18 PM	BCl3 MFC set to  0.000000
3/11/2012	3:37:18 PM	PH3 MFC set to  0.000000
3/11/2012	3:37:18 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:37:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:37:18 PM	Tube furnace set to 200
3/11/2012	3:37:48 PM	Helium valve closed
3/11/2012	3:37:48 PM	H2 valve closed
3/11/2012	3:37:48 PM	BCl3 valve closed
3/11/2012	3:37:48 PM	PH3 valve closed
3/11/2012	3:37:48 PM	SiCl4 pre valve closed
3/11/2012	3:37:48 PM	SiCl4 post valve closed
3/11/2012	3:37:48 PM	Bypass valve closed
3/11/2012	3:37:48 PM	Bubbler valve closed
3/11/2012	3:37:48 PM	Main Vac valve opened
3/11/2012	3:37:48 PM	Helium MFC set to  0.000000
3/11/2012	3:37:48 PM	H2 MFC set to  0.000000
3/11/2012	3:37:48 PM	BCl3 MFC set to  0.000000
3/11/2012	3:37:48 PM	PH3 MFC set to  0.000000
3/11/2012	3:37:48 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:37:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:37:48 PM	Tube furnace set to 200
3/11/2012	3:38:18 PM	H2 valve closed
3/11/2012	3:38:18 PM	BCl3 valve closed
3/11/2012	3:38:18 PM	PH3 valve closed
3/11/2012	3:38:18 PM	SiCl4 pre valve closed
3/11/2012	3:38:18 PM	SiCl4 post valve closed
3/11/2012	3:38:18 PM	Bypass valve closed
3/11/2012	3:38:18 PM	Bubbler valve closed
3/11/2012	3:38:18 PM	Helium valve opened
3/11/2012	3:38:18 PM	Main Vac valve opened
3/11/2012	3:38:18 PM	Helium MFC set to  20.000000
3/11/2012	3:38:18 PM	H2 MFC set to  0.000000
3/11/2012	3:38:18 PM	BCl3 MFC set to  0.000000
3/11/2012	3:38:18 PM	PH3 MFC set to  0.000000
3/11/2012	3:38:18 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:38:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:38:19 PM	Tube furnace set to 200
3/11/2012	3:38:49 PM	Helium valve closed
3/11/2012	3:38:49 PM	H2 valve closed
3/11/2012	3:38:49 PM	BCl3 valve closed
3/11/2012	3:38:49 PM	PH3 valve closed
3/11/2012	3:38:49 PM	SiCl4 pre valve closed
3/11/2012	3:38:49 PM	SiCl4 post valve closed
3/11/2012	3:38:49 PM	Bypass valve closed
3/11/2012	3:38:49 PM	Bubbler valve closed
3/11/2012	3:38:49 PM	Main Vac valve opened
3/11/2012	3:38:49 PM	Helium MFC set to  0.000000
3/11/2012	3:38:49 PM	H2 MFC set to  0.000000
3/11/2012	3:38:49 PM	BCl3 MFC set to  0.000000
3/11/2012	3:38:49 PM	PH3 MFC set to  0.000000
3/11/2012	3:38:49 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:38:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:38:49 PM	Tube furnace set to 200
3/11/2012	3:39:19 PM	H2 valve closed
3/11/2012	3:39:19 PM	BCl3 valve closed
3/11/2012	3:39:19 PM	PH3 valve closed
3/11/2012	3:39:19 PM	SiCl4 pre valve closed
3/11/2012	3:39:19 PM	SiCl4 post valve closed
3/11/2012	3:39:19 PM	Bypass valve closed
3/11/2012	3:39:19 PM	Bubbler valve closed
3/11/2012	3:39:19 PM	Helium valve opened
3/11/2012	3:39:19 PM	Main Vac valve opened
3/11/2012	3:39:19 PM	Helium MFC set to  20.000000
3/11/2012	3:39:19 PM	H2 MFC set to  0.000000
3/11/2012	3:39:19 PM	BCl3 MFC set to  0.000000
3/11/2012	3:39:19 PM	PH3 MFC set to  0.000000
3/11/2012	3:39:19 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:39:19 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:39:19 PM	Tube furnace set to 200
3/11/2012	3:39:49 PM	Helium valve closed
3/11/2012	3:39:49 PM	H2 valve closed
3/11/2012	3:39:49 PM	BCl3 valve closed
3/11/2012	3:39:49 PM	PH3 valve closed
3/11/2012	3:39:49 PM	SiCl4 pre valve closed
3/11/2012	3:39:49 PM	SiCl4 post valve closed
3/11/2012	3:39:49 PM	Bypass valve closed
3/11/2012	3:39:49 PM	Bubbler valve closed
3/11/2012	3:39:49 PM	Main Vac valve opened
3/11/2012	3:39:49 PM	Helium MFC set to  0.000000
3/11/2012	3:39:49 PM	H2 MFC set to  0.000000
3/11/2012	3:39:49 PM	BCl3 MFC set to  0.000000
3/11/2012	3:39:49 PM	PH3 MFC set to  0.000000
3/11/2012	3:39:49 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:39:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:39:49 PM	Tube furnace set to 200
3/11/2012	3:40:19 PM	H2 valve closed
3/11/2012	3:40:19 PM	BCl3 valve closed
3/11/2012	3:40:19 PM	PH3 valve closed
3/11/2012	3:40:19 PM	SiCl4 pre valve closed
3/11/2012	3:40:19 PM	SiCl4 post valve closed
3/11/2012	3:40:19 PM	Bypass valve closed
3/11/2012	3:40:19 PM	Bubbler valve closed
3/11/2012	3:40:19 PM	Helium valve opened
3/11/2012	3:40:19 PM	Main Vac valve opened
3/11/2012	3:40:19 PM	Helium MFC set to  20.000000
3/11/2012	3:40:19 PM	H2 MFC set to  0.000000
3/11/2012	3:40:19 PM	BCl3 MFC set to  0.000000
3/11/2012	3:40:19 PM	PH3 MFC set to  0.000000
3/11/2012	3:40:19 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:40:19 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:40:20 PM	Tube furnace set to 200
3/11/2012	3:40:50 PM	Helium valve closed
3/11/2012	3:40:50 PM	H2 valve closed
3/11/2012	3:40:50 PM	BCl3 valve closed
3/11/2012	3:40:50 PM	PH3 valve closed
3/11/2012	3:40:50 PM	SiCl4 pre valve closed
3/11/2012	3:40:50 PM	SiCl4 post valve closed
3/11/2012	3:40:50 PM	Bypass valve closed
3/11/2012	3:40:50 PM	Bubbler valve closed
3/11/2012	3:40:50 PM	Main Vac valve opened
3/11/2012	3:40:50 PM	Helium MFC set to  0.000000
3/11/2012	3:40:50 PM	H2 MFC set to  0.000000
3/11/2012	3:40:50 PM	BCl3 MFC set to  0.000000
3/11/2012	3:40:50 PM	PH3 MFC set to  0.000000
3/11/2012	3:40:50 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:40:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:40:50 PM	Tube furnace set to 200
3/11/2012	3:41:20 PM	H2 valve closed
3/11/2012	3:41:20 PM	BCl3 valve closed
3/11/2012	3:41:20 PM	PH3 valve closed
3/11/2012	3:41:20 PM	SiCl4 pre valve closed
3/11/2012	3:41:20 PM	SiCl4 post valve closed
3/11/2012	3:41:20 PM	Bypass valve closed
3/11/2012	3:41:20 PM	Bubbler valve closed
3/11/2012	3:41:20 PM	Helium valve opened
3/11/2012	3:41:20 PM	Main Vac valve opened
3/11/2012	3:41:20 PM	Helium MFC set to  20.000000
3/11/2012	3:41:20 PM	H2 MFC set to  0.000000
3/11/2012	3:41:20 PM	BCl3 MFC set to  0.000000
3/11/2012	3:41:20 PM	PH3 MFC set to  0.000000
3/11/2012	3:41:20 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:41:20 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:41:20 PM	Tube furnace set to 200
3/11/2012	3:41:50 PM	Helium valve closed
3/11/2012	3:41:50 PM	H2 valve closed
3/11/2012	3:41:50 PM	BCl3 valve closed
3/11/2012	3:41:50 PM	PH3 valve closed
3/11/2012	3:41:50 PM	SiCl4 pre valve closed
3/11/2012	3:41:50 PM	SiCl4 post valve closed
3/11/2012	3:41:50 PM	Bypass valve closed
3/11/2012	3:41:50 PM	Bubbler valve closed
3/11/2012	3:41:50 PM	Main Vac valve opened
3/11/2012	3:41:50 PM	Helium MFC set to  0.000000
3/11/2012	3:41:50 PM	H2 MFC set to  0.000000
3/11/2012	3:41:50 PM	BCl3 MFC set to  0.000000
3/11/2012	3:41:50 PM	PH3 MFC set to  0.000000
3/11/2012	3:41:50 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:41:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:41:50 PM	Tube furnace set to 0
3/11/2012	3:41:51 PM	Run finished at 3:41 PM
3/11/2012	3:52:25 PM	Recipe started at 3:52 PM
3/11/2012	3:52:25 PM	Helium valve closed
3/11/2012	3:52:25 PM	H2 valve closed
3/11/2012	3:52:25 PM	BCl3 valve closed
3/11/2012	3:52:25 PM	PH3 valve closed
3/11/2012	3:52:25 PM	SiCl4 pre valve closed
3/11/2012	3:52:25 PM	SiCl4 post valve closed
3/11/2012	3:52:25 PM	Main Vac valve closed
3/11/2012	3:52:25 PM	Bypass valve closed
3/11/2012	3:52:25 PM	Bubbler valve closed
3/11/2012	3:52:25 PM	Helium MFC set to  0.000000
3/11/2012	3:52:25 PM	H2 MFC set to  0.000000
3/11/2012	3:52:25 PM	BCl3 MFC set to  0.000000
3/11/2012	3:52:25 PM	PH3 MFC set to  0.000000
3/11/2012	3:52:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:52:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:52:26 PM	Tube furnace set to 0
3/11/2012	3:52:29 PM	Helium valve closed
3/11/2012	3:52:29 PM	BCl3 valve closed
3/11/2012	3:52:29 PM	PH3 valve closed
3/11/2012	3:52:29 PM	SiCl4 pre valve closed
3/11/2012	3:52:29 PM	SiCl4 post valve closed
3/11/2012	3:52:29 PM	Main Vac valve closed
3/11/2012	3:52:29 PM	Bypass valve closed
3/11/2012	3:52:29 PM	Bubbler valve closed
3/11/2012	3:52:29 PM	H2 valve opened
3/11/2012	3:52:29 PM	Helium MFC set to  0.000000
3/11/2012	3:52:29 PM	H2 MFC set to  500.000000
3/11/2012	3:52:29 PM	BCl3 MFC set to  0.000000
3/11/2012	3:52:29 PM	PH3 MFC set to  0.000000
3/11/2012	3:52:29 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:52:29 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:52:29 PM	Tube furnace set to 0
3/11/2012	3:53:33 PM	Helium valve closed
3/11/2012	3:53:33 PM	BCl3 valve closed
3/11/2012	3:53:33 PM	PH3 valve closed
3/11/2012	3:53:33 PM	SiCl4 pre valve closed
3/11/2012	3:53:33 PM	SiCl4 post valve closed
3/11/2012	3:53:33 PM	Main Vac valve closed
3/11/2012	3:53:33 PM	Bypass valve closed
3/11/2012	3:53:33 PM	H2 valve opened
3/11/2012	3:53:33 PM	Bubbler valve opened
3/11/2012	3:53:33 PM	Helium MFC set to  0.000000
3/11/2012	3:53:33 PM	H2 MFC set to  500.000000
3/11/2012	3:53:33 PM	BCl3 MFC set to  0.000000
3/11/2012	3:53:33 PM	PH3 MFC set to  0.000000
3/11/2012	3:53:33 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:53:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:53:33 PM	Tube furnace set to 0
3/11/2012	3:53:34 PM	Helium valve closed
3/11/2012	3:53:34 PM	BCl3 valve closed
3/11/2012	3:53:34 PM	PH3 valve closed
3/11/2012	3:53:34 PM	SiCl4 pre valve closed
3/11/2012	3:53:34 PM	SiCl4 post valve closed
3/11/2012	3:53:34 PM	Main Vac valve closed
3/11/2012	3:53:34 PM	Bypass valve closed
3/11/2012	3:53:34 PM	H2 valve opened
3/11/2012	3:53:34 PM	Bubbler valve opened
3/11/2012	3:53:34 PM	Helium MFC set to  0.000000
3/11/2012	3:53:34 PM	H2 MFC set to  500.000000
3/11/2012	3:53:34 PM	BCl3 MFC set to  0.000000
3/11/2012	3:53:34 PM	PH3 MFC set to  0.000000
3/11/2012	3:53:34 PM	SiCl4 MFC set to  0.000000
3/11/2012	3:53:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	3:53:34 PM	Tube furnace set to 1000
3/11/2012	4:13:34 PM	Helium valve closed
3/11/2012	4:13:34 PM	PH3 valve closed
3/11/2012	4:13:34 PM	Main Vac valve closed
3/11/2012	4:13:34 PM	Bypass valve closed
3/11/2012	4:13:34 PM	H2 valve opened
3/11/2012	4:13:34 PM	BCl3 valve opened
3/11/2012	4:13:34 PM	SiCl4 pre valve opened
3/11/2012	4:13:34 PM	SiCl4 post valve opened
3/11/2012	4:13:34 PM	Bubbler valve opened
3/11/2012	4:13:34 PM	Helium MFC set to  0.000000
3/11/2012	4:13:34 PM	H2 MFC set to  450.000000
3/11/2012	4:13:34 PM	BCl3 MFC set to  1.500000
3/11/2012	4:13:34 PM	PH3 MFC set to  0.000000
3/11/2012	4:13:34 PM	SiCl4 MFC set to  50.000000
3/11/2012	4:13:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:13:35 PM	Tube furnace set to 1000
3/11/2012	4:24:35 PM	Helium valve closed
3/11/2012	4:24:35 PM	BCl3 valve closed
3/11/2012	4:24:35 PM	Main Vac valve closed
3/11/2012	4:24:35 PM	Bypass valve closed
3/11/2012	4:24:35 PM	H2 valve opened
3/11/2012	4:24:35 PM	PH3 valve opened
3/11/2012	4:24:35 PM	SiCl4 pre valve opened
3/11/2012	4:24:35 PM	SiCl4 post valve opened
3/11/2012	4:24:35 PM	Bubbler valve opened
3/11/2012	4:24:35 PM	Helium MFC set to  0.000000
3/11/2012	4:24:35 PM	H2 MFC set to  450.000000
3/11/2012	4:24:35 PM	BCl3 MFC set to  0.000000
3/11/2012	4:24:35 PM	PH3 MFC set to  15.000000
3/11/2012	4:24:35 PM	SiCl4 MFC set to  50.000000
3/11/2012	4:24:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:24:35 PM	Tube furnace set to 1000
3/11/2012	4:28:35 PM	Helium valve closed
3/11/2012	4:28:35 PM	BCl3 valve closed
3/11/2012	4:28:35 PM	PH3 valve closed
3/11/2012	4:28:35 PM	SiCl4 pre valve closed
3/11/2012	4:28:35 PM	SiCl4 post valve closed
3/11/2012	4:28:35 PM	Main Vac valve closed
3/11/2012	4:28:35 PM	Bypass valve closed
3/11/2012	4:28:35 PM	H2 valve opened
3/11/2012	4:28:35 PM	Bubbler valve opened
3/11/2012	4:28:35 PM	Helium MFC set to  0.000000
3/11/2012	4:28:35 PM	H2 MFC set to  500.000000
3/11/2012	4:28:35 PM	BCl3 MFC set to  0.000000
3/11/2012	4:28:35 PM	PH3 MFC set to  0.000000
3/11/2012	4:28:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:28:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:28:35 PM	Tube furnace set to 950
3/11/2012	4:30:35 PM	Helium valve closed
3/11/2012	4:30:35 PM	BCl3 valve closed
3/11/2012	4:30:35 PM	PH3 valve closed
3/11/2012	4:30:35 PM	SiCl4 pre valve closed
3/11/2012	4:30:35 PM	SiCl4 post valve closed
3/11/2012	4:30:35 PM	Main Vac valve closed
3/11/2012	4:30:35 PM	Bypass valve closed
3/11/2012	4:30:35 PM	H2 valve opened
3/11/2012	4:30:35 PM	Bubbler valve opened
3/11/2012	4:30:35 PM	Helium MFC set to  0.000000
3/11/2012	4:30:35 PM	H2 MFC set to  500.000000
3/11/2012	4:30:35 PM	BCl3 MFC set to  0.000000
3/11/2012	4:30:35 PM	PH3 MFC set to  0.000000
3/11/2012	4:30:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:30:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:30:35 PM	Tube furnace set to 900
3/11/2012	4:32:35 PM	Helium valve closed
3/11/2012	4:32:35 PM	BCl3 valve closed
3/11/2012	4:32:35 PM	PH3 valve closed
3/11/2012	4:32:35 PM	SiCl4 pre valve closed
3/11/2012	4:32:35 PM	SiCl4 post valve closed
3/11/2012	4:32:35 PM	Main Vac valve closed
3/11/2012	4:32:35 PM	Bypass valve closed
3/11/2012	4:32:35 PM	H2 valve opened
3/11/2012	4:32:35 PM	Bubbler valve opened
3/11/2012	4:32:35 PM	Helium MFC set to  0.000000
3/11/2012	4:32:35 PM	H2 MFC set to  500.000000
3/11/2012	4:32:35 PM	BCl3 MFC set to  0.000000
3/11/2012	4:32:35 PM	PH3 MFC set to  0.000000
3/11/2012	4:32:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:32:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:32:35 PM	Tube furnace set to 850
3/11/2012	4:34:35 PM	H2 valve closed
3/11/2012	4:34:35 PM	BCl3 valve closed
3/11/2012	4:34:35 PM	PH3 valve closed
3/11/2012	4:34:35 PM	SiCl4 pre valve closed
3/11/2012	4:34:35 PM	SiCl4 post valve closed
3/11/2012	4:34:35 PM	Main Vac valve closed
3/11/2012	4:34:35 PM	Bypass valve closed
3/11/2012	4:34:35 PM	Helium valve opened
3/11/2012	4:34:35 PM	Bubbler valve opened
3/11/2012	4:34:35 PM	Helium MFC set to  500.000000
3/11/2012	4:34:35 PM	H2 MFC set to  0.000000
3/11/2012	4:34:35 PM	BCl3 MFC set to  0.000000
3/11/2012	4:34:35 PM	PH3 MFC set to  0.000000
3/11/2012	4:34:35 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:34:35 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:34:36 PM	Tube furnace set to 800
3/11/2012	4:36:36 PM	H2 valve closed
3/11/2012	4:36:36 PM	BCl3 valve closed
3/11/2012	4:36:36 PM	PH3 valve closed
3/11/2012	4:36:36 PM	SiCl4 pre valve closed
3/11/2012	4:36:36 PM	SiCl4 post valve closed
3/11/2012	4:36:36 PM	Main Vac valve closed
3/11/2012	4:36:36 PM	Bypass valve closed
3/11/2012	4:36:36 PM	Helium valve opened
3/11/2012	4:36:36 PM	Bubbler valve opened
3/11/2012	4:36:36 PM	Helium MFC set to  500.000000
3/11/2012	4:36:36 PM	H2 MFC set to  0.000000
3/11/2012	4:36:36 PM	BCl3 MFC set to  0.000000
3/11/2012	4:36:36 PM	PH3 MFC set to  0.000000
3/11/2012	4:36:36 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:36:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:36:36 PM	Tube furnace set to 750
3/11/2012	4:38:36 PM	H2 valve closed
3/11/2012	4:38:36 PM	BCl3 valve closed
3/11/2012	4:38:36 PM	PH3 valve closed
3/11/2012	4:38:36 PM	SiCl4 pre valve closed
3/11/2012	4:38:36 PM	SiCl4 post valve closed
3/11/2012	4:38:36 PM	Main Vac valve closed
3/11/2012	4:38:36 PM	Bypass valve closed
3/11/2012	4:38:36 PM	Helium valve opened
3/11/2012	4:38:36 PM	Bubbler valve opened
3/11/2012	4:38:36 PM	Helium MFC set to  500.000000
3/11/2012	4:38:36 PM	H2 MFC set to  0.000000
3/11/2012	4:38:36 PM	BCl3 MFC set to  0.000000
3/11/2012	4:38:36 PM	PH3 MFC set to  0.000000
3/11/2012	4:38:36 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:38:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:38:36 PM	Tube furnace set to 0
3/11/2012	4:58:36 PM	Helium valve closed
3/11/2012	4:58:36 PM	H2 valve closed
3/11/2012	4:58:36 PM	BCl3 valve closed
3/11/2012	4:58:36 PM	PH3 valve closed
3/11/2012	4:58:36 PM	SiCl4 pre valve closed
3/11/2012	4:58:36 PM	SiCl4 post valve closed
3/11/2012	4:58:36 PM	Main Vac valve closed
3/11/2012	4:58:36 PM	Bypass valve closed
3/11/2012	4:58:36 PM	Bubbler valve closed
3/11/2012	4:58:36 PM	Helium MFC set to  0.000000
3/11/2012	4:58:36 PM	H2 MFC set to  0.000000
3/11/2012	4:58:36 PM	BCl3 MFC set to  0.000000
3/11/2012	4:58:36 PM	PH3 MFC set to  0.000000
3/11/2012	4:58:36 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:58:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:58:36 PM	Tube furnace set to 0
3/11/2012	4:58:37 PM	Helium valve closed
3/11/2012	4:58:37 PM	H2 valve closed
3/11/2012	4:58:37 PM	BCl3 valve closed
3/11/2012	4:58:37 PM	PH3 valve closed
3/11/2012	4:58:37 PM	SiCl4 pre valve closed
3/11/2012	4:58:37 PM	SiCl4 post valve closed
3/11/2012	4:58:37 PM	Main Vac valve closed
3/11/2012	4:58:37 PM	Bubbler valve closed
3/11/2012	4:58:37 PM	Bypass valve opened
3/11/2012	4:58:37 PM	Helium MFC set to  0.000000
3/11/2012	4:58:37 PM	H2 MFC set to  0.000000
3/11/2012	4:58:37 PM	BCl3 MFC set to  0.000000
3/11/2012	4:58:37 PM	PH3 MFC set to  0.000000
3/11/2012	4:58:37 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:58:37 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:58:37 PM	Tube furnace set to 0
3/11/2012	4:59:23 PM	Helium valve closed
3/11/2012	4:59:23 PM	H2 valve closed
3/11/2012	4:59:23 PM	BCl3 valve closed
3/11/2012	4:59:23 PM	PH3 valve closed
3/11/2012	4:59:23 PM	SiCl4 pre valve closed
3/11/2012	4:59:23 PM	SiCl4 post valve closed
3/11/2012	4:59:23 PM	Main Vac valve closed
3/11/2012	4:59:23 PM	Bubbler valve closed
3/11/2012	4:59:23 PM	Bypass valve opened
3/11/2012	4:59:23 PM	Helium MFC set to  0.000000
3/11/2012	4:59:23 PM	H2 MFC set to  0.000000
3/11/2012	4:59:23 PM	BCl3 MFC set to  0.000000
3/11/2012	4:59:23 PM	PH3 MFC set to  0.000000
3/11/2012	4:59:23 PM	SiCl4 MFC set to  0.000000
3/11/2012	4:59:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	4:59:23 PM	Tube furnace set to 0
3/11/2012	5:00:23 PM	Helium valve closed
3/11/2012	5:00:23 PM	H2 valve closed
3/11/2012	5:00:23 PM	BCl3 valve closed
3/11/2012	5:00:23 PM	PH3 valve closed
3/11/2012	5:00:23 PM	SiCl4 pre valve closed
3/11/2012	5:00:23 PM	SiCl4 post valve closed
3/11/2012	5:00:23 PM	Bypass valve closed
3/11/2012	5:00:23 PM	Bubbler valve closed
3/11/2012	5:00:23 PM	Main Vac valve opened
3/11/2012	5:00:23 PM	Helium MFC set to  0.000000
3/11/2012	5:00:23 PM	H2 MFC set to  0.000000
3/11/2012	5:00:23 PM	BCl3 MFC set to  0.000000
3/11/2012	5:00:23 PM	PH3 MFC set to  0.000000
3/11/2012	5:00:23 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:00:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:00:23 PM	Tube furnace set to 0
3/11/2012	5:00:24 PM	Run finished at 5:00 PM
3/11/2012	5:41:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	5:41:09 PM	Recipe started at 5:41 PM
3/11/2012	5:41:09 PM	Helium valve closed
3/11/2012	5:41:09 PM	H2 valve closed
3/11/2012	5:41:09 PM	BCl3 valve closed
3/11/2012	5:41:09 PM	PH3 valve closed
3/11/2012	5:41:09 PM	SiCl4 pre valve closed
3/11/2012	5:41:09 PM	SiCl4 post valve closed
3/11/2012	5:41:09 PM	Main Vac valve closed
3/11/2012	5:41:09 PM	Bypass valve closed
3/11/2012	5:41:09 PM	Bubbler valve closed
3/11/2012	5:41:09 PM	Helium MFC set to  0.000000
3/11/2012	5:41:09 PM	H2 MFC set to  0.000000
3/11/2012	5:41:09 PM	BCl3 MFC set to  0.000000
3/11/2012	5:41:09 PM	PH3 MFC set to  0.000000
3/11/2012	5:41:09 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:41:09 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:41:09 PM	Tube furnace set to 0
3/11/2012	5:41:12 PM	H2 valve closed
3/11/2012	5:41:13 PM	BCl3 valve closed
3/11/2012	5:41:13 PM	PH3 valve closed
3/11/2012	5:41:13 PM	SiCl4 pre valve closed
3/11/2012	5:41:13 PM	SiCl4 post valve closed
3/11/2012	5:41:13 PM	Main Vac valve closed
3/11/2012	5:41:13 PM	Bypass valve closed
3/11/2012	5:41:13 PM	Bubbler valve closed
3/11/2012	5:41:13 PM	Helium valve opened
3/11/2012	5:41:13 PM	Helium MFC set to  500.000000
3/11/2012	5:41:13 PM	H2 MFC set to  0.000000
3/11/2012	5:41:13 PM	BCl3 MFC set to  0.000000
3/11/2012	5:41:13 PM	PH3 MFC set to  0.000000
3/11/2012	5:41:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:41:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:41:13 PM	Tube furnace set to 0
3/11/2012	5:42:13 PM	Helium valve closed
3/11/2012	5:42:13 PM	H2 valve closed
3/11/2012	5:42:13 PM	BCl3 valve closed
3/11/2012	5:42:13 PM	PH3 valve closed
3/11/2012	5:42:14 PM	SiCl4 pre valve closed
3/11/2012	5:42:14 PM	SiCl4 post valve closed
3/11/2012	5:42:14 PM	Main Vac valve closed
3/11/2012	5:42:14 PM	Bypass valve closed
3/11/2012	5:42:14 PM	Bubbler valve closed
3/11/2012	5:42:14 PM	Helium MFC set to  0.000000
3/11/2012	5:42:14 PM	H2 MFC set to  0.000000
3/11/2012	5:42:14 PM	BCl3 MFC set to  0.000000
3/11/2012	5:42:14 PM	PH3 MFC set to  0.000000
3/11/2012	5:42:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:42:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:42:14 PM	Tube furnace set to 0
3/11/2012	5:42:15 PM	Run finished at 5:42 PM
3/11/2012	5:42:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	5:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	5:45:38 PM	Recipe started at 5:45 PM
3/11/2012	5:45:38 PM	Helium valve closed
3/11/2012	5:45:38 PM	H2 valve closed
3/11/2012	5:45:38 PM	BCl3 valve closed
3/11/2012	5:45:38 PM	PH3 valve closed
3/11/2012	5:45:38 PM	SiCl4 pre valve closed
3/11/2012	5:45:38 PM	SiCl4 post valve closed
3/11/2012	5:45:38 PM	Main Vac valve closed
3/11/2012	5:45:38 PM	Bubbler valve closed
3/11/2012	5:45:38 PM	Bypass valve opened
3/11/2012	5:45:38 PM	Helium MFC set to  0.000000
3/11/2012	5:45:38 PM	H2 MFC set to  0.000000
3/11/2012	5:45:38 PM	BCl3 MFC set to  0.000000
3/11/2012	5:45:38 PM	PH3 MFC set to  0.000000
3/11/2012	5:45:38 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:45:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:45:38 PM	Tube furnace set to 0
3/11/2012	5:46:37 PM	Helium valve closed
3/11/2012	5:46:37 PM	H2 valve closed
3/11/2012	5:46:37 PM	BCl3 valve closed
3/11/2012	5:46:37 PM	PH3 valve closed
3/11/2012	5:46:37 PM	SiCl4 pre valve closed
3/11/2012	5:46:37 PM	SiCl4 post valve closed
3/11/2012	5:46:37 PM	Main Vac valve closed
3/11/2012	5:46:37 PM	Bubbler valve closed
3/11/2012	5:46:37 PM	Bypass valve opened
3/11/2012	5:46:37 PM	Helium MFC set to  0.000000
3/11/2012	5:46:37 PM	H2 MFC set to  0.000000
3/11/2012	5:46:37 PM	BCl3 MFC set to  0.000000
3/11/2012	5:46:37 PM	PH3 MFC set to  0.000000
3/11/2012	5:46:37 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:46:37 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:46:37 PM	Tube furnace set to 0
3/11/2012	5:47:37 PM	Helium valve closed
3/11/2012	5:47:37 PM	H2 valve closed
3/11/2012	5:47:37 PM	BCl3 valve closed
3/11/2012	5:47:37 PM	PH3 valve closed
3/11/2012	5:47:37 PM	SiCl4 pre valve closed
3/11/2012	5:47:37 PM	SiCl4 post valve closed
3/11/2012	5:47:37 PM	Bypass valve closed
3/11/2012	5:47:37 PM	Bubbler valve closed
3/11/2012	5:47:37 PM	Main Vac valve opened
3/11/2012	5:47:37 PM	Helium MFC set to  0.000000
3/11/2012	5:47:37 PM	H2 MFC set to  0.000000
3/11/2012	5:47:37 PM	BCl3 MFC set to  0.000000
3/11/2012	5:47:37 PM	PH3 MFC set to  0.000000
3/11/2012	5:47:37 PM	SiCl4 MFC set to  0.000000
3/11/2012	5:47:37 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	5:47:37 PM	Tube furnace set to 0
3/11/2012	5:47:38 PM	Run finished at 5:47 PM
3/11/2012	5:47:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	6:08:54 PM	Recipe started at 6:08 PM
3/11/2012	6:08:54 PM	Helium valve closed
3/11/2012	6:08:54 PM	H2 valve closed
3/11/2012	6:08:54 PM	BCl3 valve closed
3/11/2012	6:08:54 PM	PH3 valve closed
3/11/2012	6:08:54 PM	SiCl4 pre valve closed
3/11/2012	6:08:54 PM	SiCl4 post valve closed
3/11/2012	6:08:54 PM	Bypass valve closed
3/11/2012	6:08:54 PM	Bubbler valve closed
3/11/2012	6:08:54 PM	Main Vac valve opened
3/11/2012	6:08:54 PM	Helium MFC set to  0.000000
3/11/2012	6:08:54 PM	H2 MFC set to  0.000000
3/11/2012	6:08:54 PM	BCl3 MFC set to  0.000000
3/11/2012	6:08:54 PM	PH3 MFC set to  0.000000
3/11/2012	6:08:54 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:08:54 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:08:54 PM	Tube furnace set to 0
3/11/2012	6:09:24 PM	H2 valve closed
3/11/2012	6:09:24 PM	BCl3 valve closed
3/11/2012	6:09:24 PM	PH3 valve closed
3/11/2012	6:09:24 PM	SiCl4 pre valve closed
3/11/2012	6:09:24 PM	SiCl4 post valve closed
3/11/2012	6:09:24 PM	Bypass valve closed
3/11/2012	6:09:24 PM	Bubbler valve closed
3/11/2012	6:09:24 PM	Helium valve opened
3/11/2012	6:09:24 PM	Main Vac valve opened
3/11/2012	6:09:24 PM	Helium MFC set to  20.000000
3/11/2012	6:09:24 PM	H2 MFC set to  0.000000
3/11/2012	6:09:24 PM	BCl3 MFC set to  0.000000
3/11/2012	6:09:24 PM	PH3 MFC set to  0.000000
3/11/2012	6:09:24 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:09:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:09:24 PM	Tube furnace set to 0
3/11/2012	6:09:54 PM	Helium valve closed
3/11/2012	6:09:54 PM	H2 valve closed
3/11/2012	6:09:54 PM	BCl3 valve closed
3/11/2012	6:09:54 PM	PH3 valve closed
3/11/2012	6:09:54 PM	SiCl4 pre valve closed
3/11/2012	6:09:54 PM	SiCl4 post valve closed
3/11/2012	6:09:54 PM	Bypass valve closed
3/11/2012	6:09:54 PM	Bubbler valve closed
3/11/2012	6:09:54 PM	Main Vac valve opened
3/11/2012	6:09:54 PM	Helium MFC set to  0.000000
3/11/2012	6:09:54 PM	H2 MFC set to  0.000000
3/11/2012	6:09:54 PM	BCl3 MFC set to  0.000000
3/11/2012	6:09:54 PM	PH3 MFC set to  0.000000
3/11/2012	6:09:54 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:09:54 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:09:54 PM	Tube furnace set to 0
3/11/2012	6:10:24 PM	H2 valve closed
3/11/2012	6:10:24 PM	BCl3 valve closed
3/11/2012	6:10:24 PM	PH3 valve closed
3/11/2012	6:10:24 PM	SiCl4 pre valve closed
3/11/2012	6:10:24 PM	SiCl4 post valve closed
3/11/2012	6:10:24 PM	Bypass valve closed
3/11/2012	6:10:24 PM	Bubbler valve closed
3/11/2012	6:10:24 PM	Helium valve opened
3/11/2012	6:10:24 PM	Main Vac valve opened
3/11/2012	6:10:24 PM	Helium MFC set to  20.000000
3/11/2012	6:10:24 PM	H2 MFC set to  0.000000
3/11/2012	6:10:24 PM	BCl3 MFC set to  0.000000
3/11/2012	6:10:24 PM	PH3 MFC set to  0.000000
3/11/2012	6:10:24 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:10:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:10:24 PM	Tube furnace set to 0
3/11/2012	6:10:54 PM	Helium valve closed
3/11/2012	6:10:54 PM	H2 valve closed
3/11/2012	6:10:54 PM	BCl3 valve closed
3/11/2012	6:10:54 PM	PH3 valve closed
3/11/2012	6:10:54 PM	SiCl4 pre valve closed
3/11/2012	6:10:55 PM	SiCl4 post valve closed
3/11/2012	6:10:55 PM	Bypass valve closed
3/11/2012	6:10:55 PM	Bubbler valve closed
3/11/2012	6:10:55 PM	Main Vac valve opened
3/11/2012	6:10:55 PM	Helium MFC set to  0.000000
3/11/2012	6:10:55 PM	H2 MFC set to  0.000000
3/11/2012	6:10:55 PM	BCl3 MFC set to  0.000000
3/11/2012	6:10:55 PM	PH3 MFC set to  0.000000
3/11/2012	6:10:55 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:10:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:10:55 PM	Tube furnace set to 0
3/11/2012	6:11:25 PM	H2 valve closed
3/11/2012	6:11:25 PM	BCl3 valve closed
3/11/2012	6:11:25 PM	PH3 valve closed
3/11/2012	6:11:25 PM	SiCl4 pre valve closed
3/11/2012	6:11:25 PM	SiCl4 post valve closed
3/11/2012	6:11:25 PM	Bypass valve closed
3/11/2012	6:11:25 PM	Bubbler valve closed
3/11/2012	6:11:25 PM	Helium valve opened
3/11/2012	6:11:25 PM	Main Vac valve opened
3/11/2012	6:11:25 PM	Helium MFC set to  20.000000
3/11/2012	6:11:25 PM	H2 MFC set to  0.000000
3/11/2012	6:11:25 PM	BCl3 MFC set to  0.000000
3/11/2012	6:11:25 PM	PH3 MFC set to  0.000000
3/11/2012	6:11:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:11:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:11:25 PM	Tube furnace set to 0
3/11/2012	6:11:55 PM	Helium valve closed
3/11/2012	6:11:55 PM	H2 valve closed
3/11/2012	6:11:55 PM	BCl3 valve closed
3/11/2012	6:11:55 PM	PH3 valve closed
3/11/2012	6:11:55 PM	SiCl4 pre valve closed
3/11/2012	6:11:55 PM	SiCl4 post valve closed
3/11/2012	6:11:55 PM	Bypass valve closed
3/11/2012	6:11:55 PM	Bubbler valve closed
3/11/2012	6:11:55 PM	Main Vac valve opened
3/11/2012	6:11:55 PM	Helium MFC set to  0.000000
3/11/2012	6:11:55 PM	H2 MFC set to  0.000000
3/11/2012	6:11:55 PM	BCl3 MFC set to  0.000000
3/11/2012	6:11:55 PM	PH3 MFC set to  0.000000
3/11/2012	6:11:55 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:11:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:11:55 PM	Tube furnace set to 0
3/11/2012	6:12:25 PM	H2 valve closed
3/11/2012	6:12:25 PM	BCl3 valve closed
3/11/2012	6:12:25 PM	PH3 valve closed
3/11/2012	6:12:25 PM	SiCl4 pre valve closed
3/11/2012	6:12:25 PM	SiCl4 post valve closed
3/11/2012	6:12:25 PM	Bypass valve closed
3/11/2012	6:12:25 PM	Bubbler valve closed
3/11/2012	6:12:25 PM	Helium valve opened
3/11/2012	6:12:25 PM	Main Vac valve opened
3/11/2012	6:12:25 PM	Helium MFC set to  20.000000
3/11/2012	6:12:25 PM	H2 MFC set to  0.000000
3/11/2012	6:12:25 PM	BCl3 MFC set to  0.000000
3/11/2012	6:12:25 PM	PH3 MFC set to  0.000000
3/11/2012	6:12:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:12:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:12:25 PM	Tube furnace set to 0
3/11/2012	6:12:55 PM	Helium valve closed
3/11/2012	6:12:55 PM	H2 valve closed
3/11/2012	6:12:55 PM	BCl3 valve closed
3/11/2012	6:12:55 PM	PH3 valve closed
3/11/2012	6:12:55 PM	SiCl4 pre valve closed
3/11/2012	6:12:55 PM	SiCl4 post valve closed
3/11/2012	6:12:55 PM	Bypass valve closed
3/11/2012	6:12:55 PM	Bubbler valve closed
3/11/2012	6:12:55 PM	Main Vac valve opened
3/11/2012	6:12:55 PM	Helium MFC set to  0.000000
3/11/2012	6:12:55 PM	H2 MFC set to  0.000000
3/11/2012	6:12:55 PM	BCl3 MFC set to  0.000000
3/11/2012	6:12:55 PM	PH3 MFC set to  0.000000
3/11/2012	6:12:55 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:12:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:12:55 PM	Tube furnace set to 0
3/11/2012	6:13:26 PM	H2 valve closed
3/11/2012	6:13:26 PM	BCl3 valve closed
3/11/2012	6:13:26 PM	PH3 valve closed
3/11/2012	6:13:26 PM	SiCl4 pre valve closed
3/11/2012	6:13:26 PM	SiCl4 post valve closed
3/11/2012	6:13:26 PM	Bypass valve closed
3/11/2012	6:13:26 PM	Bubbler valve closed
3/11/2012	6:13:26 PM	Helium valve opened
3/11/2012	6:13:26 PM	Main Vac valve opened
3/11/2012	6:13:26 PM	Helium MFC set to  20.000000
3/11/2012	6:13:26 PM	H2 MFC set to  0.000000
3/11/2012	6:13:26 PM	BCl3 MFC set to  0.000000
3/11/2012	6:13:26 PM	PH3 MFC set to  0.000000
3/11/2012	6:13:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:13:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:13:26 PM	Tube furnace set to 0
3/11/2012	6:13:56 PM	Helium valve closed
3/11/2012	6:13:56 PM	H2 valve closed
3/11/2012	6:13:56 PM	BCl3 valve closed
3/11/2012	6:13:56 PM	PH3 valve closed
3/11/2012	6:13:56 PM	SiCl4 pre valve closed
3/11/2012	6:13:56 PM	SiCl4 post valve closed
3/11/2012	6:13:56 PM	Bypass valve closed
3/11/2012	6:13:56 PM	Bubbler valve closed
3/11/2012	6:13:56 PM	Main Vac valve opened
3/11/2012	6:13:56 PM	Helium MFC set to  0.000000
3/11/2012	6:13:56 PM	H2 MFC set to  0.000000
3/11/2012	6:13:56 PM	BCl3 MFC set to  0.000000
3/11/2012	6:13:56 PM	PH3 MFC set to  0.000000
3/11/2012	6:13:56 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:13:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:13:56 PM	Tube furnace set to 0
3/11/2012	6:14:26 PM	H2 valve closed
3/11/2012	6:14:26 PM	BCl3 valve closed
3/11/2012	6:14:26 PM	PH3 valve closed
3/11/2012	6:14:26 PM	SiCl4 pre valve closed
3/11/2012	6:14:26 PM	SiCl4 post valve closed
3/11/2012	6:14:26 PM	Bypass valve closed
3/11/2012	6:14:26 PM	Bubbler valve closed
3/11/2012	6:14:26 PM	Helium valve opened
3/11/2012	6:14:26 PM	Main Vac valve opened
3/11/2012	6:14:26 PM	Helium MFC set to  20.000000
3/11/2012	6:14:26 PM	H2 MFC set to  0.000000
3/11/2012	6:14:26 PM	BCl3 MFC set to  0.000000
3/11/2012	6:14:26 PM	PH3 MFC set to  0.000000
3/11/2012	6:14:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:14:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:14:26 PM	Tube furnace set to 0
3/11/2012	6:14:56 PM	Helium valve closed
3/11/2012	6:14:56 PM	H2 valve closed
3/11/2012	6:14:56 PM	BCl3 valve closed
3/11/2012	6:14:56 PM	PH3 valve closed
3/11/2012	6:14:56 PM	SiCl4 pre valve closed
3/11/2012	6:14:56 PM	SiCl4 post valve closed
3/11/2012	6:14:56 PM	Bypass valve closed
3/11/2012	6:14:56 PM	Bubbler valve closed
3/11/2012	6:14:56 PM	Main Vac valve opened
3/11/2012	6:14:56 PM	Helium MFC set to  0.000000
3/11/2012	6:14:56 PM	H2 MFC set to  0.000000
3/11/2012	6:14:56 PM	BCl3 MFC set to  0.000000
3/11/2012	6:14:56 PM	PH3 MFC set to  0.000000
3/11/2012	6:14:56 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:14:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:14:56 PM	Tube furnace set to 0
3/11/2012	6:15:26 PM	H2 valve closed
3/11/2012	6:15:26 PM	BCl3 valve closed
3/11/2012	6:15:26 PM	PH3 valve closed
3/11/2012	6:15:26 PM	SiCl4 pre valve closed
3/11/2012	6:15:26 PM	SiCl4 post valve closed
3/11/2012	6:15:26 PM	Bypass valve closed
3/11/2012	6:15:26 PM	Bubbler valve closed
3/11/2012	6:15:26 PM	Helium valve opened
3/11/2012	6:15:26 PM	Main Vac valve opened
3/11/2012	6:15:26 PM	Helium MFC set to  20.000000
3/11/2012	6:15:26 PM	H2 MFC set to  0.000000
3/11/2012	6:15:26 PM	BCl3 MFC set to  0.000000
3/11/2012	6:15:26 PM	PH3 MFC set to  0.000000
3/11/2012	6:15:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:15:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:15:27 PM	Tube furnace set to 0
3/11/2012	6:15:57 PM	Helium valve closed
3/11/2012	6:15:57 PM	H2 valve closed
3/11/2012	6:15:57 PM	BCl3 valve closed
3/11/2012	6:15:57 PM	PH3 valve closed
3/11/2012	6:15:57 PM	SiCl4 pre valve closed
3/11/2012	6:15:57 PM	SiCl4 post valve closed
3/11/2012	6:15:57 PM	Bypass valve closed
3/11/2012	6:15:57 PM	Bubbler valve closed
3/11/2012	6:15:57 PM	Main Vac valve opened
3/11/2012	6:15:57 PM	Helium MFC set to  0.000000
3/11/2012	6:15:57 PM	H2 MFC set to  0.000000
3/11/2012	6:15:57 PM	BCl3 MFC set to  0.000000
3/11/2012	6:15:57 PM	PH3 MFC set to  0.000000
3/11/2012	6:15:57 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:15:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:15:57 PM	Tube furnace set to 0
3/11/2012	6:16:27 PM	H2 valve closed
3/11/2012	6:16:27 PM	BCl3 valve closed
3/11/2012	6:16:27 PM	PH3 valve closed
3/11/2012	6:16:27 PM	SiCl4 pre valve closed
3/11/2012	6:16:27 PM	SiCl4 post valve closed
3/11/2012	6:16:27 PM	Bypass valve closed
3/11/2012	6:16:27 PM	Bubbler valve closed
3/11/2012	6:16:27 PM	Helium valve opened
3/11/2012	6:16:27 PM	Main Vac valve opened
3/11/2012	6:16:27 PM	Helium MFC set to  20.000000
3/11/2012	6:16:27 PM	H2 MFC set to  0.000000
3/11/2012	6:16:27 PM	BCl3 MFC set to  0.000000
3/11/2012	6:16:27 PM	PH3 MFC set to  0.000000
3/11/2012	6:16:27 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:16:27 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:16:27 PM	Tube furnace set to 0
3/11/2012	6:16:57 PM	Helium valve closed
3/11/2012	6:16:57 PM	H2 valve closed
3/11/2012	6:16:57 PM	BCl3 valve closed
3/11/2012	6:16:57 PM	PH3 valve closed
3/11/2012	6:16:57 PM	SiCl4 pre valve closed
3/11/2012	6:16:57 PM	SiCl4 post valve closed
3/11/2012	6:16:57 PM	Bypass valve closed
3/11/2012	6:16:57 PM	Bubbler valve closed
3/11/2012	6:16:57 PM	Main Vac valve opened
3/11/2012	6:16:57 PM	Helium MFC set to  0.000000
3/11/2012	6:16:57 PM	H2 MFC set to  0.000000
3/11/2012	6:16:57 PM	BCl3 MFC set to  0.000000
3/11/2012	6:16:57 PM	PH3 MFC set to  0.000000
3/11/2012	6:16:57 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:16:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:16:57 PM	Tube furnace set to 0
3/11/2012	6:17:27 PM	H2 valve closed
3/11/2012	6:17:27 PM	BCl3 valve closed
3/11/2012	6:17:27 PM	PH3 valve closed
3/11/2012	6:17:27 PM	SiCl4 pre valve closed
3/11/2012	6:17:27 PM	SiCl4 post valve closed
3/11/2012	6:17:27 PM	Bypass valve closed
3/11/2012	6:17:27 PM	Bubbler valve closed
3/11/2012	6:17:27 PM	Helium valve opened
3/11/2012	6:17:27 PM	Main Vac valve opened
3/11/2012	6:17:27 PM	Helium MFC set to  20.000000
3/11/2012	6:17:27 PM	H2 MFC set to  0.000000
3/11/2012	6:17:27 PM	BCl3 MFC set to  0.000000
3/11/2012	6:17:27 PM	PH3 MFC set to  0.000000
3/11/2012	6:17:27 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:17:27 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:17:27 PM	Tube furnace set to 0
3/11/2012	6:17:57 PM	Helium valve closed
3/11/2012	6:17:57 PM	H2 valve closed
3/11/2012	6:17:57 PM	BCl3 valve closed
3/11/2012	6:17:57 PM	PH3 valve closed
3/11/2012	6:17:57 PM	SiCl4 pre valve closed
3/11/2012	6:17:57 PM	SiCl4 post valve closed
3/11/2012	6:17:57 PM	Bypass valve closed
3/11/2012	6:17:57 PM	Bubbler valve closed
3/11/2012	6:17:57 PM	Main Vac valve opened
3/11/2012	6:17:57 PM	Helium MFC set to  0.000000
3/11/2012	6:17:57 PM	H2 MFC set to  0.000000
3/11/2012	6:17:57 PM	BCl3 MFC set to  0.000000
3/11/2012	6:17:57 PM	PH3 MFC set to  0.000000
3/11/2012	6:17:57 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:17:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:17:58 PM	Tube furnace set to 200
3/11/2012	6:18:28 PM	H2 valve closed
3/11/2012	6:18:28 PM	BCl3 valve closed
3/11/2012	6:18:28 PM	PH3 valve closed
3/11/2012	6:18:28 PM	SiCl4 pre valve closed
3/11/2012	6:18:28 PM	SiCl4 post valve closed
3/11/2012	6:18:28 PM	Bypass valve closed
3/11/2012	6:18:28 PM	Bubbler valve closed
3/11/2012	6:18:28 PM	Helium valve opened
3/11/2012	6:18:28 PM	Main Vac valve opened
3/11/2012	6:18:28 PM	Helium MFC set to  20.000000
3/11/2012	6:18:28 PM	H2 MFC set to  0.000000
3/11/2012	6:18:28 PM	BCl3 MFC set to  0.000000
3/11/2012	6:18:28 PM	PH3 MFC set to  0.000000
3/11/2012	6:18:28 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:18:28 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:18:28 PM	Tube furnace set to 200
3/11/2012	6:18:58 PM	Helium valve closed
3/11/2012	6:18:58 PM	H2 valve closed
3/11/2012	6:18:58 PM	BCl3 valve closed
3/11/2012	6:18:58 PM	PH3 valve closed
3/11/2012	6:18:58 PM	SiCl4 pre valve closed
3/11/2012	6:18:58 PM	SiCl4 post valve closed
3/11/2012	6:18:58 PM	Bypass valve closed
3/11/2012	6:18:58 PM	Bubbler valve closed
3/11/2012	6:18:58 PM	Main Vac valve opened
3/11/2012	6:18:58 PM	Helium MFC set to  0.000000
3/11/2012	6:18:58 PM	H2 MFC set to  0.000000
3/11/2012	6:18:58 PM	BCl3 MFC set to  0.000000
3/11/2012	6:18:58 PM	PH3 MFC set to  0.000000
3/11/2012	6:18:58 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:18:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:18:58 PM	Tube furnace set to 200
3/11/2012	6:18:59 PM	H2 valve closed
3/11/2012	6:18:59 PM	BCl3 valve closed
3/11/2012	6:18:59 PM	PH3 valve closed
3/11/2012	6:18:59 PM	SiCl4 pre valve closed
3/11/2012	6:18:59 PM	SiCl4 post valve closed
3/11/2012	6:18:59 PM	Bypass valve closed
3/11/2012	6:18:59 PM	Bubbler valve closed
3/11/2012	6:18:59 PM	Helium valve opened
3/11/2012	6:18:59 PM	Main Vac valve opened
3/11/2012	6:18:59 PM	Helium MFC set to  20.000000
3/11/2012	6:18:59 PM	H2 MFC set to  0.000000
3/11/2012	6:18:59 PM	BCl3 MFC set to  0.000000
3/11/2012	6:18:59 PM	PH3 MFC set to  0.000000
3/11/2012	6:18:59 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:18:59 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:18:59 PM	Tube furnace set to 200
3/11/2012	6:19:00 PM	Helium valve closed
3/11/2012	6:19:00 PM	H2 valve closed
3/11/2012	6:19:00 PM	BCl3 valve closed
3/11/2012	6:19:00 PM	PH3 valve closed
3/11/2012	6:19:00 PM	SiCl4 pre valve closed
3/11/2012	6:19:00 PM	SiCl4 post valve closed
3/11/2012	6:19:00 PM	Bypass valve closed
3/11/2012	6:19:00 PM	Bubbler valve closed
3/11/2012	6:19:00 PM	Main Vac valve opened
3/11/2012	6:19:00 PM	Helium MFC set to  0.000000
3/11/2012	6:19:00 PM	H2 MFC set to  0.000000
3/11/2012	6:19:00 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:00 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:00 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:00 PM	Tube furnace set to 200
3/11/2012	6:19:01 PM	H2 valve closed
3/11/2012	6:19:01 PM	BCl3 valve closed
3/11/2012	6:19:01 PM	PH3 valve closed
3/11/2012	6:19:01 PM	SiCl4 pre valve closed
3/11/2012	6:19:01 PM	SiCl4 post valve closed
3/11/2012	6:19:01 PM	Bypass valve closed
3/11/2012	6:19:01 PM	Bubbler valve closed
3/11/2012	6:19:01 PM	Helium valve opened
3/11/2012	6:19:01 PM	Main Vac valve opened
3/11/2012	6:19:01 PM	Helium MFC set to  20.000000
3/11/2012	6:19:01 PM	H2 MFC set to  0.000000
3/11/2012	6:19:01 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:01 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:01 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:01 PM	Tube furnace set to 200
3/11/2012	6:19:03 PM	Helium valve closed
3/11/2012	6:19:03 PM	H2 valve closed
3/11/2012	6:19:03 PM	BCl3 valve closed
3/11/2012	6:19:03 PM	PH3 valve closed
3/11/2012	6:19:03 PM	SiCl4 pre valve closed
3/11/2012	6:19:03 PM	SiCl4 post valve closed
3/11/2012	6:19:03 PM	Bypass valve closed
3/11/2012	6:19:03 PM	Bubbler valve closed
3/11/2012	6:19:03 PM	Main Vac valve opened
3/11/2012	6:19:03 PM	Helium MFC set to  0.000000
3/11/2012	6:19:03 PM	H2 MFC set to  0.000000
3/11/2012	6:19:03 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:03 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:03 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:03 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:03 PM	Tube furnace set to 200
3/11/2012	6:19:03 PM	H2 valve closed
3/11/2012	6:19:03 PM	BCl3 valve closed
3/11/2012	6:19:03 PM	PH3 valve closed
3/11/2012	6:19:03 PM	SiCl4 pre valve closed
3/11/2012	6:19:03 PM	SiCl4 post valve closed
3/11/2012	6:19:03 PM	Bypass valve closed
3/11/2012	6:19:03 PM	Bubbler valve closed
3/11/2012	6:19:03 PM	Helium valve opened
3/11/2012	6:19:03 PM	Main Vac valve opened
3/11/2012	6:19:03 PM	Helium MFC set to  20.000000
3/11/2012	6:19:03 PM	H2 MFC set to  0.000000
3/11/2012	6:19:03 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:03 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:03 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:03 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:04 PM	Tube furnace set to 200
3/11/2012	6:19:05 PM	Helium valve closed
3/11/2012	6:19:05 PM	H2 valve closed
3/11/2012	6:19:05 PM	BCl3 valve closed
3/11/2012	6:19:05 PM	PH3 valve closed
3/11/2012	6:19:05 PM	SiCl4 pre valve closed
3/11/2012	6:19:05 PM	SiCl4 post valve closed
3/11/2012	6:19:05 PM	Bypass valve closed
3/11/2012	6:19:05 PM	Bubbler valve closed
3/11/2012	6:19:05 PM	Main Vac valve opened
3/11/2012	6:19:05 PM	Helium MFC set to  0.000000
3/11/2012	6:19:05 PM	H2 MFC set to  0.000000
3/11/2012	6:19:05 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:05 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:05 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:05 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:05 PM	Tube furnace set to 200
3/11/2012	6:19:05 PM	H2 valve closed
3/11/2012	6:19:05 PM	BCl3 valve closed
3/11/2012	6:19:05 PM	PH3 valve closed
3/11/2012	6:19:05 PM	SiCl4 pre valve closed
3/11/2012	6:19:05 PM	SiCl4 post valve closed
3/11/2012	6:19:05 PM	Bypass valve closed
3/11/2012	6:19:06 PM	Bubbler valve closed
3/11/2012	6:19:06 PM	Helium valve opened
3/11/2012	6:19:06 PM	Main Vac valve opened
3/11/2012	6:19:06 PM	Helium MFC set to  20.000000
3/11/2012	6:19:06 PM	H2 MFC set to  0.000000
3/11/2012	6:19:06 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:06 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:06 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:06 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:06 PM	Tube furnace set to 200
3/11/2012	6:19:06 PM	Helium valve closed
3/11/2012	6:19:06 PM	H2 valve closed
3/11/2012	6:19:06 PM	BCl3 valve closed
3/11/2012	6:19:06 PM	PH3 valve closed
3/11/2012	6:19:06 PM	SiCl4 pre valve closed
3/11/2012	6:19:06 PM	SiCl4 post valve closed
3/11/2012	6:19:06 PM	Bypass valve closed
3/11/2012	6:19:06 PM	Bubbler valve closed
3/11/2012	6:19:06 PM	Main Vac valve opened
3/11/2012	6:19:06 PM	Helium MFC set to  0.000000
3/11/2012	6:19:06 PM	H2 MFC set to  0.000000
3/11/2012	6:19:06 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:06 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:06 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:06 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:07 PM	Tube furnace set to 200
3/11/2012	6:19:08 PM	H2 valve closed
3/11/2012	6:19:08 PM	BCl3 valve closed
3/11/2012	6:19:08 PM	PH3 valve closed
3/11/2012	6:19:08 PM	SiCl4 pre valve closed
3/11/2012	6:19:08 PM	SiCl4 post valve closed
3/11/2012	6:19:08 PM	Bypass valve closed
3/11/2012	6:19:08 PM	Bubbler valve closed
3/11/2012	6:19:08 PM	Helium valve opened
3/11/2012	6:19:08 PM	Main Vac valve opened
3/11/2012	6:19:08 PM	Helium MFC set to  20.000000
3/11/2012	6:19:08 PM	H2 MFC set to  0.000000
3/11/2012	6:19:08 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:08 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:08 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:08 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:08 PM	Tube furnace set to 200
3/11/2012	6:19:09 PM	Helium valve closed
3/11/2012	6:19:09 PM	H2 valve closed
3/11/2012	6:19:09 PM	BCl3 valve closed
3/11/2012	6:19:09 PM	PH3 valve closed
3/11/2012	6:19:09 PM	SiCl4 pre valve closed
3/11/2012	6:19:09 PM	SiCl4 post valve closed
3/11/2012	6:19:09 PM	Bypass valve closed
3/11/2012	6:19:09 PM	Bubbler valve closed
3/11/2012	6:19:09 PM	Main Vac valve opened
3/11/2012	6:19:09 PM	Helium MFC set to  0.000000
3/11/2012	6:19:09 PM	H2 MFC set to  0.000000
3/11/2012	6:19:09 PM	BCl3 MFC set to  0.000000
3/11/2012	6:19:09 PM	PH3 MFC set to  0.000000
3/11/2012	6:19:09 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:19:09 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:19:09 PM	Tube furnace set to 0
3/11/2012	6:19:10 PM	Run finished at 6:19 PM
3/11/2012	6:22:14 PM	Recipe started at 6:22 PM
3/11/2012	6:22:14 PM	Helium valve closed
3/11/2012	6:22:14 PM	H2 valve closed
3/11/2012	6:22:14 PM	BCl3 valve closed
3/11/2012	6:22:14 PM	PH3 valve closed
3/11/2012	6:22:14 PM	SiCl4 pre valve closed
3/11/2012	6:22:14 PM	SiCl4 post valve closed
3/11/2012	6:22:14 PM	Main Vac valve closed
3/11/2012	6:22:14 PM	Bypass valve closed
3/11/2012	6:22:14 PM	Bubbler valve closed
3/11/2012	6:22:14 PM	Helium MFC set to  0.000000
3/11/2012	6:22:14 PM	H2 MFC set to  0.000000
3/11/2012	6:22:14 PM	BCl3 MFC set to  0.000000
3/11/2012	6:22:14 PM	PH3 MFC set to  0.000000
3/11/2012	6:22:14 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:22:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:22:14 PM	Tube furnace set to 0
3/11/2012	6:22:17 PM	Helium valve closed
3/11/2012	6:22:17 PM	BCl3 valve closed
3/11/2012	6:22:17 PM	PH3 valve closed
3/11/2012	6:22:17 PM	SiCl4 pre valve closed
3/11/2012	6:22:17 PM	SiCl4 post valve closed
3/11/2012	6:22:17 PM	Main Vac valve closed
3/11/2012	6:22:17 PM	Bypass valve closed
3/11/2012	6:22:17 PM	Bubbler valve closed
3/11/2012	6:22:17 PM	H2 valve opened
3/11/2012	6:22:17 PM	Helium MFC set to  0.000000
3/11/2012	6:22:17 PM	H2 MFC set to  500.000000
3/11/2012	6:22:17 PM	BCl3 MFC set to  0.000000
3/11/2012	6:22:17 PM	PH3 MFC set to  0.000000
3/11/2012	6:22:17 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:22:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:22:17 PM	Tube furnace set to 0
3/11/2012	6:23:22 PM	Helium valve closed
3/11/2012	6:23:22 PM	BCl3 valve closed
3/11/2012	6:23:22 PM	PH3 valve closed
3/11/2012	6:23:22 PM	SiCl4 pre valve closed
3/11/2012	6:23:22 PM	SiCl4 post valve closed
3/11/2012	6:23:22 PM	Main Vac valve closed
3/11/2012	6:23:22 PM	Bypass valve closed
3/11/2012	6:23:22 PM	H2 valve opened
3/11/2012	6:23:22 PM	Bubbler valve opened
3/11/2012	6:23:22 PM	Helium MFC set to  0.000000
3/11/2012	6:23:22 PM	H2 MFC set to  500.000000
3/11/2012	6:23:22 PM	BCl3 MFC set to  0.000000
3/11/2012	6:23:22 PM	PH3 MFC set to  0.000000
3/11/2012	6:23:22 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:23:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:23:22 PM	Tube furnace set to 0
3/11/2012	6:23:23 PM	Helium valve closed
3/11/2012	6:23:23 PM	BCl3 valve closed
3/11/2012	6:23:23 PM	PH3 valve closed
3/11/2012	6:23:23 PM	SiCl4 pre valve closed
3/11/2012	6:23:23 PM	SiCl4 post valve closed
3/11/2012	6:23:23 PM	Main Vac valve closed
3/11/2012	6:23:23 PM	Bypass valve closed
3/11/2012	6:23:23 PM	H2 valve opened
3/11/2012	6:23:23 PM	Bubbler valve opened
3/11/2012	6:23:23 PM	Helium MFC set to  0.000000
3/11/2012	6:23:23 PM	H2 MFC set to  500.000000
3/11/2012	6:23:23 PM	BCl3 MFC set to  0.000000
3/11/2012	6:23:23 PM	PH3 MFC set to  0.000000
3/11/2012	6:23:23 PM	SiCl4 MFC set to  0.000000
3/11/2012	6:23:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:23:24 PM	Tube furnace set to 1000
3/11/2012	6:43:24 PM	Helium valve closed
3/11/2012	6:43:24 PM	PH3 valve closed
3/11/2012	6:43:24 PM	Main Vac valve closed
3/11/2012	6:43:24 PM	Bypass valve closed
3/11/2012	6:43:24 PM	H2 valve opened
3/11/2012	6:43:24 PM	BCl3 valve opened
3/11/2012	6:43:24 PM	SiCl4 pre valve opened
3/11/2012	6:43:24 PM	SiCl4 post valve opened
3/11/2012	6:43:24 PM	Bubbler valve opened
3/11/2012	6:43:24 PM	Helium MFC set to  0.000000
3/11/2012	6:43:24 PM	H2 MFC set to  450.000000
3/11/2012	6:43:24 PM	BCl3 MFC set to  1.500000
3/11/2012	6:43:24 PM	PH3 MFC set to  0.000000
3/11/2012	6:43:24 PM	SiCl4 MFC set to  50.000000
3/11/2012	6:43:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:43:24 PM	Tube furnace set to 1000
3/11/2012	6:55:24 PM	Helium valve closed
3/11/2012	6:55:24 PM	BCl3 valve closed
3/11/2012	6:55:24 PM	Main Vac valve closed
3/11/2012	6:55:24 PM	Bypass valve closed
3/11/2012	6:55:24 PM	H2 valve opened
3/11/2012	6:55:24 PM	PH3 valve opened
3/11/2012	6:55:24 PM	SiCl4 pre valve opened
3/11/2012	6:55:24 PM	SiCl4 post valve opened
3/11/2012	6:55:24 PM	Bubbler valve opened
3/11/2012	6:55:24 PM	Helium MFC set to  0.000000
3/11/2012	6:55:24 PM	H2 MFC set to  450.000000
3/11/2012	6:55:24 PM	BCl3 MFC set to  0.000000
3/11/2012	6:55:24 PM	PH3 MFC set to  20.000000
3/11/2012	6:55:24 PM	SiCl4 MFC set to  50.000000
3/11/2012	6:55:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	6:55:24 PM	Tube furnace set to 1000
3/11/2012	7:00:24 PM	Helium valve closed
3/11/2012	7:00:24 PM	BCl3 valve closed
3/11/2012	7:00:24 PM	PH3 valve closed
3/11/2012	7:00:24 PM	SiCl4 pre valve closed
3/11/2012	7:00:24 PM	SiCl4 post valve closed
3/11/2012	7:00:24 PM	Main Vac valve closed
3/11/2012	7:00:24 PM	Bypass valve closed
3/11/2012	7:00:24 PM	H2 valve opened
3/11/2012	7:00:24 PM	Bubbler valve opened
3/11/2012	7:00:24 PM	Helium MFC set to  0.000000
3/11/2012	7:00:24 PM	H2 MFC set to  500.000000
3/11/2012	7:00:24 PM	BCl3 MFC set to  0.000000
3/11/2012	7:00:24 PM	PH3 MFC set to  0.000000
3/11/2012	7:00:24 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:00:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:00:24 PM	Tube furnace set to 950
3/11/2012	7:02:24 PM	Helium valve closed
3/11/2012	7:02:24 PM	BCl3 valve closed
3/11/2012	7:02:24 PM	PH3 valve closed
3/11/2012	7:02:24 PM	SiCl4 pre valve closed
3/11/2012	7:02:24 PM	SiCl4 post valve closed
3/11/2012	7:02:24 PM	Main Vac valve closed
3/11/2012	7:02:24 PM	Bypass valve closed
3/11/2012	7:02:24 PM	H2 valve opened
3/11/2012	7:02:24 PM	Bubbler valve opened
3/11/2012	7:02:24 PM	Helium MFC set to  0.000000
3/11/2012	7:02:24 PM	H2 MFC set to  500.000000
3/11/2012	7:02:24 PM	BCl3 MFC set to  0.000000
3/11/2012	7:02:24 PM	PH3 MFC set to  0.000000
3/11/2012	7:02:24 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:02:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:02:24 PM	Tube furnace set to 900
3/11/2012	7:04:24 PM	Helium valve closed
3/11/2012	7:04:24 PM	BCl3 valve closed
3/11/2012	7:04:24 PM	PH3 valve closed
3/11/2012	7:04:24 PM	SiCl4 pre valve closed
3/11/2012	7:04:24 PM	SiCl4 post valve closed
3/11/2012	7:04:24 PM	Main Vac valve closed
3/11/2012	7:04:24 PM	Bypass valve closed
3/11/2012	7:04:24 PM	H2 valve opened
3/11/2012	7:04:24 PM	Bubbler valve opened
3/11/2012	7:04:24 PM	Helium MFC set to  0.000000
3/11/2012	7:04:24 PM	H2 MFC set to  500.000000
3/11/2012	7:04:24 PM	BCl3 MFC set to  0.000000
3/11/2012	7:04:24 PM	PH3 MFC set to  0.000000
3/11/2012	7:04:24 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:04:24 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:04:25 PM	Tube furnace set to 850
3/11/2012	7:06:25 PM	H2 valve closed
3/11/2012	7:06:25 PM	BCl3 valve closed
3/11/2012	7:06:25 PM	PH3 valve closed
3/11/2012	7:06:25 PM	SiCl4 pre valve closed
3/11/2012	7:06:25 PM	SiCl4 post valve closed
3/11/2012	7:06:25 PM	Main Vac valve closed
3/11/2012	7:06:25 PM	Bypass valve closed
3/11/2012	7:06:25 PM	Helium valve opened
3/11/2012	7:06:25 PM	Bubbler valve opened
3/11/2012	7:06:25 PM	Helium MFC set to  500.000000
3/11/2012	7:06:25 PM	H2 MFC set to  0.000000
3/11/2012	7:06:25 PM	BCl3 MFC set to  0.000000
3/11/2012	7:06:25 PM	PH3 MFC set to  0.000000
3/11/2012	7:06:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:06:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:06:25 PM	Tube furnace set to 800
3/11/2012	7:08:25 PM	H2 valve closed
3/11/2012	7:08:25 PM	BCl3 valve closed
3/11/2012	7:08:25 PM	PH3 valve closed
3/11/2012	7:08:25 PM	SiCl4 pre valve closed
3/11/2012	7:08:25 PM	SiCl4 post valve closed
3/11/2012	7:08:25 PM	Main Vac valve closed
3/11/2012	7:08:25 PM	Bypass valve closed
3/11/2012	7:08:25 PM	Helium valve opened
3/11/2012	7:08:25 PM	Bubbler valve opened
3/11/2012	7:08:25 PM	Helium MFC set to  500.000000
3/11/2012	7:08:25 PM	H2 MFC set to  0.000000
3/11/2012	7:08:25 PM	BCl3 MFC set to  0.000000
3/11/2012	7:08:25 PM	PH3 MFC set to  0.000000
3/11/2012	7:08:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:08:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:08:25 PM	Tube furnace set to 750
3/11/2012	7:10:25 PM	H2 valve closed
3/11/2012	7:10:25 PM	BCl3 valve closed
3/11/2012	7:10:25 PM	PH3 valve closed
3/11/2012	7:10:25 PM	SiCl4 pre valve closed
3/11/2012	7:10:25 PM	SiCl4 post valve closed
3/11/2012	7:10:25 PM	Main Vac valve closed
3/11/2012	7:10:25 PM	Bypass valve closed
3/11/2012	7:10:25 PM	Helium valve opened
3/11/2012	7:10:25 PM	Bubbler valve opened
3/11/2012	7:10:25 PM	Helium MFC set to  500.000000
3/11/2012	7:10:25 PM	H2 MFC set to  0.000000
3/11/2012	7:10:25 PM	BCl3 MFC set to  0.000000
3/11/2012	7:10:25 PM	PH3 MFC set to  0.000000
3/11/2012	7:10:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:10:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:10:25 PM	Tube furnace set to 0
3/11/2012	7:30:25 PM	Helium valve closed
3/11/2012	7:30:25 PM	H2 valve closed
3/11/2012	7:30:25 PM	BCl3 valve closed
3/11/2012	7:30:25 PM	PH3 valve closed
3/11/2012	7:30:25 PM	SiCl4 pre valve closed
3/11/2012	7:30:25 PM	SiCl4 post valve closed
3/11/2012	7:30:25 PM	Main Vac valve closed
3/11/2012	7:30:25 PM	Bypass valve closed
3/11/2012	7:30:25 PM	Bubbler valve closed
3/11/2012	7:30:25 PM	Helium MFC set to  0.000000
3/11/2012	7:30:25 PM	H2 MFC set to  0.000000
3/11/2012	7:30:25 PM	BCl3 MFC set to  0.000000
3/11/2012	7:30:25 PM	PH3 MFC set to  0.000000
3/11/2012	7:30:25 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:30:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:30:25 PM	Tube furnace set to 0
3/11/2012	7:30:26 PM	Helium valve closed
3/11/2012	7:30:26 PM	H2 valve closed
3/11/2012	7:30:26 PM	BCl3 valve closed
3/11/2012	7:30:26 PM	PH3 valve closed
3/11/2012	7:30:26 PM	SiCl4 pre valve closed
3/11/2012	7:30:26 PM	SiCl4 post valve closed
3/11/2012	7:30:26 PM	Main Vac valve closed
3/11/2012	7:30:26 PM	Bubbler valve closed
3/11/2012	7:30:26 PM	Bypass valve opened
3/11/2012	7:30:26 PM	Helium MFC set to  0.000000
3/11/2012	7:30:26 PM	H2 MFC set to  0.000000
3/11/2012	7:30:26 PM	BCl3 MFC set to  0.000000
3/11/2012	7:30:26 PM	PH3 MFC set to  0.000000
3/11/2012	7:30:26 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:30:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:30:27 PM	Tube furnace set to 0
3/11/2012	7:31:13 PM	Helium valve closed
3/11/2012	7:31:13 PM	H2 valve closed
3/11/2012	7:31:13 PM	BCl3 valve closed
3/11/2012	7:31:13 PM	PH3 valve closed
3/11/2012	7:31:13 PM	SiCl4 pre valve closed
3/11/2012	7:31:13 PM	SiCl4 post valve closed
3/11/2012	7:31:13 PM	Main Vac valve closed
3/11/2012	7:31:13 PM	Bubbler valve closed
3/11/2012	7:31:13 PM	Bypass valve opened
3/11/2012	7:31:13 PM	Helium MFC set to  0.000000
3/11/2012	7:31:13 PM	H2 MFC set to  0.000000
3/11/2012	7:31:13 PM	BCl3 MFC set to  0.000000
3/11/2012	7:31:13 PM	PH3 MFC set to  0.000000
3/11/2012	7:31:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:31:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:31:13 PM	Tube furnace set to 0
3/11/2012	7:32:13 PM	Helium valve closed
3/11/2012	7:32:13 PM	H2 valve closed
3/11/2012	7:32:13 PM	BCl3 valve closed
3/11/2012	7:32:13 PM	PH3 valve closed
3/11/2012	7:32:13 PM	SiCl4 pre valve closed
3/11/2012	7:32:13 PM	SiCl4 post valve closed
3/11/2012	7:32:13 PM	Bypass valve closed
3/11/2012	7:32:13 PM	Bubbler valve closed
3/11/2012	7:32:13 PM	Main Vac valve opened
3/11/2012	7:32:13 PM	Helium MFC set to  0.000000
3/11/2012	7:32:13 PM	H2 MFC set to  0.000000
3/11/2012	7:32:13 PM	BCl3 MFC set to  0.000000
3/11/2012	7:32:13 PM	PH3 MFC set to  0.000000
3/11/2012	7:32:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	7:32:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	7:32:13 PM	Tube furnace set to 0
3/11/2012	7:32:14 PM	Run finished at 7:32 PM
3/11/2012	8:30:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	8:30:28 PM	Recipe started at 8:30 PM
3/11/2012	8:30:28 PM	Helium valve closed
3/11/2012	8:30:28 PM	H2 valve closed
3/11/2012	8:30:28 PM	BCl3 valve closed
3/11/2012	8:30:28 PM	PH3 valve closed
3/11/2012	8:30:28 PM	SiCl4 pre valve closed
3/11/2012	8:30:28 PM	SiCl4 post valve closed
3/11/2012	8:30:28 PM	Main Vac valve closed
3/11/2012	8:30:28 PM	Bypass valve closed
3/11/2012	8:30:28 PM	Bubbler valve closed
3/11/2012	8:30:28 PM	Helium MFC set to  0.000000
3/11/2012	8:30:28 PM	H2 MFC set to  0.000000
3/11/2012	8:30:28 PM	BCl3 MFC set to  0.000000
3/11/2012	8:30:28 PM	PH3 MFC set to  0.000000
3/11/2012	8:30:28 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:30:28 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:30:28 PM	Tube furnace set to 0
3/11/2012	8:30:31 PM	H2 valve closed
3/11/2012	8:30:31 PM	BCl3 valve closed
3/11/2012	8:30:31 PM	PH3 valve closed
3/11/2012	8:30:31 PM	SiCl4 pre valve closed
3/11/2012	8:30:31 PM	SiCl4 post valve closed
3/11/2012	8:30:31 PM	Main Vac valve closed
3/11/2012	8:30:31 PM	Bypass valve closed
3/11/2012	8:30:31 PM	Bubbler valve closed
3/11/2012	8:30:31 PM	Helium valve opened
3/11/2012	8:30:31 PM	Helium MFC set to  500.000000
3/11/2012	8:30:31 PM	H2 MFC set to  0.000000
3/11/2012	8:30:31 PM	BCl3 MFC set to  0.000000
3/11/2012	8:30:31 PM	PH3 MFC set to  0.000000
3/11/2012	8:30:31 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:30:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:30:32 PM	Tube furnace set to 0
3/11/2012	8:31:29 PM	Helium valve closed
3/11/2012	8:31:29 PM	H2 valve closed
3/11/2012	8:31:29 PM	BCl3 valve closed
3/11/2012	8:31:29 PM	PH3 valve closed
3/11/2012	8:31:29 PM	SiCl4 pre valve closed
3/11/2012	8:31:29 PM	SiCl4 post valve closed
3/11/2012	8:31:29 PM	Main Vac valve closed
3/11/2012	8:31:29 PM	Bypass valve closed
3/11/2012	8:31:29 PM	Bubbler valve closed
3/11/2012	8:31:29 PM	Helium MFC set to  0.000000
3/11/2012	8:31:29 PM	H2 MFC set to  0.000000
3/11/2012	8:31:29 PM	BCl3 MFC set to  0.000000
3/11/2012	8:31:29 PM	PH3 MFC set to  0.000000
3/11/2012	8:31:29 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:31:29 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:31:30 PM	Tube furnace set to 0
3/11/2012	8:31:31 PM	Run finished at 8:31 PM
3/11/2012	8:31:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2012	8:33:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2012	8:33:15 PM	Recipe started at 8:33 PM
3/11/2012	8:33:15 PM	Helium valve closed
3/11/2012	8:33:15 PM	H2 valve closed
3/11/2012	8:33:15 PM	BCl3 valve closed
3/11/2012	8:33:15 PM	PH3 valve closed
3/11/2012	8:33:15 PM	SiCl4 pre valve closed
3/11/2012	8:33:15 PM	SiCl4 post valve closed
3/11/2012	8:33:15 PM	Main Vac valve closed
3/11/2012	8:33:15 PM	Bubbler valve closed
3/11/2012	8:33:15 PM	Bypass valve opened
3/11/2012	8:33:15 PM	Helium MFC set to  0.000000
3/11/2012	8:33:15 PM	H2 MFC set to  0.000000
3/11/2012	8:33:15 PM	BCl3 MFC set to  0.000000
3/11/2012	8:33:15 PM	PH3 MFC set to  0.000000
3/11/2012	8:33:15 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:33:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:33:15 PM	Tube furnace set to 0
3/11/2012	8:34:13 PM	Helium valve closed
3/11/2012	8:34:13 PM	H2 valve closed
3/11/2012	8:34:13 PM	BCl3 valve closed
3/11/2012	8:34:13 PM	PH3 valve closed
3/11/2012	8:34:13 PM	SiCl4 pre valve closed
3/11/2012	8:34:13 PM	SiCl4 post valve closed
3/11/2012	8:34:13 PM	Main Vac valve closed
3/11/2012	8:34:13 PM	Bubbler valve closed
3/11/2012	8:34:13 PM	Bypass valve opened
3/11/2012	8:34:13 PM	Helium MFC set to  0.000000
3/11/2012	8:34:13 PM	H2 MFC set to  0.000000
3/11/2012	8:34:13 PM	BCl3 MFC set to  0.000000
3/11/2012	8:34:13 PM	PH3 MFC set to  0.000000
3/11/2012	8:34:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:34:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:34:13 PM	Tube furnace set to 0
3/11/2012	8:35:13 PM	Helium valve closed
3/11/2012	8:35:13 PM	H2 valve closed
3/11/2012	8:35:13 PM	BCl3 valve closed
3/11/2012	8:35:13 PM	PH3 valve closed
3/11/2012	8:35:13 PM	SiCl4 pre valve closed
3/11/2012	8:35:13 PM	SiCl4 post valve closed
3/11/2012	8:35:13 PM	Bypass valve closed
3/11/2012	8:35:13 PM	Bubbler valve closed
3/11/2012	8:35:13 PM	Main Vac valve opened
3/11/2012	8:35:13 PM	Helium MFC set to  0.000000
3/11/2012	8:35:13 PM	H2 MFC set to  0.000000
3/11/2012	8:35:13 PM	BCl3 MFC set to  0.000000
3/11/2012	8:35:13 PM	PH3 MFC set to  0.000000
3/11/2012	8:35:13 PM	SiCl4 MFC set to  0.000000
3/11/2012	8:35:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2012	8:35:14 PM	Tube furnace set to 0
3/11/2012	8:35:15 PM	Run finished at 8:35 PM
3/11/2012	8:35:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
